本文選題：LTCC + 無(wú)線(xiàn)無(wú)源��； 參考：《中北大學(xué)》2017年碩士論文

【摘要】：本文針對(duì)物聯(lián)網(wǎng)智能工業(yè)、智能農(nóng)業(yè)等相關(guān)領(lǐng)域不同環(huán)境條件下多參數(shù)測(cè)試需求及傳感器低成本、微型化、低功耗和多功能的發(fā)展趨勢(shì),提出一種以電容-電感諧振式(LC)互感耦合無(wú)線(xiàn)測(cè)試技術(shù)為理論基礎(chǔ),基于LTCC工藝的無(wú)源功能集成化(壓力、溫度、濕度)傳感器,通過(guò)合理的結(jié)構(gòu)設(shè)計(jì)和工藝方法,實(shí)現(xiàn)了傳感器多參數(shù)單片集成測(cè)量,從技術(shù)角度為多參數(shù)實(shí)時(shí)監(jiān)測(cè)提供一種解決方案。首先介紹了無(wú)源傳感器無(wú)線(xiàn)測(cè)試的原理,然后分別介紹了三參數(shù)傳感器的壓力敏感機(jī)理、溫度敏感機(jī)理和濕度敏感機(jī)理。綜合考慮了電感值和電容值對(duì)傳感器性能的影響,根據(jù)相關(guān)設(shè)計(jì)經(jīng)驗(yàn),考慮工藝的可實(shí)行性,在合理范圍內(nèi)確定了電感和電容值。多參數(shù)傳感器整體結(jié)構(gòu)較為復(fù)雜,通過(guò)合理布局電容電感位置,最大程度的提高了各傳感器的靈敏度。最后對(duì)基底材料、叉指電極材料及感濕介質(zhì)進(jìn)行了比較,選取最符合要求的材料用于傳感器的設(shè)計(jì)與制備。然后通過(guò)軟件仿真分別對(duì)單參數(shù)傳感器和集成多參數(shù)于一體的傳感器進(jìn)行了電磁學(xué)仿真,通過(guò)兩者結(jié)果的對(duì)比,說(shuō)明了多參數(shù)傳感器設(shè)計(jì)中存在的難點(diǎn),同時(shí)也驗(yàn)證了多參數(shù)傳感器設(shè)計(jì)的可行性,確定了多參數(shù)傳感器加工尺寸。接著對(duì)傳感器進(jìn)行熱、力學(xué)仿真,得到了傳感器所能承受的最大應(yīng)力和最大敏感膜形變量,證明了傳感器整體能夠?qū)崿F(xiàn)均勻受熱。在此基礎(chǔ)上,首先制備了HTCC陶瓷基單參數(shù)無(wú)源濕度傳感器,然后采用LTCC工藝實(shí)現(xiàn)了溫濕壓三參數(shù)傳感器單片集成制備。最后對(duì)制備的無(wú)源傳感器進(jìn)行了相應(yīng)地測(cè)試與性能分析。為了驗(yàn)證濕度傳感器可行性,首先對(duì)無(wú)線(xiàn)無(wú)源單參數(shù)濕度傳感器進(jìn)行了初步測(cè)試,實(shí)驗(yàn)結(jié)果表明濕度傳感器具有良好的濕度響應(yīng),為接下來(lái)的無(wú)線(xiàn)無(wú)源三參數(shù)傳感器測(cè)試提供良好的實(shí)驗(yàn)基礎(chǔ)。接著對(duì)多參數(shù)傳感器進(jìn)行了溫壓復(fù)合環(huán)境和溫濕復(fù)合環(huán)境下的測(cè)試,通過(guò)實(shí)驗(yàn)得出,溫度參數(shù)不僅對(duì)溫度傳感器有影響,還會(huì)干擾濕度和壓力傳感器信號(hào)。濕度和壓力參數(shù)的變化只會(huì)引起各自傳感器的頻率變化,對(duì)其他參數(shù)的傳感器影響可忽略不計(jì)。
[Abstract]:This paper aims at the development trend of low cost, miniaturization, low power consumption and multifunction of sensors in the fields of Internet of things intelligent industry, intelligent agriculture and other related fields under different environmental conditions. Based on the theory of capacitance-inductance coupling wireless testing technology, a passive functional integrated (pressure, temperature, humidity) sensor based on LTCC process is proposed. The sensor multi-parameter monolithic integrated measurement is realized, and a solution for multi-parameter real-time monitoring is provided from the technical point of view. Firstly, the principle of passive sensor wireless testing is introduced, and then the three parameter sensor's pressure sensitive mechanism, temperature sensitive mechanism and humidity sensitive mechanism are introduced respectively. The effects of inductance and capacitance on the performance of the sensor are considered synthetically. The inductance and capacitance are determined within a reasonable range according to the relevant design experience and the practicability of the process. The whole structure of multi-parameter sensor is more complex, and the sensitivity of each sensor is improved to the greatest extent by rationally arranging the position of capacitance inductor. Finally, the substrate material, interDigital electrode material and humidity sensitive medium are compared, and the most suitable materials are selected for the design and fabrication of the sensor. Then, the electromagnetic simulation of single parameter sensor and integrated multi-parameter sensor is carried out by software simulation, and the difficulties in the design of multi-parameter sensor are explained by the comparison of the two results. At the same time, the feasibility of the design of multi-parameter sensor is verified, and the machining size of multi-parameter sensor is determined. Then the thermal and mechanical simulation of the sensor is carried out, and the maximum stress and the maximum sensitive film shape are obtained, which proves that the whole sensor can be uniformly heated. On this basis, HTCC ceramic based single parameter passive humidity sensor was fabricated firstly, and then the monolithic integrated fabrication of temperature, humidity and pressure three-parameter sensor was realized by LTCC process. Finally, the passive sensor is tested and its performance is analyzed. In order to verify the feasibility of the humidity sensor, a preliminary test of the wireless passive single parameter humidity sensor is carried out. The experimental results show that the humidity sensor has a good humidity response. It provides a good experimental basis for the following wireless passive three-parameter sensor test. Then, the multi-parameter sensor is tested in the environment of temperature and humidity. The results show that the temperature parameter not only affects the temperature sensor, but also interferes with the signal of humidity and pressure sensor. The change of humidity and pressure parameters will only cause the frequency change of the sensor, and the influence on the other parameters can be ignored.
【學(xué)位授予單位】：中北大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類(lèi)號(hào)】：TP212

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