本文選題：飛行時間二次離子質(zhì)譜儀 + 二次離子光學(xué)系統(tǒng)��； 參考：《吉林大學(xué)》2015年碩士論文

【摘要】：作為目前前沿的用于表面成分分析的科學(xué)裝置之一，飛行時間二次離子質(zhì)譜儀因具有分辨率高、靈敏度高、分析速度快、測量范圍寬、樣品消耗少等特點，無論在分析化學(xué)、環(huán)境科學(xué)，還是在生物醫(yī)學(xué)領(lǐng)域，都得到了越來越廣泛的應(yīng)用。飛行時間二次離子質(zhì)譜儀樣品消耗極少這一特點使其更加適用于地質(zhì)年代學(xué)樣品的分析。 本課題來源于“國家重大科學(xué)儀器設(shè)備開發(fā)專項-同位素地質(zhì)年代學(xué)專用TOF-SIMS科學(xué)裝置”項目，項目旨在開發(fā)應(yīng)用于地質(zhì)年代學(xué)同位素分析的高精度高分辨率的飛行時間二次離子質(zhì)譜儀。二次離子光學(xué)系統(tǒng)作為飛行時間二次離子質(zhì)譜儀中的關(guān)鍵部分，主要用于二次離子的提取、調(diào)整、聚焦、分離和檢測等。二次離子光學(xué)系統(tǒng)中的參數(shù)變化影響二次離子的運動情況進而影響儀器性能，因而對二次離子光學(xué)系統(tǒng)進行仿真研究能夠為二次離子光學(xué)系統(tǒng)設(shè)計和參數(shù)選擇提供指導(dǎo)和參考。 首先，結(jié)合飛行時間二次離子質(zhì)譜儀的原理和結(jié)構(gòu)、二次離子的初始運動情況以及離子光學(xué)理論，提出二次離子光學(xué)系統(tǒng)的結(jié)構(gòu)和各個組成部分的設(shè)計方案，并對各個組成部分的設(shè)計方案進行分析。然后，在SIMION軟件中建立二次離子光學(xué)系統(tǒng)各個組成部分的仿真模型并對仿真條件和操作過程進行闡述，進而對各個部分的參數(shù)進行配置，使得能夠進行精確的仿真分析。而后，將二次離子光學(xué)系統(tǒng)各個組成部分的仿真模型結(jié)合，建立二次離子光學(xué)系統(tǒng)整體仿真模型，通過仿真研究了二次離子光學(xué)系統(tǒng)中透鏡電極電壓變化對質(zhì)量分辨率、離子束斑直徑變化和傳輸效率的影響。最后，對仿真結(jié)果進行全面而細致的分析，確定了二次離子光學(xué)系統(tǒng)中透鏡最佳電極電壓組合配置。通過仿真模擬和SIMION軟件的數(shù)據(jù)記錄功能對數(shù)據(jù)進行分析和處理，不僅能夠觀察到二次離子運動軌跡，而且可以得到仿真出的質(zhì)譜圖。以穩(wěn)定同位素銅離子為研究對象分別進行仿真研究和實驗測試，仿真結(jié)果與實驗結(jié)果吻合，證明了二次離子光學(xué)系統(tǒng)仿真模型的有效性。
[Abstract]:As one of the most advanced scientific devices for surface component analysis, the time-of-flight secondary ion mass spectrometer has the characteristics of high resolution, high sensitivity, fast analysis speed, wide measurement range and less sample consumption, regardless of whether it is used in analytical chemistry. Environmental science, still in the field of biomedicine, has been more and more widely used. The low consumption of time of flight secondary ion mass spectrometer makes it more suitable for geochronological analysis. This project comes from the project of "National Major Scientific instrument and equipment Development Project-TOF-Sims Scientific device for Isotope Geochronology". The aim of the project is to develop a time of flight secondary ion mass spectrometer with high accuracy and high resolution for geochronological isotope analysis. As a key part of the time-of-flight secondary ion mass spectrometer, the secondary ion optical system is mainly used for the extraction, adjustment, focusing, separation and detection of secondary ions. The change of the parameters in the secondary ion optical system affects the motion of the secondary ion and then affects the performance of the instrument. Therefore, the simulation study of the secondary ion optical system can provide guidance and reference for the design and parameter selection of the secondary ion optics system. First of all, combining with the principle and structure of the time of flight secondary ion mass spectrometer, the initial motion of the secondary ion and the theory of ion optics, the structure of the secondary ion optical system and the design scheme of each component are proposed. And the design of each part of the analysis. Then, the simulation model of each component of secondary ion optics system is established in SIMION software, and the simulation conditions and operation process are described, and then the parameters of each part are configured to make accurate simulation analysis. Then, the simulation model of each component of the secondary ion optics system is combined, and the whole simulation model of the secondary ion optics system is established. The effect of the voltage change of the lens electrode on the mass resolution of the secondary ion optics system is studied by simulation. The effect of ion beam spot diameter change and transmission efficiency. Finally, the simulation results are analyzed comprehensively and meticulously, and the optimal electrode voltage combination configuration of the lens in the secondary ion optical system is determined. Through the simulation and the data recording function of SIMION software, not only the track of secondary ion motion can be observed, but also the mass spectrogram can be obtained. The simulation and experimental tests were carried out with the stable isotopic copper ion as the research object. The simulation results are in good agreement with the experimental results, which proves the validity of the simulation model of the secondary ion optical system.
【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TH843

【參考文獻】

相關(guān)期刊論文 前10條

1 杭偉;楊們原;王小如;黃本立;季歐;;高分辨本領(lǐng)飛行時間質(zhì)量分析器的設(shè)計[J];分析儀器;1993年03期

2 劉坤;王曉浩;唐飛;;一種敞開式離子聚焦裝置的研制及其檢測方法研究[J];分析化學(xué);2013年03期

3 田春生;二次離子質(zhì)譜儀(SIMS)的原理及應(yīng)用[J];中國集成電路;2005年08期

4 胡湛,金明星,劉航,張林林,丁大軍;離子光學(xué)系統(tǒng)簡單數(shù)值計算方法在反射式飛行時間質(zhì)譜儀中的應(yīng)用[J];計算物理;2003年01期

5 嚴琦,唐天同;靜電透鏡優(yōu)化設(shè)計的研究[J];西安交通大學(xué)學(xué)報;1992年05期

6 郭長娟;黃正旭;陳華勇;周振;;飛行時間質(zhì)譜儀國內(nèi)研究狀況及發(fā)展趨勢[J];現(xiàn)代儀器;2007年04期

7 陳立華，季歐;串級飛行時間質(zhì)量分析器的設(shè)計[J];廈門大學(xué)學(xué)報(自然科學(xué)版);1995年02期

8 徐貞林,田錫惠,佟暉;高分辨率高靈敏度飛行時間質(zhì)譜儀[J];儀器儀表學(xué)報;1996年05期

9 阿爾弗來德·貝寧豪文,查良鎮(zhèn);飛行時間二次離子質(zhì)譜——強有力的表面、界面和薄膜分析手段[J];真空;2002年05期

10 羅興華;濺射中性粒子質(zhì)譜(SNMS)[J];質(zhì)譜學(xué)報;1986年03期

，

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