本文選題：叉指式微加速度計(jì) + 電容邊緣效應(yīng)　； 參考：《電子科技大學(xué)》2016年碩士論文

【摘要】：MEMS微加速度計(jì)廣泛應(yīng)用于汽車安全氣囊、智能手機(jī)等日常生活的消費(fèi)產(chǎn)品中。其中叉指式微加速度計(jì)憑借成本低、檢測(cè)精度高、溫度敏感性小、噪聲特性好等優(yōu)點(diǎn)已成為MEMS微加速度計(jì)中備受關(guān)注的研究對(duì)象。在叉指式微加速度計(jì)的設(shè)計(jì)過程中,電容值的計(jì)算大多采用理想電容計(jì)算公式,而忽略了由于電容極板的邊緣效應(yīng)的存在而產(chǎn)生的附加電容,這會(huì)導(dǎo)致電容值在理論計(jì)算與實(shí)際使用過程之間存在差異。這種由電容邊緣效應(yīng)產(chǎn)生的實(shí)際電容值與理論結(jié)果間的誤差將影響叉指式微加速度計(jì)的輸出精度。所以,研究電容極板的邊緣效應(yīng)對(duì)微加速度計(jì)電容值的影響對(duì)于提高其精度具有重要幫助。目前,國內(nèi)外對(duì)于電容邊緣效應(yīng)的研究主要集中在對(duì)電容值計(jì)算公式的理論推導(dǎo)上,而電容的邊緣效應(yīng)對(duì)叉指式微加速度計(jì)輸出性能的影響很少被人提及。因此,本文推導(dǎo)了考慮電容邊緣效應(yīng)的電容值計(jì)算公式,由此分析了電容邊緣效應(yīng)對(duì)叉指式微加速度計(jì)的非線性度、靜電剛度和靈敏度性能方面的影響,并利用仿真進(jìn)行驗(yàn)證。首先對(duì)現(xiàn)有考慮電容邊緣效應(yīng)的電容值計(jì)算公式進(jìn)行對(duì)比與總結(jié),并在此基礎(chǔ)上推導(dǎo)出考慮電容邊緣效應(yīng)情況下微加速度計(jì)中叉指電容的電容值計(jì)算公式;然后分析電容邊緣效應(yīng)對(duì)叉指電容的電容值的影響,并分析能夠減小該影響的叉指電容的結(jié)構(gòu)參數(shù);最后基于本文中推導(dǎo)所得叉指電容的電容值計(jì)算公式,推導(dǎo)出叉指式微加速度計(jì)相應(yīng)的靜電剛度、靈敏度和非線性度關(guān)于電容的表達(dá)式,并分析電容的邊緣效應(yīng)對(duì)這些參數(shù)產(chǎn)生的影響。經(jīng)過有限元仿真的驗(yàn)證,結(jié)果表明本文推導(dǎo)的叉指電容的電容值公式可以很準(zhǔn)確的計(jì)算出叉指電容在考慮邊緣效應(yīng)情況下的電容值;理論分析表明,在叉指電容的結(jié)構(gòu)參數(shù)中,極板寬度的增加、極板間距的減小、極板厚度的減小以及極板對(duì)數(shù)的增加都會(huì)減小電容邊緣效應(yīng)對(duì)叉指電容的電容值的影響;在叉指式微加速度計(jì)的理論推導(dǎo)中,電容的邊緣效應(yīng)會(huì)使得敏感質(zhì)量塊所受的靜電力增大,靜電剛度變大,降低微加速度計(jì)輸出的靈敏度,增大微加速度計(jì)輸出的非線性度。
[Abstract]:MEMS microaccelerometers are widely used in automotive airbags, smartphones and other everyday consumer products. Due to the advantages of low cost, high detection accuracy, low temperature sensitivity and good noise characteristics, InterDigital accelerometers have become the focus of research in MEMS microaccelerometers. In the design process of cross-finger accelerometer, the calculation of capacitance is mostly based on the formula of ideal capacitance, but the additional capacitance is neglected because of the edge effect of capacitor plate. This will result in a difference between the theoretical calculation and the actual use of the capacitance. The error between the actual capacitance value and the theoretical results generated by the capacitance edge effect will affect the output accuracy of the cross-finger micro-accelerometer. Therefore, it is important to study the effect of the edge effect of the capacitor plate on the capacitance value of the micro accelerometer. At present, the research on the capacitance edge effect is mainly focused on the theoretical derivation of the capacitance calculation formula, but the influence of the capacitance edge effect on the output performance of the cross-finger micro-accelerometer is seldom mentioned. Therefore, the calculation formula of capacitance value considering capacitance edge effect is derived in this paper. The influence of capacitance edge effect on the nonlinearity, static stiffness and sensitivity performance of cross finger micro-accelerometer is analyzed and verified by simulation. Firstly, the current calculation formulas of capacitance value considering capacitance edge effect are compared and summarized, and the calculation formula of capacitance value of interDigital capacitance in micro-accelerometer considering capacitance edge effect is deduced. Then the influence of capacitance edge effect on the capacitance value of the interDigital capacitance is analyzed, and the structural parameters of the cross-finger capacitance which can reduce the influence are analyzed. Finally, the formula for calculating the capacitance value of the cross-finger capacitance is derived based on this paper. The expressions of the electrostatic stiffness, sensitivity and nonlinearity of the micro-accelerometer are derived, and the influence of the edge effect of the capacitance on these parameters is analyzed. The results of finite element simulation show that the capacitance formula derived in this paper can accurately calculate the capacitance value of the interDigital capacitance under the consideration of the edge effect, and the theoretical analysis shows that, in the structural parameters of the cross-finger capacitance, The increase of plate width, the decrease of plate spacing, the decrease of plate thickness and the increase of plate logarithm will reduce the effect of capacitance edge effect on the capacitance value of cross finger capacitance. The edge effect of capacitance will increase the static power of the sensitive mass block, increase the electrostatic stiffness, reduce the sensitivity of the micro-accelerometer output, and increase the nonlinearity of the micro-accelerometer output.
【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TH824.4

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