【摘要】：近些年來,光電技術(shù)、精密制造加工、納米科學(xué)、航宇工程等領(lǐng)域?qū)芏ㄎ患夹g(shù)提出了越來越高的要求,如需要亞微米或納米級(jí)的定位分辨率,精細(xì)的運(yùn)動(dòng)控制等。非共振式壓電直線作動(dòng)器具有精度高、響應(yīng)快、可自鎖等特點(diǎn),有望應(yīng)用于新型精密運(yùn)動(dòng)平臺(tái)的作動(dòng)之中。本文研究的雙足壓電直線作動(dòng)器,是以壓電疊堆為作動(dòng)單元的一種非共振式作動(dòng)器,在大行程下依然具有精度高、響應(yīng)快、推力大的特點(diǎn),應(yīng)用于精密二維運(yùn)動(dòng)平臺(tái)時(shí)具有較大的優(yōu)勢(shì)。本文的主要研究?jī)?nèi)容如下:介紹了壓電精密運(yùn)動(dòng)平臺(tái)的應(yīng)用背景及其特點(diǎn),概述了壓電作動(dòng)技術(shù)的研究現(xiàn)狀;比較了共振與非共振式作動(dòng)技術(shù),歸納了以壓電疊堆為作動(dòng)單元的非共振式作動(dòng)器的特點(diǎn)。介紹了壓電元件的特點(diǎn)及結(jié)構(gòu),總結(jié)了其使用方法與注意事項(xiàng);考慮到壓電輸出對(duì)外加壓力的敏感性,對(duì)兩種壓電疊堆做了預(yù)緊力標(biāo)定實(shí)驗(yàn);研究了兩種壓電疊堆的動(dòng)態(tài)特性,獲得了不同預(yù)緊力下二者的激勵(lì)電壓、頻率與輸出振幅的關(guān)系。根據(jù)對(duì)單、雙足壓電作動(dòng)原理的比較及三相、四相驅(qū)動(dòng)的分析,設(shè)計(jì)了雙足對(duì)稱式三相驅(qū)動(dòng)壓電作動(dòng)器并制作了樣機(jī);根據(jù)實(shí)驗(yàn)結(jié)果及分析,對(duì)作動(dòng)器進(jìn)行了改進(jìn);實(shí)驗(yàn)表明改進(jìn)型作動(dòng)器具有更穩(wěn)定的性能、更大的推力。以新型壓電作動(dòng)器為作動(dòng)單元,設(shè)計(jì)了精密二維平臺(tái)的機(jī)械結(jié)構(gòu)并制作了樣機(jī);通過實(shí)驗(yàn)測(cè)試了平臺(tái)性能,表明二層平臺(tái)對(duì)底層的輸出特性影響較小;平臺(tái)的定位分辨率可達(dá)4.2μm(連續(xù)步進(jìn)模式)、0.1μm(單步驅(qū)動(dòng)模式),表明該平臺(tái)可實(shí)現(xiàn)較高精度的作動(dòng)。
[Abstract]:In recent years, photoelectric technology, precision manufacturing and processing, nanoscience, aerospace engineering and other fields have put forward more and more high requirements for precision positioning technology, such as sub-micron or nano-scale positioning resolution, fine motion control and so on. Non-resonant piezoelectric linear actuator has the advantages of high precision, fast response and self-locking, so it is expected to be used in the actuation of a new precision motion platform. The biped piezoelectric linear actuator studied in this paper is a kind of non-resonant actuator with piezoelectric stack as the actuator. It still has the characteristics of high precision, fast response and large thrust under the large stroke. It has a great advantage when it is applied to the precision two-dimensional motion platform. The main contents of this paper are as follows: the application background and characteristics of piezoelectric precision motion platform are introduced, and the research status of piezoelectric actuation technology is summarized. The resonant and non-resonant actuators are compared, and the characteristics of non-resonant actuators with piezoelectric stack as actuators are summarized. In this paper, the characteristics and structure of piezoelectric elements are introduced, the usage methods and precautions are summarized, and the pretightening force calibration experiments for two kinds of piezoelectric stack are carried out considering the sensitivity of piezoelectric output to external pressure. The dynamic characteristics of two kinds of piezoelectric stack are studied, and the relationship between the excitation voltage, frequency and output amplitude is obtained under different preloading forces. According to the comparison of single and biped piezoelectric actuation principle and the analysis of three-phase and four-phase drive, a biped symmetrical three-phase piezoelectric actuator is designed and a prototype is made, and the actuator is improved according to the experimental results and analysis. The experimental results show that the improved actuator has more stable performance and greater thrust. The mechanical structure of the precision two-dimensional platform is designed and a prototype is made with the new piezoelectric actuator as the actuator, and the performance of the platform is tested by experiments, which shows that the two-layer platform has little effect on the output characteristics of the bottom layer. The positioning resolution of the platform can reach 4.2 渭 m (continuous step mode) and 0.1 渭 m (single step drive mode), which indicates that the platform can achieve high precision actuation.
【學(xué)位授予單位】：南京航空航天大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TH703

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