【摘要】：近些年來,精密和超精密加工技術(shù)不斷發(fā)展,這對(duì)精密測量儀器的精度、穩(wěn)定性等方面提出了更高的要求�；跉飧�(dǎo)軌的運(yùn)動(dòng)精度高、摩擦小、穩(wěn)定性好等優(yōu)點(diǎn),其被廣泛應(yīng)用到精密測量儀器中,輪廓儀即是精密測量儀器中的典型代表。探究氣體誤差均化效應(yīng)作用規(guī)律及設(shè)計(jì)新型X-Y氣浮運(yùn)動(dòng)平臺(tái)成為如何提高輪廓儀測量精度需要研究的兩個(gè)關(guān)鍵問題,具有重要的理論和實(shí)際意義。根據(jù)物體表面形貌的形成規(guī)律,采用函數(shù)擬合的方法對(duì)物體平面輪廓進(jìn)行模擬,得出物體表面形貌的具體表達(dá)式,以此作為后續(xù)計(jì)算的數(shù)據(jù)儲(chǔ)備。根據(jù)氣體潤滑軸承的基本方程式N-S方程、雷諾方程及氣浮導(dǎo)軌的運(yùn)動(dòng)狀態(tài)可以推導(dǎo)出平面氣浮導(dǎo)軌的氣體潤滑控制方程,并得出其相應(yīng)的邊界條件。設(shè)置動(dòng)氣浮導(dǎo)軌位置參數(shù),根據(jù)動(dòng)氣浮導(dǎo)軌平衡原理及動(dòng)氣浮導(dǎo)軌力學(xué)平衡條件列出力學(xué)—數(shù)學(xué)平衡方程。運(yùn)用有限差的數(shù)值計(jì)算方法對(duì)相關(guān)方程進(jìn)行離散化,在MATLAB環(huán)境下進(jìn)行編程,采用超松弛迭代(SLOR)法,首先計(jì)算動(dòng)氣浮導(dǎo)軌在理論氣膜厚度條件下的承載力,再以此承載力為初始條件,計(jì)算模擬物體表面形貌條件下的動(dòng)導(dǎo)軌各個(gè)平衡位置參數(shù)值,之后運(yùn)用最小包容法求出動(dòng)導(dǎo)軌運(yùn)動(dòng)曲線的直線度誤差值。根據(jù)無氣體潤滑狀態(tài)動(dòng)導(dǎo)軌運(yùn)動(dòng)原理,采用兩點(diǎn)支撐平衡原理的計(jì)算方法求出無氣體潤滑狀態(tài)下動(dòng)導(dǎo)軌平衡狀態(tài)運(yùn)動(dòng)曲線,進(jìn)而也得出其直線度誤差。為了更進(jìn)一步探究氣體的誤差均化效應(yīng)作用規(guī)律,分別計(jì)算了在不同波長輪廓條件、不同理論氣膜厚度條件及不同運(yùn)動(dòng)位移條件下的誤差均化效果。為更大效果的發(fā)揮氣體的誤差均化效應(yīng),設(shè)計(jì)了新型X-Y氣浮運(yùn)動(dòng)平臺(tái),此結(jié)構(gòu)簡單,運(yùn)動(dòng)平穩(wěn),實(shí)現(xiàn)方便。運(yùn)動(dòng)平臺(tái)以絲杠導(dǎo)軌為導(dǎo)向機(jī)構(gòu),以氣浮為支撐,以氣浮軸承為推動(dòng)機(jī)構(gòu)。首先對(duì)運(yùn)動(dòng)平臺(tái)相關(guān)組件進(jìn)行了選型及性能分析,之后,繪制關(guān)鍵部件零件圖,確定了加工工藝方案,制造成樣機(jī),并搭建實(shí)驗(yàn)測試平臺(tái)。設(shè)計(jì)了承載力探究試驗(yàn)方案,得出了承載力與氣膜厚度關(guān)系規(guī)律；設(shè)計(jì)了運(yùn)動(dòng)誤差探究實(shí)驗(yàn)方案,測試了不同供氣壓力條件下氣浮平臺(tái)的運(yùn)動(dòng)軌跡,編制最小包容法程序,評(píng)定直線度誤差,通過多組實(shí)驗(yàn)數(shù)據(jù)對(duì)比,得出在實(shí)際工況條件下最佳誤差均化效果的供氣壓力值,這對(duì)后續(xù)實(shí)踐具有重要意義。
[Abstract]:In recent years, the development of precision and ultra-precision machining technology has put forward higher requirements on precision and stability of precision measuring instruments. Based on the advantages of high motion precision, small friction and good stability of air floating guide rail, it is widely used in precision measuring instruments, and the profilometer is a typical representative of precision measuring instruments. It is of great theoretical and practical significance to explore the law of homogenization effect of gas error and to design a new type of X-Y air-floating motion platform. It is necessary to study how to improve the measuring accuracy of the profilometer. According to the formation law of the surface topography of the object, the plane contour of the object is simulated by the method of function fitting, and the concrete expression of the surface topography of the object is obtained, which can be used as the data reserve for the subsequent calculation. According to the basic equations N-S equation, Reynolds equation and the motion state of air bearing, the governing equation of gas lubrication for plane air bearing can be deduced, and the corresponding boundary conditions can be obtained. According to the balance principle of the dynamic air flotation guide and the mechanical equilibrium condition of the dynamic air floating guide rail, the mechanical-mathematical equilibrium equation is set up by setting the position parameters of the dynamic air floating guide rail. The correlation equations are discretized by numerical method of finite difference, and programmed in MATLAB environment. The overrelaxation iterative (SLOR) method is used to calculate the bearing capacity of the dynamic air floating guideway under the condition of theoretical film thickness, first of all, the bearing capacity of the dynamic air floatation guideway is calculated under the condition of theoretical film thickness. Based on the initial condition of bearing capacity, the equilibrium position parameters of moving guideway under the condition of surface topography are calculated, and then the straightness error of the moving guide rail motion curve is obtained by using the minimum inclusion method. According to the motion principle of the moving guideway in the condition of no gas lubrication, the motion curve of the equilibrium state of the moving guideway under the condition of no gas lubrication is obtained by using the calculation method of the two-point support balance principle, and the straightness error is also obtained. In order to further explore the law of error homogenization effect of gas, the error homogenization effect is calculated under different wavelength profile conditions, different theoretical film thickness conditions and different moving displacement conditions. In order to give full play to the error homogenization effect of gas, a new X-Y floatation platform is designed, which has the advantages of simple structure, steady motion and convenient realization. The motion platform takes the lead screw guide rail as the guiding mechanism, the air-floated bearing as the support and the air-bearing as the driving mechanism. First of all, the selection and performance analysis of the components related to the motion platform are carried out. Then, the part drawing of the key components is drawn, the processing technology scheme is determined, the prototype is manufactured, and the experimental test platform is built. The bearing capacity inquiry test scheme is designed, the relationship between bearing capacity and film thickness is obtained, the motion error investigation experiment scheme is designed, the motion track of air floating platform under different air supply pressure is tested, and the program of minimum containment method is compiled. To evaluate the straightness error, through comparing the experimental data of many groups, the gas supply pressure value of the best error homogenization effect under the actual working condition is obtained, which is of great significance to the subsequent practice.
【學(xué)位授予單位】：西安工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TH703.4

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