【摘要】：本文采用二次陽極氧化方法制備了多孔陽極氧化鋁模板,同時制備了三角形、正方形、管狀多孔陽極氧化鋁模板,利用掃描電子顯微鏡(SEM)和X射線衍射儀(XRD)研究了其形貌與結(jié)構(gòu),結(jié)果表明多孔陽極氧化鋁膜為非晶態(tài)結(jié)構(gòu),其孔洞呈有序排列,孔徑均勻,約為65nm。另一方面,研究了高溫退火對多孔陽極氧化鋁膜形貌的影響,結(jié)果發(fā)現(xiàn)多孔陽極氧化鋁膜含有鋁元素；當退火溫度在900℃及以下,其形貌沒有明顯的變化,但當退火溫度達到1100℃時,其表面卻出現(xiàn)了熔化現(xiàn)象；多孔陽極氧化鋁膜的結(jié)晶溫度很大程度上取決于其厚度。 以阻擋層經(jīng)過薄化處理的多孔氧化鋁為模板,采用恒壓電沉積法成功制備了有序Cu納米線陣列,并用SEM、XRD等對該陣列進行了結(jié)構(gòu)分析。結(jié)果表明Cu納米線為面心立方結(jié)構(gòu),直徑約為65nm,長度約為15μm,與所用多孔陽極氧化鋁模板一致。
[Abstract]:In this paper, porous anodic alumina templates have been prepared by secondary anodizing method, and triangular, square and tubular porous anodic alumina templates have been prepared. Scanning electron microscope (SEM) and X-ray diffractometer (XRD) were used to study the morphology and structure of the films. The results show that the porous anodized aluminum oxide films are amorphous, the pores are arranged in order and the pore size is about 65 nm. On the other hand, the effect of high temperature annealing on the morphology of porous anodized aluminum film was studied. It was found that the porous anodized aluminum film contained aluminum element. When the annealing temperature is below 900 鈩，

本文編號：2458113