【摘要】：光子篩是近10年發(fā)展起來(lái)的一種新型的衍射光學(xué)成像器件,它用微孔環(huán)帶陣列代替菲涅爾波帶片中的透明環(huán)帶,每一個(gè)微孔的衍射光在光子篩后的相應(yīng)位置同相疊加,大大提高了光子篩的聚焦特性,并且可以有效抑制聚焦光斑的旁瓣,提高分辨率,使得成像質(zhì)量有了很大提高。光子篩具有以下優(yōu)點(diǎn)：體積小、重量輕、設(shè)計(jì)靈活、分辨率高、光譜范圍寬、制成陣列容易。它的光譜范圍涉及了傳統(tǒng)的折反射光學(xué)器件難以覆蓋的的光波段(包括可見(jiàn)光、紅外光、軟X射線和極紫外光)。本文針對(duì)準(zhǔn)相位型光子篩進(jìn)行了深入研究,研究?jī)?nèi)容和創(chuàng)新之處被概括為如下幾點(diǎn)：1、對(duì)光子篩進(jìn)行了成像理論分析,并做了公式推導(dǎo),推導(dǎo)出入射光通過(guò)任意微孔在焦平面的光場(chǎng)分布表達(dá)式,還推導(dǎo)了光子篩的微孔位置分布以及孔徑大小與焦點(diǎn)處衍射場(chǎng)振幅的關(guān)系。2、通過(guò)對(duì)光子篩的仿真,得到光子篩的示意圖、焦平面光強(qiáng)圖和沿光軸方向光強(qiáng)分布圖,仿真結(jié)果表明光子篩具有極好的聚焦特性,能有效地抑制菲涅爾波帶片成像時(shí)的高階衍射和旁瓣效應(yīng)。3、對(duì)光子篩的微孔位置分布進(jìn)行了窗函數(shù)優(yōu)化,通過(guò)比較不同窗函數(shù)優(yōu)化后的效果選取最合適的窗函數(shù)。通過(guò)改變微孔孔徑大小觀察焦平面的光強(qiáng)分布得到最佳的d/w比值。4、分析了光子篩的色散特性,當(dāng)增大波長(zhǎng)或減小波長(zhǎng)時(shí),光斑能量都急劇降低,表明光子篩具有良好的波長(zhǎng)選擇性。還分析了一些誤差對(duì)光子篩成像的影響。5、簡(jiǎn)要介紹了光子篩的制作加工方法,對(duì)可見(jiàn)光光子篩進(jìn)行了成像實(shí)驗(yàn),包括對(duì)聚焦特性的測(cè)試,對(duì)成像特性的測(cè)試,對(duì)分辨率板的測(cè)試,對(duì)光譜透過(guò)率的測(cè)試,最終得到的結(jié)果都與理論結(jié)果基本符合。
[Abstract]:Photonic screen is a new kind of diffractive optical imaging device which has been developed in recent 10 years. It replaces the transparent ring band in Fresnel zone plate with microporous ring band array, and the corresponding position of diffracted light of each micropore is superposed in the corresponding position after photon screen, in which the transparent ring band in the Fresnel zone plate is replaced by the microporous ring band array. The focusing property of the photonic screen is greatly improved, and the sidelobe of the focusing spot can be effectively suppressed, and the resolution of the focus spot can be improved. The imaging quality is greatly improved. Photonic screen has the following advantages: small size, light weight, flexible design, high resolution, wide spectral range, easy array. Its spectral range is related to the optical bands (including visible light, infrared light, soft X-ray and polar UV) that are difficult to cover by the traditional refractive reflection optical devices (including visible light, infrared light, soft X-ray and polar ultraviolet light). The research contents and innovations of the quasi-phase type photonic screen are summarized as follows: 1. The imaging theory of the photonic screen is analyzed and the formula is deduced, and the research content and innovation are summarized as follows: (1) the imaging theory of the photonic screen is analyzed and the formula is deduced. The expression of light field distribution in focal plane through arbitrary micropores is derived, and the distribution of micropore position and the relationship between aperture size and the amplitude of diffraction field at focal point are also derived. 2. The simulation of photon screen is carried out. The schematic diagram, the focal plane light intensity diagram and the light intensity distribution along the optical axis are obtained. The simulation results show that the photon screen has excellent focusing characteristics and can effectively suppress the high order diffraction and sidelobe effect in Fresnel zone plate imaging. The window function is optimized for the micropore position distribution of the photon screen, and the most suitable window function is selected by comparing the effects of different window functions. The optimum d / w ratio is obtained by changing the pore size to observe the light intensity distribution in the focal plane. 4. The dispersion characteristics of the photonic screen are analyzed. When the wavelength is increased or the wavelength is reduced, the spot energy decreases sharply. The results show that the photonic screen has good wavelength selectivity. The influence of some errors on the photon screen imaging is also analyzed. 5. The fabrication and processing methods of the photonic screen are briefly introduced. The imaging experiments of the visible light photon screen are carried out, including the measurement of the focusing characteristics and the measurement of the imaging characteristics. The results of the measurement of the resolution plate and the spectral transmittance are basically in agreement with the theoretical results.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類(lèi)號(hào)】：TH74

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