靜電支撐水銀加速度計(jì)的原理驗(yàn)證和系統(tǒng)設(shè)計(jì)
[Abstract]:At present, the accelerometer widely used in high performance inertial navigation is mainly quartz pendulum accelerometer, which has high precision but poor resistance to high overload. Mercury accelerometer has high overload resistance, but the range is small and the measurement stability is insufficient. In view of this situation, the scheme of electrostatic supported mercury accelerometer is put forward in this paper, and the principle of the accelerometer is deeply studied, the feasibility of the principle is verified, and the electrostatic supported mercury accelerometer system is designed and built. The function of the system is verified by experiments. Electrostatic supported mercury accelerometer combines electrostatic support technology with mercury accelerometer, which has the ability to resist high overload, and at the same time, the controlled suspension of mercury droplets is used to improve the range of mercury accelerometer. The research contents include the following aspects: 1. Study on the principle of electrostatic supported mercury accelerometer. The scheme of electrostatic supported mercury accelerometer is put forward. The stable suspension of mercury droplets under electrostatic force is realized by using electrostatic force to balance inertia force and closed loop control, and the change of contact area between droplets and plate is used as the basis of balance. The corresponding acceleration information is obtained by voltage measurement. 2. Feasibility analysis of electrostatic supported mercury accelerometer. The force acting on mercury droplets under the action of multi-physical field is studied, the simulation model is established, the relationship curve between acceleration and voltage is obtained, and the feasibility of the new principle accelerometer is verified. It is verified that the electrostatic support technology can improve the range of mercury accelerometer, and the performance parameters of the accelerometer are given. At the same time, the physical parameters affecting the suspension voltage are studied, and the suspension voltage is reduced to less than 1kV, which improves the application prospect of the accelerometer. System design of electrostatic supported mercury accelerometer. Package the structure of mercury, complete the packaging of mercury droplets; An optical system for area detection is designed and built. The optical system can detect the area of the contact surface between droplets and upper and lower plates, and can quantitatively describe the size and variation of the area. Finally, the system of electrostatic supported mercury accelerometer is tested, and the experimental results show that the system meets the requirements of the design.
【學(xué)位授予單位】:浙江大學(xué)
【學(xué)位級(jí)別】:碩士
【學(xué)位授予年份】:2015
【分類號(hào)】:TH824.4
【參考文獻(xiàn)】
相關(guān)期刊論文 前10條
1 錢(qián)吉?jiǎng)?沙莎;陳志華;易文俊;;電磁MEMS在流體控制中的應(yīng)用[J];微納電子技術(shù);2010年10期
2 王躍宗;李德勝;于亞萍;;顯微立體視覺(jué)中體視顯微鏡雙光路相關(guān)性的研究[J];北京工業(yè)大學(xué)學(xué)報(bào);2006年08期
3 宋星;房建成;盛蔚;;電容式微加速度計(jì)閉環(huán)檢測(cè)電路[J];北京航空航天大學(xué)學(xué)報(bào);2009年03期
4 席占穩(wěn),賴百壇;高g_n值懸臂梁式硅微加速度傳感器的結(jié)構(gòu)設(shè)計(jì)[J];東南大學(xué)學(xué)報(bào)(自然科學(xué)版);2000年06期
5 劉潤(rùn);蔡體菁;丁昊;;高精度石英撓性加速度計(jì)閉環(huán)系統(tǒng)的設(shè)計(jì)與分析[J];東南大學(xué)學(xué)報(bào)(自然科學(xué)版);2010年02期
6 萬(wàn)水;Mogens Peter Nielsen;;混合插值法求解Navier-Stokes方程(英文)[J];Journal of Southeast University(English Edition);2006年01期
7 楊忠;引力場(chǎng)中的應(yīng)力張量及其應(yīng)用[J];大學(xué)物理;1998年04期
8 莊振鋒;王敏;陳榮;;0.25×高分辨力視頻顯微鏡設(shè)計(jì)[J];光學(xué)儀器;2008年01期
9 錢(qián)關(guān)e,
本文編號(hào):2488164
本文鏈接:http://sikaile.net/kejilunwen/yiqiyibiao/2488164.html