【摘要】：設(shè)計(jì)了一種基于雙級(jí)復(fù)合平行板簧結(jié)構(gòu)的大行程二維并聯(lián)微位移平臺(tái),以解決二維柔性平臺(tái)尺寸大、行程小,運(yùn)動(dòng)耦合誤差大,運(yùn)動(dòng)性能受加工誤差影響等問(wèn)題。設(shè)計(jì)的微位移平臺(tái)在每個(gè)運(yùn)動(dòng)方向均采用兩個(gè)音圈電機(jī)同時(shí)驅(qū)動(dòng),通過(guò)調(diào)節(jié)兩音圈電機(jī)信號(hào)比例來(lái)補(bǔ)償加工誤差造成的運(yùn)動(dòng)耦合誤差,完成X和Y方向的運(yùn)動(dòng)解耦,從而降低系統(tǒng)對(duì)加工精度的依賴程度。根據(jù)卡氏第二定理建立了平臺(tái)力學(xué)模型,優(yōu)化了平臺(tái)尺寸參數(shù),并利用有限元仿真對(duì)設(shè)計(jì)的平臺(tái)性能進(jìn)行驗(yàn)證。最后,搭建了微位移定位系統(tǒng)實(shí)驗(yàn)平臺(tái)。實(shí)驗(yàn)結(jié)果表明:設(shè)計(jì)的柔性平臺(tái)行程與平臺(tái)尺寸占比大,定位精度高,運(yùn)動(dòng)解耦性能得到大幅改善,實(shí)現(xiàn)了±2.25mm×±2.27mm工作行程,工作行程與平臺(tái)尺寸占比約為1.73%,運(yùn)動(dòng)耦合誤差小于0.27%。
[Abstract]:A large-stroke two-dimensional parallel micro-displacement platform based on two-stage compound parallel plate spring structure is designed to solve the problems of large size, small stroke, large motion coupling error and motion performance affected by machining error of the two-dimensional flexible platform. The designed micro-displacement platform is driven simultaneously by two pitch motors in each direction of motion. The motion coupling error caused by machining error is compensated by adjusting the signal ratio of the two-coil motor, and the motion decoupling in X and Y directions is completed. As a result, the dependence of the system on machining accuracy is reduced. According to the second Cartesian theorem, the mechanical model of the platform is established, and the dimension parameters of the platform are optimized, and the performance of the designed platform is verified by finite element simulation. Finally, the experimental platform of micro-displacement positioning system is built. The experimental results show that the designed flexible platform has a large ratio of stroke to platform size, high positioning accuracy, and greatly improved motion decoupling performance. The 鹵2.25mm 脳 鹵2.27mm working stroke is realized, and the ratio of working stroke to platform size is about 1.73%. The motion coupling error is less than 0.27%.
【作者單位】： 山東大學(xué)機(jī)械工程學(xué)院高效潔凈機(jī)械制造教育部重點(diǎn)實(shí)驗(yàn)室;北京航空航天大學(xué)自動(dòng)化科學(xué)與電氣工程學(xué)院;
【基金】：國(guó)家自然科學(xué)基金資助項(xiàng)目(No.61327003) 山東大學(xué)基本科研業(yè)務(wù)費(fèi)專項(xiàng)資金資助項(xiàng)目(No.2015JC034)
【分類號(hào)】：TH703
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本文編號(hào)：2470708