【摘要】：利用原子力顯微鏡對(duì)材料表面的力學(xué)性能進(jìn)行定量表征時(shí),需要準(zhǔn)確知道原子力顯微鏡探針懸臂的彈性常數(shù),所以對(duì)彈性常數(shù)進(jìn)行校正十分重要。該文綜述近年來(lái)對(duì)探針懸臂彈性常數(shù)的校正方法,主要包括維度法、靜態(tài)撓度法、動(dòng)態(tài)撓度法。維度法對(duì)不同懸臂形狀(主要針對(duì)矩形、V型)進(jìn)行闡述,分析不同方法使用的數(shù)學(xué)模型與優(yōu)缺點(diǎn);靜態(tài)撓度法不僅對(duì)方法的數(shù)學(xué)模型進(jìn)行闡述,還著重介紹近年來(lái)對(duì)該方法精確度的改進(jìn)研究;動(dòng)態(tài)撓度法以附加質(zhì)量法、Sader法與熱調(diào)諧法分別闡述,比較3種方法的模型特點(diǎn)與先進(jìn)性;最后分析常用探針適合使用的校正方法,對(duì)今后校正方法的發(fā)展提供參考。
[Abstract]:When the mechanical properties of material surface are quantitatively characterized by atomic force microscope (AFM), it is necessary to know exactly the elastic constant of the AFM probe cantilever, so it is very important to correct the elastic constant. In this paper, the methods for correcting the elastic constants of the probe cantilever are reviewed, including dimensional method, static deflection method and dynamic deflection method. The dimensional method describes the different cantilever shapes (mainly for rectangular, V-shaped), analyzes the mathematical models, advantages and disadvantages used by different methods, and the static deflection method not only describes the mathematical model of the method, This paper also introduces the improvement of the accuracy of the method in recent years, the dynamic deflection method is described by the additional mass method Sader method and the thermal tuning method, and the model characteristics and advanced nature of the three methods are compared. Finally, the calibration methods suitable for the use of common probes are analyzed, which provides a reference for the development of calibration methods in the future.
【作者單位】： 聚合物分子工程國(guó)家重點(diǎn)實(shí)驗(yàn)室復(fù)旦大學(xué)高分子科學(xué)系;
【基金】：聚合物分子工程國(guó)家重點(diǎn)實(shí)驗(yàn)室儀器類開(kāi)放課題(KVH1717101/001/018)
【分類號(hào)】：TH742

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本文編號(hào)：2152261