本文選題：羅蘭光柵 + 刻線誤差�。� 參考：《光學技術》2016年05期

【摘要】：羅蘭光柵作為羅蘭光柵光譜儀的核心分光元件對整個儀器至關重要,羅蘭光柵在制造和使用過程中主要存在刻線誤差、光柵的曲率半徑誤差和定位誤差。采用光線追跡的辦法分析羅蘭光柵的各種誤差對羅蘭光柵光譜儀接收能量的影響。結(jié)果表明:曲率半徑誤差對Ⅳ型羅蘭光柵光譜儀影響較小,刻線誤差必須控制在-0.2~0.15l/mm刻線以內(nèi),x方向定位誤差嚴格控制在-0.055~0.025mm之間,y方向定位誤差控制在-0.03~0.015mm之間,羅蘭光柵光譜儀對光柵繞z軸旋轉(zhuǎn)誤差最為敏感,控制在10-3度量級。通過對羅蘭光柵誤差的分析,為羅蘭光柵光譜儀的高效利用和研制奠定了基礎。
[Abstract]:Roland grating as the core spectrometer is very important to the whole instrument. In the process of manufacture and use of the Loran grating, there are the line errors, the curvature radius errors and the positioning errors of the grating. The influence of various errors of the Roland grating on the receiving energy of the Laurent grating spectrometer is analyzed by ray tracing. The results show that the curvature radius error has little influence on the fourth type Roland grating spectrometer, and the error must be controlled within -0.2 ~ 0.15l / mm curve. The positioning error of x direction must be strictly controlled in the range of -0.055 ~ 0.025 mm ~ (-0.03) ~ 0.015 mm. The Roland grating spectrometer is the most sensitive to the rotation error of the grating around z axis and is controlled at the 10-3 metric level. The analysis of the error of Roland grating lays a foundation for the efficient utilization and development of Roland grating spectrometer.
【作者單位】： 中國科學院長春光學精密機械與物理研究所;中國科學院大學;
【基金】：吉林省科技發(fā)展計劃項目(20140203011GX)資助的課題
【分類號】：TH744.1

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