【摘要】：石英撓性加速度計(jì)作為一種高精度機(jī)械式線性加速度計(jì)，是目前慣性導(dǎo)航系統(tǒng)中重要的傳感器。石英擺片是它的心臟，起敏感加速度作用。石英屬于硬脆材料，它與金屬材料不同，具有低塑性、易碎性和微裂紋等缺點(diǎn)，且石英擺片形狀復(fù)雜、幾何尺寸精度和表面質(zhì)量要求很高，使得石英擺片采用傳統(tǒng)的金屬加工方法很難進(jìn)行加工，存在著加工效率低、工件易破碎、能耗大、加工質(zhì)量差、許多設(shè)計(jì)要求無(wú)法實(shí)現(xiàn)等問(wèn)題。本文針對(duì)這些問(wèn)題，對(duì)石英擺片進(jìn)行了設(shè)計(jì)，并研究了其化學(xué)腐蝕方法與下垂量檢測(cè)技術(shù)。 本文的主要研究?jī)?nèi)容如下： 第一章，綜述了國(guó)內(nèi)外石英擺片加工技術(shù)的發(fā)展?fàn)顩r和石英擺片檢測(cè)技術(shù)國(guó)內(nèi)外現(xiàn)狀，比較了目前石英擺片各種加工方法和各種檢測(cè)技術(shù)的優(yōu)缺點(diǎn)，提出了本文的主要研究?jī)?nèi)容和課題的研究意義。 第二章，介紹了石英撓性加速度計(jì)的結(jié)構(gòu)與工作原理，建立了石英撓性加速度計(jì)的動(dòng)力學(xué)方程、傳遞函數(shù)和靜態(tài)數(shù)學(xué)模型，了解了石英擺片的各項(xiàng)參數(shù)對(duì)其性能的影響。介紹了石英材料的特性，，設(shè)計(jì)了石英擺片的結(jié)構(gòu)，對(duì)石英擺片的載荷進(jìn)行了計(jì)算。 第三章，提出靜力分析和模態(tài)分析的理論模型，用ANSYS軟件建立了石英擺片的有限元模型，針對(duì)不同厚度撓性梁的石英擺片進(jìn)行了靜力分析，得到了不同厚度的撓性梁在相同載荷下的應(yīng)變和應(yīng)力；對(duì)石英擺片進(jìn)行了模態(tài)分析，得到前五階模態(tài)的頻率和振型，通過(guò)改善石英擺片尺寸，防止石英擺片與環(huán)境共振，保證石英撓性加速度計(jì)的測(cè)量精度。 第四章，從氫氟酸溶液特征、石英材料的表面特征、反應(yīng)機(jī)理及反應(yīng)分子模型三個(gè)方面介紹了石英擺片化學(xué)腐蝕原理，分析了石英擺片化學(xué)腐蝕實(shí)驗(yàn)的工藝流程，包括腐蝕液的選擇、保護(hù)層及設(shè)備的選擇以及加工過(guò)程的控制，介紹了石英擺片撓性梁厚度的測(cè)量方法。進(jìn)行了化學(xué)腐蝕加工試驗(yàn)，然后測(cè)量了試驗(yàn)樣品的撓性梁厚度，試驗(yàn)結(jié)果表明，石英擺片撓性梁的加工采用化學(xué)腐蝕加工工藝是成功的。 第五章，介紹了石英擺片下垂量的概念，并對(duì)其進(jìn)行了理論計(jì)算，提出了下垂量檢測(cè)原理，介紹了計(jì)算機(jī)視覺(jué)檢測(cè)技術(shù)，對(duì)下垂量檢測(cè)系統(tǒng)進(jìn)行了總體的設(shè)計(jì)，介紹了裝置中用到零部件，對(duì)搭建完成的下垂量檢測(cè)平臺(tái)實(shí)物進(jìn)行了描述；最后對(duì)化學(xué)腐蝕加工后的石英擺片進(jìn)行下垂量檢測(cè)試驗(yàn)，分析了試驗(yàn)結(jié)果，證明了化學(xué)腐蝕加工后的石英擺片的質(zhì)量是合格的，同時(shí)也驗(yàn)證了有限元靜力分析和下垂量理論計(jì)算的準(zhǔn)確性。 最后總結(jié)了論文的主要研究?jī)?nèi)容，并對(duì)石英擺片的化學(xué)腐蝕方法和下垂量檢測(cè)技術(shù)的進(jìn)一步研究工作進(jìn)行了探討和展望。
文內(nèi)圖片：
圖片說(shuō)明：各種加速度計(jì)性能及應(yīng)用領(lǐng)域圖
[Abstract]:Quartz flexible accelerometer, as a high precision mechanical linear accelerometer, is an important sensor in inertial navigation system. The quartz pendulum is its heart and acts as a sensitive acceleration. Quartz is a kind of hard and brittle material, which is different from metal material, has the shortcomings of low plasticity, fragility and microcrack, and the shape of quartz pendulum is complex, the geometric dimension accuracy and surface quality requirements are very high, which makes it difficult to process quartz pendulum by traditional metal processing method. There are some problems, such as low machining efficiency, easy breakage of workpiece, high energy consumption, poor machining quality and so on. In order to solve these problems, the quartz pendulum plate is designed, and its chemical corrosion method and sag detection technology are studied. The main research contents of this paper are as follows: in the first chapter, the development of quartz pendulum processing technology at home and abroad and the present situation of quartz pendulum detection technology at home and abroad are reviewed, the advantages and disadvantages of various processing methods and detection technologies of quartz pendulum plate are compared, and the main research contents and significance of this paper are put forward. In the second chapter, the structure and working principle of quartz flexible accelerometer are introduced, the dynamic equation, transfer function and static mathematical model of quartz flexible accelerometer are established, and the influence of various parameters of quartz pendulum on its performance is understood. The characteristics of quartz material are introduced, the structure of quartz pendulum is designed, and the load of quartz pendulum is calculated. In the third chapter, the theoretical models of static analysis and modal analysis are put forward, and the finite element model of quartz pendulum plate is established by ANSYS software. The static analysis of quartz pendulum plate with different thickness of flexible beam is carried out, and the strain and stress of flexible beam with different thickness under the same load are obtained. The modal analysis of quartz pendulum is carried out, and the frequency and vibration mode of the first five modes are obtained. by improving the size of quartz pendulum, the resonance between quartz pendulum and environment is prevented, and the measurement accuracy of quartz flexible accelerometer is guaranteed. In the fourth chapter, the chemical corrosion principle of quartz pendulum plate is introduced from three aspects: hydrofluoric acid solution characteristics, surface characteristics of quartz material, reaction mechanism and reaction molecular model. The technological process of quartz pendulum chemical corrosion experiment is analyzed, including the selection of corrosion solution, the selection of protective layer and equipment, and the control of processing process. The measurement method of quartz pendulum flexible beam thickness is introduced. The chemical corrosion processing test was carried out, and then the thickness of flexible beam of the test sample was measured. The test results show that the chemical corrosion processing process of quartz pendulum flexible beam is successful. In the fifth chapter, the concept of quartz pendulum droop is introduced, and its theoretical calculation is carried out, the principle of sag detection is put forward, the computer vision detection technology is introduced, the overall design of the sag detection system is carried out, the parts used in the device are introduced, and the object of the droop detection platform built is described. Finally, the sag test of quartz pendulum after chemical corrosion is carried out, and the test results are analyzed. it is proved that the quality of quartz pendulum after chemical corrosion is qualified, and the accuracy of finite element static analysis and droop theoretical calculation is also verified. Finally, the main research contents of the paper are summarized, and the chemical corrosion method of quartz pendulum and the further research work of sag detection technology are discussed and prospected.
【學(xué)位授予單位】：杭州電子科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TH824.4

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