本文選題：測量 + 標(biāo)定　； 參考：《激光與光電子學(xué)進(jìn)展》2017年10期

【摘要】：針對(duì)微推力測量中電容位移傳感器需要頻繁標(biāo)定非線性誤差的問題,提出了一種基于激光干涉的現(xiàn)場標(biāo)定方法。標(biāo)定原理為:在直線位移臺(tái)上同時(shí)調(diào)節(jié)可動(dòng)角隅棱鏡與測量目標(biāo)的位置,進(jìn)而改變干涉光路光程差及電容位移傳感器極板間距,以激光干涉測量結(jié)果為基準(zhǔn),采用線性擬合方法,對(duì)傳感器非線性誤差進(jìn)行標(biāo)定。搭建了基于常用光學(xué)元件的干涉光路,對(duì)應(yīng)用于微推力測量中不同量程的傳感器進(jìn)行標(biāo)定。在分析干涉光強(qiáng)變化特點(diǎn)的基礎(chǔ)上,確定了干涉條紋數(shù)計(jì)算方法,得到干涉光路的位移測量精度為66.5nm。實(shí)驗(yàn)驗(yàn)證了該校準(zhǔn)裝置的實(shí)用性和準(zhǔn)確性,最后對(duì)標(biāo)定結(jié)果、傳感器輸出非線性誤差以及影響激光干涉測量精度的主要因素進(jìn)行了分析,得到激光干涉測量總誤差為67.2nm。
[Abstract]:Aiming at the problem that the capacitance displacement sensor needs frequent calibration nonlinear error in micro thrust measurement, a field calibration method based on laser interference is proposed. The calibration principle is that the position of the movable corner prism and the measuring object is adjusted simultaneously on the linear displacement table, and then the optical path difference of the interference path and the distance between the electrodes of the capacitive displacement sensor are changed, and the results of laser interferometry are taken as the reference. The nonlinear error of sensor is calibrated by linear fitting method. The interferometric light path based on common optical elements is built to calibrate the sensors which are used in micro thrust measurement with different measuring ranges. On the basis of analyzing the characteristics of interference intensity, the calculating method of interference fringe number is determined. The displacement measurement precision of interference light path is 66.5 nm. The practicability and accuracy of the calibration device are verified by experiments. Finally, the calibration results, the nonlinear error of sensor output and the main factors affecting the accuracy of laser interference measurement are analyzed. The total error of laser interferometry measurement is 67.2 nm.
【作者單位】： 裝備學(xué)院激光推進(jìn)及其應(yīng)用國家重點(diǎn)實(shí)驗(yàn)室;
【基金】：國家自然科學(xué)基金(11602304)
【分類號(hào)】：TP212;V43

【相似文獻(xiàn)】

相關(guān)期刊論文 前4條

1 吳燕華,張濤,尹伯彪,康巖輝;電壓輸出型線位移傳感器動(dòng)態(tài)檢定系統(tǒng)[J];機(jī)械;2005年07期

2 劉義;航空用電位計(jì)位移傳感器材料的研究與應(yīng)用[J];航空制造工程;1994年01期

3 晏克俊,劉君,萬艷江,王新年;基于VB6.0的飛機(jī)平尾液壓作動(dòng)筒位移傳感器測試系統(tǒng)設(shè)計(jì)與開發(fā)[J];宇航計(jì)測技術(shù);2003年02期

4 陳津平,胡小唐;一種新型激光干涉測頭應(yīng)用于量塊比較法檢定理論的研究[J];航空精密制造技術(shù);1999年04期

，

本文編號(hào)：1784126