本文選題：質(zhì)量量子基準(zhǔn) + 功率天平　； 參考：《哈爾濱工業(yè)大學(xué)》2017年博士論文

【摘要】：在國際單位制(SI)7個基本單位中,千克kg是唯一一個沒有被量子化定義的基本單位。千克的量子化定義方法因其科學(xué)意義之重大,科研難度之高,被《Nature》雜志于2012年列為世界六大科學(xué)難題之一。能量天平法測量普朗克常數(shù)是我國自主提出的千克量子化定義方法,其基本原理為利用兩通電線圈(線圈組)產(chǎn)生電磁力來與標(biāo)準(zhǔn)砝碼的重力相平衡,建立起質(zhì)量基準(zhǔn)與時間量、電學(xué)量、長度量等已經(jīng)量子化的基本量之間的聯(lián)系,進(jìn)而間接地實(shí)現(xiàn)質(zhì)量單位的量子化基準(zhǔn)。在這一過程中,線圈組之間的相對位置測量系統(tǒng)發(fā)揮著至關(guān)重要的作用,它不僅實(shí)現(xiàn)了能量天平對于“米”的量子化基準(zhǔn)的溯源,而且保證了能量天平電磁力積分區(qū)間的一致性。能量天平線圈組相對位置測量系統(tǒng)分為:相對位移測量系統(tǒng)和相對零位測量系統(tǒng)兩個部分。針對線圈組相對位移的測量需求,能量天平目前采用的是邁克爾遜型激光外差干涉測量方法,該方法具有量程大、亞納米量級分辨力的優(yōu)勢,但該方法由于存在納米量級的周期性非線性誤差,而會為普朗克常數(shù)的測量結(jié)果帶來10-7量級的相對測量不確定度。針對線圈組相對零位的測量需求,能量天平目前采用的是機(jī)械限位的方法來確定相對零位,缺少有效的、測量不確定度在亞微米量級的相對零位測量方法。相對零位測量方法的缺失破壞了能量天平積分區(qū)間的一致性,會為普朗克常數(shù)的測量結(jié)果帶來10-7量級甚至更高量級的相對測量不確定度。上述兩個問題的存在,制約了能量天平實(shí)現(xiàn)優(yōu)于2×10-8相對測量不確定度的目標(biāo)。本課題通過研究能量天平工作原理和總體測量誤差模型,分別建立了線圈組相對位移測量誤差模型與相對零位測量誤差模型�；谏鲜瞿Ｐ�,提出了相應(yīng)的非線性誤差抑制方法,以及線圈組相對零位測量方法。隨后,本文對基于上述方法搭建的測量系統(tǒng)的測量不確定度進(jìn)行評定。論文針對上述內(nèi)容進(jìn)行了深入的理論和實(shí)驗(yàn)研究,主要研究內(nèi)容和結(jié)果如下:針對線圈組相對位移測量系統(tǒng)中存在有納米量級的周期性非線性誤差的問題,提出了一種基于I/O(輸入/輸出)共光路式空間分離布局的非線性誤差抑制方法。該方法利用輸入/輸出共光路的空間分離結(jié)構(gòu),避免了線圈組相對位移測量中的交叉混疊造成的非線性誤差;通過定量約束光路內(nèi)部的虛反射率,抑制了線圈組相對位移測量中自混疊造成的非線性誤差。另外,特別針對能量天平真空環(huán)境測量所設(shè)計(jì)的I/O共光路結(jié)構(gòu),可以令輸入光路與輸出光路在空間上完全重合,提高了真空中相對位移測量的可操作性。理論和仿真結(jié)果表明,該方法可以將線圈組相對位移測量中的非線性誤差的幅值降低至0.2 nm。針對線圈組相對零位測量方法缺失的問題,提出了一種基于窗口屏蔽差分電容傳感的相對零位測量方法。在該方法中,屏蔽窗口被固定于懸掛線圈上,電容極板被固定于激勵線圈上。二者組合形成差分電容傳感器。該方法利用屏蔽窗口來遮蔽差分電容極板的正對面積,進(jìn)而建立差分電容的輸出值與能量天平線圈組相對位置之間的線性關(guān)系,避免了懸掛線圈的晃動對于相對零位測量準(zhǔn)確度的影響。利用保角變換理論,建立了差分電容傳感器的模型,并對其靈敏度,以及在x、y軸方向的抗干擾能力進(jìn)行了理論分析。仿真結(jié)果表明,基于該方法設(shè)計(jì)的相對零位傳感器的非線性在0.2μm以內(nèi),x、y軸方向的位移擾動對于測量不確定度的影響分別小于0.17μm與0.08μm。本課題對上述研究內(nèi)容進(jìn)行了實(shí)驗(yàn)驗(yàn)證。首先,本課題驗(yàn)證了基于雙頻自混疊的周期性非線性誤差模型,實(shí)驗(yàn)結(jié)果表明相對位移測量中自混疊造成的非線性誤差幅值可以達(dá)到1 nm,在能量天平相對位移測量系統(tǒng)中必須予以抑制;其次,驗(yàn)證了基于I/O共光路式空間分離布局的非線性誤差抑制方法,實(shí)驗(yàn)結(jié)果表明,該方法可以將非線性誤差引入的標(biāo)準(zhǔn)測量不確定度由納米量級降低至0.16 nm;最后,驗(yàn)證了基于窗口屏蔽差分電容傳感的相對零位測量方法,實(shí)驗(yàn)結(jié)果表明,該方法可以將相對零位測量引入的合成標(biāo)準(zhǔn)測量不確定度由微米量級降低至0.2μm。本文提出的方法滿足了能量天平實(shí)現(xiàn)2×10~(-8)相對測量不確定度的需求。
[Abstract]:Among the 7 basic units of the international unit system (SI), kilogram kg is the only basic unit that has not been quantized. The quantized definition of kilogram is of great scientific significance and the difficulty of scientific research is high. magazine is one of the six major scientific problems in the world in 2012. The measurement of the Planck constant by the energy balance method is our own autonomy The principle of a kilogram quantized definition is proposed. The basic principle is to balance the gravity of the standard weight by generating the electromagnetic force from the two electric coil (coil group), and establishing the connection between the mass datum and the amount of time, electrical quantity, length and so on. In this way, the quantized reference of the mass unit is realized indirectly. In the process, the relative position measurement system between the coils plays a vital role. It not only realizes the traceability of the energy balance to the quantized datum of "rice", but also ensures the consistency of the integration interval of the energy balance. The phase alignment measurement system of the energy balance coil is divided into the relative displacement measurement system and the phase. For the two parts of the zero position measurement system, in view of the measurement requirement of the relative displacement of the coil group, the energy balance is currently adopted by the Michelson laser heterodyne interferometry. This method has the advantages of large range and subnanometer resolution, but this method will be Planck constant because of the periodic nonlinear error of nanoscale. The results of the number of measurements bring 10-7 magnitude of relative measurement uncertainty. For the measurement requirement of the relative zero position of the coil group, the energy balance is currently using a mechanical limit method to determine the relative zero position, the lack of effective measurement of the relative zero measurement of the uncertainty in the submicron magnitude. The loss of the relative zero measurement method The consistency of the energy balance integration interval will bring the relative measurement uncertainty of 10-7 or even higher magnitude for the measurement results of the Planck constant. The existence of the above two problems restricts the goal of the energy balance to be better than 2 * 10-8 relative measurement uncertainty. The relative displacement measurement error model and relative zero position measurement error model of the coil group are established respectively. Based on the above model, the corresponding nonlinear error suppression method and the relative zero position measurement method of the coil group are proposed. Then, the measurement uncertainty of the measurement system built based on the above method is evaluated. The main contents and results are as follows: in view of the problem that there are periodicity nonlinear errors in the relative displacement measurement system of the coil group, a nonlinear error suppression method based on I/O (input / output) common path spatial separation layout is proposed. The method uses the spatial separation structure of the input / output common optical path to avoid the nonlinear error caused by the cross mixing in the measurement of the relative displacement of the coil group, and the non linear error caused by the self aliasing in the relative displacement measurement of the coil group is restrained by quantificationally restraining the imaginary reflectivity inside the optical path. In addition, the energy balance vacuum ring is especially aimed at the energy balance. The I/O common path structure designed by the border survey can make the input light path and the output optical path completely overlapped in space, and improve the maneuverability of the relative displacement measurement in the vacuum. The theoretical and simulation results show that the method can reduce the amplitude of the nonlinear error in the relative displacement measurement of the coil group to 0.2 nm. for the relative zero position of the coil group. A relative zero position measurement method based on window screening differential capacitance sensing is proposed. In this method, the shielding window is fixed on the suspension coil and the capacitor plate is fixed on the excitation coil. The two combination forms a differential capacitance sensor. This method uses shielded window to cover the differential capacitor plate. The linear relationship between the output value of the differential capacitance and the relative position of the energy balance coil is established, and the influence of the sloshing of the suspension coil on the accuracy of relative zero position measurement is avoided. By using the theory of conformal transformation, the model of the differential capacitance sensor is established, and its sensitivity to the direction of the X and the Y axis is resistant to dry. The simulation results show that the nonlinearity of the relative zero position sensor based on this method is less than 0.2 m, and the influence of the displacement disturbance on the direction of X and Y axis is less than 0.17 mu m and 0.08 mu m. respectively. The experimental results show that the amplitude of the nonlinear error caused by the self aliasing can reach 1 nm in the relative displacement measurement, and it must be suppressed in the relative displacement measurement system of the energy balance. Secondly, the nonlinear error suppression method based on the I/O common path spatial separation layout is verified, and the experimental junction is verified. The results show that the method can reduce the standard measurement uncertainty introduced by the nonlinear error from nanometer to 0.16 nm. Finally, the relative zero position measurement method based on window shielding differential capacitance sensing is verified. The experimental results show that the method can make the synthetic standard measurement uncertainty introduced by the relative zero position measurement from the micron order of magnitude. Reduced to 0.2 mu m., the proposed method meets the need of energy balance to achieve the relative measurement uncertainty of 2 * 10~ (-8).
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2017
【分類號】：TH715

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