本文選題：鐵氧體薄膜 + Sol-gel　； 參考：《蘭州大學(xué)》2011年碩士論文

【摘要】：半導(dǎo)體集成技術(shù)的快速發(fā)展,要求電子元器件小型化和高頻化,因而薄膜型材料近年來引起了人們廣泛的關(guān)注。NiZn鐵氧體具有高的電阻率和共振頻率,適用于各種變壓器,電感器等,在通訊、計算機、抗電磁干擾、電子等領(lǐng)域廣泛應(yīng)用。在NiZn鐵氧體中摻雜適量的Cu,可以對NiZn鐵氧體的適用頻段進行一定的調(diào)節(jié)和改善,NiCuZn鐵氧體已經(jīng)成為NiZn系鐵氧體中十分重要的分支。因而制備出性能優(yōu)良的NiCuZn鐵氧體薄膜具有重要意義。 本文通過sol-gel旋轉(zhuǎn)涂層方法制備了NiCuZn鐵氧體薄膜,研究了溶膠性質(zhì)、退火溫度、保溫時間、旋涂過程等工藝條件對NiCuZn鐵氧體薄膜晶體結(jié)構(gòu)、微觀形貌以及磁性能方面的影響,同時還研究了成份變化、磁場真空快速熱處理對鐵氧體薄膜性能的影響,從中摸索提高鐵氧體薄膜飽和磁度Ms和降低矯頑力Hc的方法。通過X射線衍線儀、振動樣品磁強計、掃描電鏡以及原子力學(xué)顯微鏡等方法對NiCuZn鐵氧體薄膜進行表征,得到以下結(jié)論： (1)通過對干凝膠的TG-DTA曲線分析,確定了制備過程中去除NiCuZn鐵氧體薄膜的水份和有機物的溫度分別為120℃和300℃。當勻膠機轉(zhuǎn)速4000rpm,旋涂時間30s,旋涂三層時制備的NiCuZn鐵氧體薄膜均勻,性能較好,薄膜的厚度約為240nm。 (2)對溶膠性質(zhì)的研究發(fā)現(xiàn),溶度為0.2mol/L、陳化24小時、聚乙二醇加入量為25g/L的溶膠制備的NiCuZn鐵氧體薄膜性能最佳。 (3)將NiCuZn鐵氧體薄膜樣品進行退火處理。升溫速率為2℃/min,保溫2小時,500℃樣薄膜樣品為單相的尖晶石結(jié)構(gòu),高于600℃,由于Zn元素的揮發(fā),出現(xiàn)a-Fe2O3的雜相。薄膜的飽和磁化強度Ms和矯頑力Hc都隨溫度增加先增大后減小,800℃退火的鐵氧體薄膜具有最大的飽和磁化強度Ms=355 emu/cc,接近對應(yīng)鐵氧體塊體的飽和磁化強度,對應(yīng)的矯頑力Hc=150 Oe�？梢�,sol-gel方法可有效降低NiCuZn鐵氧體的燒結(jié)溫度,實現(xiàn)低溫共燒結(jié)。 (4)改變Ni、Cu元素比例制備了不同成份的Ni0.8-xCuxZn0.2Fe2O4薄膜,經(jīng)600℃保溫2小時退火處理后,其飽和磁化強度Ms隨x先增大后減小,組份為Ni0.4Cu0.4Zn0.2Fe2O4的薄膜具有最大飽和磁化強度Ms,達到284 emu/cc。鐵氧體薄膜的矯頑力呈隨x呈單調(diào)遞減的趨勢,Ni0.2Cu0.6Zn0.2Fe2O4組份的鐵氧體薄膜的矯頑力Hc低至15 Oe。通過對Cu摻雜量的變化,實現(xiàn)了對Ms和Hc的調(diào)節(jié)。 (5)對Ni0.4Cu0.4Zn0.2Fe2O4組份的鐵氧體薄膜樣品嘗試進行了磁場真空快速熱處理,發(fā)現(xiàn)熱處理后的樣品較管式爐退火樣品性能變差,我們分析認為這是由于磁場熱處理過程沒有有效消除薄膜中存在的應(yīng)力。
[Abstract]:With the rapid development of semiconductor integration technology, the miniaturization and high frequency of electronic components are required. In recent years, thin film materials have attracted wide attention. NiZn ferrite has high resistivity and resonance frequency, so it is suitable for various transformers. Inductor is widely used in communication, computer, anti-electromagnetic interference, electronics and so on. Doping appropriate amount of Cu in NiZn ferrite can adjust the suitable frequency band of NiZn ferrite and improve the content of NiCuZn ferrite. It has become an important branch of NiZn ferrite. Therefore, it is of great significance to prepare NiCuZn ferrite thin films with excellent properties. In this paper, NiCuZn ferrite thin films were prepared by sol-gel rotating coating method. The effects of sol properties, annealing temperature, holding time and spin-coating process on the crystal structure, microstructure and magnetic properties of NiCuZn ferrite films were investigated. At the same time, the effects of composition change and magnetic field vacuum rapid heat treatment on the properties of ferrite thin films were studied. The methods to improve the saturation magnetization of ferrite films and to reduce the coercivity HC were explored. The NiCuZn ferrite films were characterized by X-ray diffractometer, vibrating sample magnetometer, scanning electron microscope and atomic mechanics microscope. 1) by analyzing the TG-DTA curves of xerogels, the temperature of water and organic matter removed from NiCuZn ferrite films was determined to be 120 鈩，

本文編號：1777701