本文選題：微加工　切入點(diǎn)：流體分配　出處：《哈爾濱工業(yè)大學(xué)》2017年博士論文　論文類型：學(xué)位論文

【摘要】：微米級(jí)結(jié)構(gòu)越來越多的應(yīng)用于微機(jī)電系統(tǒng)、微流控裝置以及微光學(xué)器件等領(lǐng)域。但是,現(xiàn)有的微加工技術(shù)難以同時(shí)兼顧在設(shè)備成本、執(zhí)行過程復(fù)雜程度、設(shè)計(jì)制造靈活性和加工分辨率等,例如光刻技術(shù)雖然能夠制造出極小尺寸的結(jié)構(gòu),但是需要經(jīng)歷繁瑣步驟且缺乏設(shè)計(jì)靈活性。因此嚴(yán)重的制約了微米級(jí)結(jié)構(gòu)的進(jìn)一步廣泛應(yīng)用。針對(duì)目前微加工方法的不足,本文將在構(gòu)建機(jī)器人化流體分配微加工系統(tǒng)和理論分析加工過程的基礎(chǔ)上,利用不同性質(zhì)的功能性流體和制造策略,進(jìn)行不同機(jī)器人化流體分配微加工方法及其應(yīng)用的研究。首先通過使用自制微米級(jí)微管和顯微視覺反饋系統(tǒng),構(gòu)建具有單次分配百飛升(10-15 L)數(shù)量級(jí)流體能力的機(jī)器人化流體分配微加工系統(tǒng)。提出機(jī)器人化流體分配微加工的基本策略。然后對(duì)微加工過程進(jìn)行理論分析,根據(jù)流體流變性質(zhì)的不同,分別建立牛頓型流體在微管中流動(dòng)模型和非牛頓型流體在微管中流動(dòng)模型。建立基于考慮接觸角滯后Young-Laplace方程的微管尖端到基底流體傳輸模型,并通過仿真研究得到各工作參數(shù)與微管尖端和基底表面之間液橋毛細(xì)力的關(guān)系。利用牛頓型流體,實(shí)現(xiàn)基于牛頓型流體的流體分配微加工方法。提出基于機(jī)器人化分配氫氟化鉀水溶液的二氧化硅直寫式刻蝕方法。該方法具有間隔和連續(xù)兩種工作模式,可分別制造出點(diǎn)和線型刻蝕特征。理論分析二氧化硅直寫式刻蝕的終極分辨率和邊界粗糙度,實(shí)驗(yàn)研究微管運(yùn)動(dòng)速度和應(yīng)用壓強(qiáng)對(duì)點(diǎn)和線型刻蝕特征形狀和大小的影響。驗(yàn)證直寫式刻蝕的二氧化硅薄膜作為硬掩膜選擇性各向異刻蝕單晶硅的有效性。提出基于機(jī)器人分配紫外固化透明聚合物的球面型和圓柱面型微透鏡制造方法。分析影響微透鏡制造方法成敗的工作參數(shù),實(shí)驗(yàn)研究停留時(shí)間和應(yīng)用壓強(qiáng)對(duì)球面型微透鏡直徑的影響規(guī)律,實(shí)驗(yàn)研究微管運(yùn)動(dòng)速度和應(yīng)用壓強(qiáng)對(duì)圓柱面型微透鏡寬度的影響規(guī)律。并分別展示所能實(shí)現(xiàn)的最小球面型微透鏡直徑和最小圓柱面型微透鏡寬度。對(duì)所制造的微透鏡及其陣列的表面形貌,大小穩(wěn)定性和聚光能力進(jìn)行表征,驗(yàn)證基于機(jī)器人化分配紫外固化透明聚合物的球面型和圓柱面型平凸微透鏡陣列制造方法的有效性和可靠性。實(shí)現(xiàn)機(jī)器人化分配紫外固化透明聚合物的球面型和圓柱面型平凸微透鏡陣列制造方法。通過控制液橋液滴添加的位置,該方法可分別在“點(diǎn)融合”模式下獲得“點(diǎn)”型三維微結(jié)構(gòu),在“點(diǎn)連點(diǎn)”模式下獲得“線”型三維微結(jié)構(gòu)。通過改變基底表面的疏水性、調(diào)節(jié)液橋液滴體積的大小和設(shè)計(jì)預(yù)先固定特征的形狀和相對(duì)大小等,方便地獲得各種各樣形貌的三維微結(jié)構(gòu),例如直線、三角形、四邊形、五邊形和六邊形限制特征。最后展示該方法在微流控領(lǐng)域中制造圓形橫截面微流控溝道鑄造模具,在微光學(xué)領(lǐng)域中制造類半橢圓型和圓柱面型平凸微透鏡及其陣列。利用粘彈性流體,實(shí)現(xiàn)基于粘彈性流體的流體分配微加工方法。提出基于機(jī)器人化分配粘彈性流體的快速成型圓型橫截面微流控溝道的方法。研究各工作參數(shù)(微管運(yùn)動(dòng)速度、應(yīng)用壓強(qiáng)、微管與基底之間距離和沉積層數(shù))對(duì)微流控溝道橫截面形狀和大小的影響,研究基底表面疏水性對(duì)鑄造模具邊緣處弧度缺陷的影響,得到該快速成型方法的極限分辨率,并利用“液體繩繞”效應(yīng)直接構(gòu)造出曲線型的微流控溝道模具。通過制造各種復(fù)雜的微流控結(jié)構(gòu)展示該方法的可行性。提出基于機(jī)器人化分配粘彈性流體的薄膜微圖案直寫式加工方法。研究各工作參數(shù)(微管運(yùn)動(dòng)速度、應(yīng)用壓強(qiáng)、微管與基底之間距離)對(duì)被沉積特征寬度的影響,研究硅酮流體由微管尖端到基底表面的傳輸模式,并應(yīng)用于分別制造玻璃基底上的銅微電極、二氧化硅硬掩膜和金屬鉻透明玻璃光掩膜。
[Abstract]:Micron structure more and more applications in microelectromechanical systems, microfluidic device and micro optics and other fields. However, the existing micro processing technology is difficult to balance the cost of equipment, process complexity, design flexibility and manufacturing processing resolution, such as lithography technology although can produce a very small size of the structure, but the need to through the tedious steps and the lack of design flexibility. It restricts the further application of micron structure. Aiming at the shortcomings of micro machining method, this paper will be based on designing robotic fluid distribution micro machining system and the theoretical analysis of the machining process, the use of different functional fluids and manufacturing strategies of different robots the distribution of fluid micro processing method and its application. Firstly, by using self-made micron microtubules and micro vision feedback system, build out There is a single distribution soaring 100 (10-15 L) robotic fluid distribution order fluid capacity of the micro machining system. Put forward the basic strategy of robot of fluid distribution. Then the micro machining and micro machining process were analyzed, according to the rheological properties of fluid, established Newton fluid in the microchannel flow model and non Newton type the fluid flow model in the microchannel is established considering the contact angle hysteresis. The Young-Laplace equation of microtubule tip to the basal fluid transmission based on the model, and the relationship between the working parameters and microtubule tip and substrate surface of liquid bridge capillary force through simulation. Using Newton fluid, the fluid distribution Newton fluid based on micro machining method is put forward. The robot silica distribution of hydrogen fluoride potassium aqueous etching method based on direct write. This method has two consecutive intervals and work modes can be divided into Don't make a point and linear etching characteristics. Theoretical analysis of direct write silica etching and the ultimate resolution of the boundary roughness, experimental study on the effect of microtubule movement speed and pressure on the application point and the linear characteristics of the shape and size of the etched silicon dioxide film. Verify the direct write as effective etching hard mask anisotropic silicon etching selectivity the distribution of UV curing robot. Transparent polymer spherical and cylindrical micro lens manufacturing method. Based on the working parameters of the micro lens manufacturing method or analysis of influence, experimental study on residence time and pressure on the application of spherical micro lens effect of the diameter of the influence of the research of microtubule movement velocity and pressure on the cylindrical micro lens application the width of the display. And can realize the minimum spherical micro lens diameter and minimum cylindrical lensed width of. Manufacture of micro lens and lens array, the surface morphology, size stability and focusing ability were characterized to validate the robot distribution of UV curable transparent polymer spherical and cylindrical surface convex microlens array fabrication method and reliability. Based on the robot distribution of UV curable transparent polymer spherical and cylindrical convex surface manufacturing method of micro lens array. By controlling the position of liquid bridge drop added, the method can respectively in the "fusion" mode to get the "point" type three-dimensional micro structure, in the "connect the dots" mode to get the "line" type three-dimensional micro structure. By changing the hydrophobic surface of the substrate, and adjust the size of the design of liquid bridge and the droplet size of the pre fixed characteristics of the shape and relative size, easy access to a variety of three-dimensional topography of micro structures, such as linear, triangular, quadrilateral, five sides and six Edge shape features. Finally the limit display method in the field of microfluidic fabrication of circular cross-section microfluidic channel casting mold manufacturing, semi elliptical and cylindrical convex surface micro lens and lens array in the field of micro optics. Using the viscoelastic fluid flow, realize the body distribution of viscoelastic fluid based on micro machining method is proposed. Rapid prototyping of circular cross-section robot distribution of viscoelastic fluid in microfluidic channel. Based on the study of the operating parameters (microtubule movement speed, applied pressure, and substrate distance between microtubules and sedimentary layers) of the microfluidic channel cross-section shape and size, the effect of surface hydrophobic substrate for casting mold at the edge of the radian of defects, ultimate resolution of the rapid prototyping method, and directly constructed curve type microfluidic channel mold using liquid rope through a variety of complex manufacturing "effect. 鐨勫井嫻佹帶緇撴瀯灞曠ず璇ユ柟娉曠殑鍙鎬，

本文編號(hào)：1562498