【摘要】：當(dāng)自混合干涉(SMI)發(fā)生在一個非準(zhǔn)直激光器外腔時,反射光將在激光器和外部物體之間發(fā)生多次反射,然后再返回激光內(nèi)腔與發(fā)出光耦合形成自混合干涉效應(yīng),這現(xiàn)象被稱為多重反饋自混合干涉效應(yīng)(MSMI)。與自混合干涉相比,它可以在不增加復(fù)雜算法和設(shè)備的前提下,成倍提高測量儀器的分辨率。這對于提高儀器的測量精度具有非常重要的意義。許多科研人員已經(jīng)開展了多重反饋自混合干涉現(xiàn)象和產(chǎn)生機理的研究。然而,目前還缺少多重反饋自混合干涉振動測量技術(shù)和多重反饋次數(shù)的判定等相關(guān)問題的研究。本課題利用多重反饋自混合干涉的分辨率高,光路簡單、能判別方向、自準(zhǔn)直、結(jié)構(gòu)緊湊、成本低等特點,開展多重反饋自混合干涉振動測量技術(shù)的研究,旨在解決自混合干涉振動測量中存在的測量誤差大、實時性差、抗干擾能力弱、通用性不強等問題,力求提高振動測量準(zhǔn)確性和通用性。本文主要研究對象是低頻微納米級的振動測量。在低頻范圍內(nèi),振動強度與位移成正比,所以本文通過振動位移表征振動強度和形變。本文的主要研究內(nèi)容如下:首先,針對多重反饋自混合干涉振動測量時,缺少相應(yīng)振動測量理論支持的問題,以自混合干涉三鏡腔(F-P)模型理論為基礎(chǔ),建立了多重反饋自混合干涉通用的相位方程、功率方程和位移方程,并對測量分辨率進行了分析。為多重反饋自混合干涉振動測量技術(shù)研究奠定了理論基礎(chǔ),并通過實驗方法研究外腔長和傾斜角度對多重反饋自混合干涉的影響。其次,針對相位解卷算法中跳變點檢測閾值判斷的問題,提出一種不需要判斷閾值的改進跳變點檢測算法。該算法利用干涉信號經(jīng)過微分處理后,有效條紋趨勢波動大,而無效條紋趨勢波動小的特點,通過獲取識別方波判別有效干涉條紋,根據(jù)有效干涉條紋確定峰谷值點位置,進而確定相位解卷算法中重構(gòu)振動位移的關(guān)鍵參數(shù),提高了干涉條紋檢測的準(zhǔn)確率,并把該算法應(yīng)用于多重反饋自混合干涉的振動重構(gòu)中。實驗結(jié)果表明,多重反饋自混合干涉的重構(gòu)誤差比自混合干涉減少了38%。再次,針對基于相位解卷方法中需要對光反饋因子和線性展寬因子進行聯(lián)合估計的問題,提出基于功率譜分析的多重反饋自混合干涉振動快速解調(diào)算法。該算法利用多重反饋自混合干涉信號功率譜中的極大值與第一類貝塞爾函數(shù)極大值對應(yīng)的特點,建立功率譜極大值與外部物體振幅的對應(yīng)關(guān)系及功率譜主頻的判斷規(guī)則,進而能快速計算出外部物體振動頻率和振幅。該方法不需對光反饋因子和線性展寬因子進行聯(lián)合估計,在獲取外部物體振動頻率及幅度的過程中只提取干涉信號功率譜的基頻及主頻所對應(yīng)的頻率,其他干擾信息均被屏蔽,提高了算法的抗干擾能力和解調(diào)速度。實驗結(jié)果表明,當(dāng)外部物體振幅小于5μm時,振幅解調(diào)的最大誤差是75nm,比自混合干涉的降低了53%。同時,本章提出了多重反饋自混合干涉反饋次數(shù)的判定規(guī)則,解決了多重反饋自混合干涉反饋次數(shù)無法區(qū)分的問題,并通過實驗進行了驗證。然后,針對多重反饋自混合干涉振動位移重構(gòu)誤差大,無法進行高精度測量的問題,提出正弦相位調(diào)制的振動位移重構(gòu)方法,該方法用電光相位調(diào)制器(EOM)對干涉信號進行正弦相位調(diào)制,建立調(diào)制信號頻譜的一次諧波和二次諧波與第一類貝塞爾函數(shù)第一階和第二階的對應(yīng)關(guān)系,提取頻譜的一次諧波和二次諧波進行實時相位計算,根據(jù)實時相位重構(gòu)外部物體的振動位移。實驗結(jié)果表明,對于振幅小于5μm的低頻振動,重構(gòu)誤差小于5nm。因為重構(gòu)振動位移時只用到了調(diào)制信號頻譜一次、二次諧波,其它成分均被屏蔽,所以該方法具有很好的抗干擾性能。最后,為了驗證基于正弦相位調(diào)制的多重反饋自混合干涉振動測量技術(shù)的性能,從不同振幅、不同頻率兩方面與多普勒測振儀(LDV)進行對比。實驗結(jié)果表明,該技術(shù)重構(gòu)的速度在不同振幅、不同頻率兩方面與LDV有較好的一致性。將多重反饋自混合干涉用于管道泄漏檢測上,提出了管道泄漏檢測單點定位方法。在管道的一端同一檢測點安裝兩個多重反饋自混合干涉?zhèn)鞲衅?一個用于測量管道橫向振動,另一個用于測量管道縱向振動,利用管道壁內(nèi)橫波和縱波傳播速度不同,通過二者的時間差測量泄漏點到檢測點的距離,同時利用干涉條紋傾斜方向來判斷聲源方向。實驗結(jié)果表明,所設(shè)計的單點泄漏定位傳感器能在管道一端正確測量泄漏位置,定位誤差小于5%。
[Abstract]:When a self-mixing interference (smi) occurs in an outer cavity of a non-collimated laser, the reflected light will be reflected multiple times between the laser and the external object and then return to the laser cavity to form a self-mixing interference effect with the emitted light, This phenomenon is referred to as multiple feedback self-mixing interference effect (MSMI). Compared with the self-mixing interference, it can multiply the resolution of the measuring instrument under the premise of not adding complex algorithm and equipment. This is of great importance to improve the measuring accuracy of the instrument. Many researchers have conducted multiple feedback self-mixing interference phenomena and mechanism research. However, there is a lack of research on the related problems of multi-feedback self-mixing interference vibration measurement technology and multiple feedback times. This paper makes use of the characteristics of high resolution, simple optical path, direction, self-collimation, compact structure and low cost of multiple feedback self-mixing interference, and carries out the research on multi-feedback self-mixing interference vibration measurement technology. aiming at solving the problems of large measurement error, poor real-time performance, weak anti-interference capability, strong universality and the like existing in the self-mixing interference vibration measurement, and aims to improve the accuracy and the universality of vibration measurement. The main research object is the low-frequency micro-scale vibration measurement. In the low frequency range, the vibration intensity is proportional to the displacement, so the vibration intensity and deformation are characterized by vibration displacement. The main contents of this paper are as follows: Firstly, based on the theory of hybrid interference three-mirror cavity (F-P) model, a general phase equation of multiple feedback self-mixing interference is established based on the theory of hybrid interference three-mirror cavity (F-P) model. The power equation and displacement equation are analyzed and the measurement resolution is analyzed. This paper establishes a theoretical basis for multi-feedback self-mixing interference vibration measurement technology, and studies the influence of external cavity length and tilt angle on multi-feedback self-mixing interference through experimental methods. Secondly, an improved hop-point detection algorithm which does not need to judge the threshold is proposed for the problem of threshold judgment of the jump point detection in the phase deconvolution algorithm. According to the algorithm, after the interference signal is subjected to differential processing, the effective fringe trend fluctuation is large, and the characteristic that the fluctuation of the invalid stripe trend is small, the peak valley value point position is determined according to the effective interference fringe by acquiring the identification square wave judging effective interference fringe, Furthermore, the key parameters of the reconstruction vibration displacement in the phase deconvolution algorithm are determined, the accuracy of the interference fringe detection is improved, and the algorithm is applied to the vibration reconstruction of multiple feedback self-mixing interference. The experimental results show that the reconstruction error of multiple feedback self-mixing interference is reduced by 38% compared with the self-mixing interference. Thirdly, a multi-feedback self-mixing interference vibration fast demodulation algorithm based on power spectrum analysis is proposed for the problem of combining the optical feedback factor and the linear broadening factor in the phase-based deconvolution method. The algorithm uses the characteristic of the maximum value in the power spectrum of the multi-feedback self-mixing interference signal and the maximum value of the first class Bezier function to establish a judgment rule of the corresponding relation between the power spectrum maximum value and the amplitude of the external object and the dominant frequency of the power spectrum, in addition, that vibration frequency and the amplitude of the external object can be rapidly calculated. The method does not need to jointly estimate the optical feedback factor and the linear broadening factor, extracts only the frequency corresponding to the fundamental frequency and the dominant frequency of the interference signal power spectrum in the process of acquiring the vibration frequency and amplitude of the external object, and the other interference information is shielded, and the anti-jamming capability and the demodulation speed of the algorithm are improved. The experimental results show that when the amplitude of external object is less than 5. m, the maximum error of amplitude demodulation is 75nm, which is 53% lower than that of self-mixing interference. At the same time, this chapter puts forward the decision rule of multiple feedback self-mixing interference feedback times, solves the problem that multiple feedback self-mixing interference feedback times cannot be distinguished, and verifies by experiment. then, aiming at the problem that the multi-feedback self-mixing interference vibration displacement reconstruction error is large and the high-precision measurement cannot be carried out, a sinusoidal phase modulation vibration displacement reconstruction method is proposed, and the method uses an electro-optical phase modulator (EOM) to carry out sine phase modulation on the interference signal, establishing a corresponding relation between the primary harmonic and the second harmonic of the frequency spectrum of the modulated signal and the first order and the second order of the first class of bezier functions, extracting the primary harmonic and the second harmonic of the frequency spectrum for real-time phase calculation, and reconstructing the vibration displacement of the external object according to the real-time phase. The experimental results show that the reconstruction error is less than 5nm for low frequency vibration with amplitude less than 5. m the method has good anti-interference performance because only one time, the second harmonic and the other components of the modulation signal are shielded when the vibration displacement is reconstructed. Finally, in order to verify the performance of multi-feedback self-mixing interference vibration measurement technology based on sinusoidal phase modulation, it is compared with the Doppler vibrometer (LDV) from different amplitudes and different frequencies. The experimental results show that the speed of the technique is consistent with LDV at different amplitudes and different frequencies. Multi-feedback self-mixing interference is used for pipeline leakage detection, and a single point positioning method for pipeline leakage detection is proposed. two multiple feedback self-mixing interference sensors are arranged at the same detection point at one end of the pipeline, one is used for measuring the transverse vibration of the pipeline, the other is used for measuring the longitudinal vibration of the pipeline, and the transverse wave and the longitudinal wave propagation speed in the pipeline wall are different, the distance between the leakage point and the detection point is measured by the time difference of the two, and the direction of the sound source is judged by the oblique direction of the interference fringe. The experimental results show that the designed single-point leak positioning sensor can measure the leakage position correctly at one end of the pipeline, and the positioning error is less than 5%.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2017
【分類號】：TH744.5

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