高精度圓光柵測角系統(tǒng)誤差補償技術(shù)研究
[Abstract]:With the further development of production practice, higher requirements for accuracy and stability of angle measuring system are put forward. Based on the high precision angle measurement system of Renishaw incremental circular grating, this paper studies how to improve the angle measurement accuracy of the system by using multi-readout head structure and software compensation algorithm. Based on error modeling, the error elimination principle and application scenario of multi-reading head structure are analyzed. From the point of view of principle and simulation experiment, the compensation effect of numerical compensation algorithm (BP) and error backtracking compensation based on wavelet neural network (WNN) for the system and its applicable scenarios are compared and analyzed. By modeling the error of circular grating angle measuring system, the components of system error, random error and installation error are quantitatively analyzed, and the principle of eliminating error by multi-reading head structure is deduced. The effect of eliminating the error of multiple reading heads under the installation of tilting and misalignment is quantitatively analyzed. Four numerical compensation algorithms, piecewise linear, cubic spline interpolation, polynomial and harmonic compensation, are analyzed, and two iterative compensation experiments are carried out for the angle measurement error of discrete calibration. The compensation effect and applicability of the four algorithms are compared and analyzed. The compensation effect of harmonic compensation for angle measurement error is the best. The principle and method of BP neural network algorithm are analyzed, the BP network is improved by changing the training algorithm and adjusting the network structure, and the error is tested twice, and the compensation effect of the algorithm is compared with that of the numerical compensation algorithm. In order to optimize the system design, the compensation method of error traceability based on wavelet neural network is studied. The compensation effects of the two algorithms are compared. The experimental results show that the compensation effectiveness of the wavelet network algorithm and the numerical compensation algorithm / BP network algorithm are verified and their compensation effect and application situation are analyzed. The narrow wavelet network has the characteristics of neural network and wavelet transform, and the compensation effect is better than that of BP network. By comparing the generalized wavelet network with harmonic compensation algorithm, the generalized wavelet network can identify the additional error component. Therefore, the error compensation effect is better than harmonic compensation, which is suitable for dynamic error compensation.
【學(xué)位授予單位】:哈爾濱工業(yè)大學(xué)
【學(xué)位級別】:碩士
【學(xué)位授予年份】:2016
【分類號】:TH741.2
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