【摘要】：光學(xué)微腔作為光學(xué)研究的重要工具具有廣泛的應(yīng)用前景,對信息技術(shù)產(chǎn)業(yè)進步有巨大的推動作用。光學(xué)微腔通過回音壁模式將光限制在很小的范圍內(nèi)進行傳播,因而具有具有極高的品質(zhì)因數(shù)、極小的模式體積和極窄的譜線寬度等特點。由于具備這些獨特的優(yōu)勢,回音壁模式光學(xué)微腔成為光學(xué)微腔的研究熱點,并已經(jīng)得到了廣泛的應(yīng)用。目前光學(xué)微腔在低閾值激光器、高靈敏度傳感器、窄線寬濾波器等方面得到了廣泛而深入地研究,受到了人們的廣泛關(guān)注。本文主要對超純單晶氟化鈣盤型腔進行了理論研究和實驗研究。在回音壁模式微腔的研究背景、發(fā)展現(xiàn)狀和應(yīng)用現(xiàn)狀的基礎(chǔ)上,提出了本文的研究內(nèi)容。首先重點闡述了氟化鈣盤型腔的各項性能參數(shù)和損耗機制,進一步分析得出晶體光學(xué)微腔品質(zhì)因數(shù)(Q)的主要限制因素是表面粗糙度和表面不潔凈損耗。在理論研究的基礎(chǔ)上,提出了用機械加工結(jié)合化學(xué)機械拋光制備氟化鈣盤型腔的方法。詳細介紹了氟化鈣盤型腔的制備過程并分析了影響盤型腔表面質(zhì)量的因素。氟化鈣盤型腔制備完成以后,用共聚焦顯微鏡LEXT OLS4100對其粗糙度進行測試。粗糙度測試結(jié)果表明,該氟化鈣盤型腔的粗糙度為53nm,達到了納米級別的表面粗糙度。為了進一步測試氟化鈣盤型腔的性能,搭建了氟化鈣盤型腔耦合測試系統(tǒng),測試結(jié)果表明所加工的氟化鈣盤型的Q值為2.1×106。將實驗研究結(jié)果和理論研究結(jié)果相結(jié)合可以得出結(jié)論:通過改進氟化鈣盤型腔的加工方法和測試環(huán)境可以進一步提高氟化鈣盤型腔的Q值。
[Abstract]:As an important tool of optical research, optical microcavity has a wide application prospect, and has a great role in promoting the development of information technology industry. The optical microcavity has the characteristics of high quality factor, very small mode volume and very narrow spectral line width, which limit the light propagation in a very small range through the echo wall mode. Because of these unique advantages, echo wall mode optical microcavity has become a hot spot in optical microcavity, and has been widely used. At present, optical microcavity has been widely studied in low threshold laser, high sensitivity sensor, narrow linewidth filter and so on. In this paper, the theoretical and experimental study on the cavity of ultra-pure single crystal calcium fluoride has been carried out. Based on the background, development and application of the microcavity, the research content of this paper is put forward. Firstly, the performance parameters and loss mechanism of calcium fluoride disk cavity are described. The main limiting factors of (Q) are surface roughness and surface unclean loss. On the basis of theoretical research, a method of preparing calcium fluoride disk cavity by mechanical processing and chemical mechanical polishing is proposed. The preparation process of calcium fluoride disk cavity was introduced in detail, and the factors influencing the surface quality of the disc cavity were analyzed. The roughness of calcium fluoride disk cavity was measured by confocal microscope (LEXT OLS4100) after preparation. The results of roughness measurement show that the roughness of the cavity is 53 nm, which reaches the surface roughness of nanometer level. In order to further test the performance of calcium fluoride disk cavity, a coupling testing system of calcium fluoride disk cavity was set up. The test results show that the Q value of the fabricated calcium fluoride disk cavity is 2.1 脳 10 6. By combining the experimental results with the theoretical results, it can be concluded that the Q value of the calcium fluoride disk cavity can be further improved by improving the processing method and testing environment.
【學(xué)位授予單位】：中北大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TH703

【參考文獻】

相關(guān)期刊論文 前3條

1 嚴英占;吉U，

本文編號：2320647