【摘要】：熱式質(zhì)量流量計(jì)(Thermal Mass Flowmeter)是利用傳熱原理實(shí)現(xiàn)流量測(cè)量的儀表,其成本低,原理、結(jié)構(gòu)簡(jiǎn)單,無(wú)可動(dòng)部件,壓力損失小,測(cè)量范圍大,是當(dāng)前質(zhì)量流量計(jì)的研究熱點(diǎn),廣泛用于汽車電子、半導(dǎo)體工業(yè)、能源與環(huán)保等領(lǐng)域,但目前對(duì)熱式流量計(jì)的誤差理論研究不足,國(guó)內(nèi)市場(chǎng)的熱式質(zhì)量流量計(jì)普遍測(cè)量精度不高,另外,對(duì)熱式流量計(jì)傳感器深入的理論研究也很少,而傳感器作為直接感知流量信號(hào)的元件,其熱學(xué)特性對(duì)整個(gè)流量計(jì)的精度也有著重大影響。針對(duì)熱式質(zhì)量流量計(jì)測(cè)量精度不高的問(wèn)題,本文主要研究工作如下：1) 研究了常用類型的熱式流量傳感器,通過(guò)深入分析傳感器的特性,提出一項(xiàng)應(yīng)用于流量測(cè)量時(shí)的技術(shù)指標(biāo)：測(cè)速響應(yīng)時(shí)間,并設(shè)計(jì)實(shí)驗(yàn)進(jìn)行了分析研究；2) 從測(cè)量原理、數(shù)據(jù)處理、元器件性能等方面分析了熱式質(zhì)量流量計(jì)的測(cè)量不確定度來(lái)源,對(duì)主要測(cè)量不確定度來(lái)源氣體溫度變化、插入深度偏差進(jìn)行重點(diǎn)研究,給出了相應(yīng)的測(cè)量不確定度傳播系數(shù)；3) 詳細(xì)分析研究目前的恒溫控制和溫度補(bǔ)償方法,指出目前所用方法的缺點(diǎn)和不足,在此基礎(chǔ)上提出了一種精度提升方法——數(shù)字閉環(huán)恒溫控制及數(shù)字化溫度補(bǔ)償方法；4) 設(shè)計(jì)并搭建實(shí)驗(yàn)平臺(tái),進(jìn)行熱式質(zhì)量流量計(jì)樣機(jī)的標(biāo)定實(shí)驗(yàn),擬合標(biāo)定數(shù)據(jù)得到不同溫度點(diǎn)下的流量計(jì)特性曲線以及特性曲線系數(shù)與溫度的函數(shù),并設(shè)計(jì)實(shí)驗(yàn)驗(yàn)證提出的精度提升方法的有效性與準(zhǔn)確性。
[Abstract]:Thermal mass Flowmeter (Thermal Mass Flowmeter) is an instrument that uses heat transfer principle to realize flow measurement. Its cost is low, its principle is simple, its structure is simple, it has no moving parts, its pressure loss is small, its measurement range is large, and it is the research hotspot of mass Flowmeter at present. Widely used in automotive electronics, semiconductor industry, energy and environmental protection, but the error theory of thermal Flowmeter is not enough, the domestic market thermal mass Flowmeter measurement accuracy is not high, in addition, As a component of direct sensing flow signal, the thermal characteristics of the sensor have a significant impact on the accuracy of the Flowmeter. In order to solve the problem that the measurement accuracy of thermal mass Flowmeter is not high, the main research work in this paper is as follows: 1) the common types of thermal flow sensors are studied, and the characteristics of the sensors are deeply analyzed. A technical index used in flow measurement: response time of velocity measurement is put forward, and the experiment is designed to analyze and study the measurement principle and data processing. The sources of measurement uncertainty of thermal mass Flowmeter are analyzed in terms of the performance of components and components. The variation of gas temperature and the deviation of insertion depth from the main sources of measurement uncertainty are studied emphatically, and the transmission coefficient of measurement uncertainty is given. 3) the current methods of constant temperature control and temperature compensation are analyzed and studied in detail, and the shortcomings and shortcomings of the current methods are pointed out. On the basis of this, a method of improving precision is proposed, which is digital closed loop constant temperature control and digital temperature compensation. 4) designing and building the experimental platform, carrying on the calibration experiment of the thermal mass Flowmeter prototype, fitting the calibration data to get the characteristic curve of the Flowmeter at different temperature points and the function of the coefficient of the characteristic curve and the temperature. Experiments are designed to verify the effectiveness and accuracy of the proposed method.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TH814

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