本文選題：光傳操縱系統(tǒng) + 光學位移傳感器�。� 參考：《中國科學技術大學》2017年博士論文

【摘要】：本論文研究了一種新型數(shù)字式波長編碼光柵光學位移傳感器,作為關鍵硬件,用于飛行器光傳操縱系統(tǒng)中,取得了以下研究成果。1、提出了一種數(shù)字式波長編碼光學位移傳感器的系統(tǒng)結(jié)構(gòu)。該傳感器的系統(tǒng)結(jié)構(gòu)簡單緊湊,由讀碼系統(tǒng)和解調(diào)系統(tǒng)兩部分組成。讀碼系統(tǒng)的核心元件是一個由若干種等間距光柵單元編碼組成的編碼光柵,該編碼光柵上攜帶著與位移信息一一對應的圖形編碼,通過編碼光柵的結(jié)構(gòu)設計,可以調(diào)整光學位移傳感器的分辨率和量程。圖形編碼信息通過光柵的自準直衍射轉(zhuǎn)化為波長信息,傳輸至后續(xù)的解調(diào)系統(tǒng)中并輸出數(shù)字編碼,從而完成位移的測量。并通過編碼光柵的獨特設計,從源頭上提高了傳感器的環(huán)境適應能力。2、開發(fā)了兩種結(jié)構(gòu)的組合編碼光柵,并形成了成熟的編碼解碼算法。組合編碼光柵采用單通道循環(huán)、多通道組合的方式,在不增加光柵種類的情況下,大幅度提高了編碼光柵的總編碼量;并通過錯位結(jié)構(gòu)的應用,不減小光柵單元格的尺寸,進一步提高分辨率。編制了三套編碼算法程序,能快速有效的將組合編碼光柵的概念結(jié)構(gòu)具體化、數(shù)字化,并針對不同的參數(shù)要求,提供優(yōu)化設計的關鍵依據(jù)。根據(jù)大量計算結(jié)果,針對飛行器用光學位移傳感器的設計要求,本文優(yōu)先選擇擁有千級編碼量的"五位三分"或"六位二分"組合編碼光柵結(jié)構(gòu)。通過組合編碼光柵的結(jié)構(gòu)優(yōu)化,可以獲得十萬級的編碼量,顛覆了傳統(tǒng)光學編碼盤主導的編碼方式,為大量程應用領域的器件設計提供了新的有效思路。3、建立了成熟的組合編碼光柵制作工藝。設計了一套制作精度高、可重復性好的組合編碼光柵制作工藝,完成了量程100mm,分辨率100μm的"五位三分"錯位組合編碼光柵的設計和制作,并利用光柵的復制技術,實現(xiàn)了組合編碼光柵的標準化小批量產(chǎn)出。4、對光學位移傳感器整體搭建的系統(tǒng)性研究。通過對傳感器系統(tǒng)所有部件的制作、選型和匹配原則的研究,形成了理論與實踐結(jié)合的系統(tǒng)搭建思路。并從實際出發(fā),重點闡述了信號強度參考線的標定方法和意義,提出了動態(tài)信號強度參考線的標定原則,為全面提高傳感器的穩(wěn)定性提供了技術支持。5、搭建了光學位移傳感器的臺架系統(tǒng)并完成其性能評估。搭建了傳感器的臺架系統(tǒng),并進行信號響應測試,實驗結(jié)果表明"五位三分"錯位組合編碼光柵的制作精度和系統(tǒng)各元件的選型與配合很好的滿足了傳感器光譜響應的要求。同時在-55℃～70℃的溫度范圍內(nèi),測試了解調(diào)系統(tǒng)的輸出信號,結(jié)果顯示光敏元件的信號幅值隨著溫度的升高而降低,呈近似線性變化,變化后的曲線依然在預先標定的參考線之上,數(shù)字信號可以準確輸出,即該傳感器系統(tǒng)展現(xiàn)了優(yōu)良的耐高低溫性能。
[Abstract]:In this paper, a new type of digital wavelength coded grating optical displacement sensor is studied, which is used as the key hardware in the optical control system of aircraft.A digital wavelength coded optical displacement sensor is proposed.The system structure of the sensor is simple and compact, which consists of read code system and demodulation system.The core component of the code reading system is a coded grating composed of several kinds of equal-distance grating units. The coding grating carries a graphic code corresponding to the displacement information, which is designed by the structure of the coded grating.The resolution and range of the optical displacement sensor can be adjusted.The image coding information is transformed into wavelength information by the self-collimation diffraction of the grating and transmitted to the subsequent demodulation system and the output digital code is output to complete the displacement measurement.Through the unique design of the coding grating, the environmental adaptability of the sensor is improved from the source. The combined coding grating with two structures is developed, and a mature coding and decoding algorithm is formed.The combined coding grating adopts the method of single channel cycle and multi-channel combination, without increasing the type of grating, the total coding amount of the coded grating is greatly increased, and the size of the grating cell is not reduced by the application of the dislocation structure.Further improve the resolution.Three sets of coding algorithm programs are developed, which can quickly and effectively concretize and digitize the conceptual structure of the composite coding grating, and provide the key basis for optimization design according to different parameter requirements.According to a large number of calculation results, according to the design requirements of optical displacement sensors for aircraft, this paper gives priority to the "five-bit three-point" or "six-bit dichotomous" combinatorial coding grating structure with thousands of coding quantities.By optimizing the structure of the combinatorial coding grating, we can obtain a number of codes of 100,000 levels, which overturn the traditional optical coding disk dominated coding method.It provides a new and effective method for device design in a large range of applications, and establishes a mature fabrication process of combinatorial coding grating.A set of high precision and repeatable composite coding grating fabrication technology is designed. The design and fabrication of the "five bits and three points" dislocation coded grating with a measuring range of 100 mm and a resolution of 100 渭 m are completed, and the replication technology of the grating is used.The standard small batch output. 4 of the combined coded grating is realized, and the systematic research on the whole building of the optical displacement sensor is carried out.Through the research on the principle of making, selecting and matching all the components of the sensor system, the idea of combining theory with practice is formed.The calibration method and significance of the signal intensity reference line are expounded, and the calibration principle of the dynamic signal intensity reference line is put forward.It provides technical support for improving the stability of the sensor. 5. The bench system of the optical displacement sensor is built and its performance evaluation is completed.The sensor bench system is built and the signal response is tested. The experimental results show that the fabrication accuracy of the "five-bit three-point" staggered combined coding grating and the selection and coordination of each component of the system can meet the requirements of the sensor spectral response.At the same time, in the temperature range of -55 鈩，

本文編號：1749600