本文選題：無(wú)線無(wú)源 + 雙參數(shù)　； 參考：《傳感技術(shù)學(xué)報(bào)》2017年04期

【摘要】：設(shè)計(jì)了一個(gè)基于低溫共燒陶瓷(LTCC)技術(shù)的無(wú)線無(wú)源雙參數(shù)傳感器,傳感器基于LC(inductor-Capacitor)諧振原理,詢問天線通過無(wú)線遙測(cè)的方式獲取傳感器的壓力和溫度信號(hào)。在傳感器基板上集成了兩個(gè)LC諧振回路,諧振回路中兩個(gè)電容分別對(duì)壓力和溫度參數(shù)敏感,同時(shí)兩電感采用特殊結(jié)構(gòu)來(lái)減少雙參數(shù)在測(cè)試時(shí)的互感串?dāng)_。搭建了溫度-壓力復(fù)合測(cè)試平臺(tái),對(duì)傳感器進(jìn)行了相關(guān)測(cè)試。傳感器最高測(cè)試溫度為300℃,溫度靈敏度為-14.27 k Hz/℃,壓力靈敏-13.75 k Hz/k Pa,實(shí)驗(yàn)結(jié)果表明,這種設(shè)計(jì)能明顯減少兩參數(shù)之間的互感影響。
[Abstract]:A wireless passive two-parameter sensor based on low temperature co-fired ceramic LTCC technology is designed. The sensor is based on the LC inductor-Capacitor resonance principle. The sensor can obtain the pressure and temperature signals of the sensor by wireless telemetry. Two LC resonant circuits are integrated on the sensor substrate, in which the two capacitors are sensitive to the pressure and temperature parameters, and the two inductors adopt a special structure to reduce the mutual inductance crosstalk between the two parameters in the test. The temperature-pressure compound test platform was built and the sensor was tested. The maximum temperature of the sensor is 300C, the temperature sensitivity is -14.27k Hz/ 鈩，

本文編號(hào)：1969783