本文選題：氟化鈣 + 投影光刻物鏡��； 參考：《光學(xué)精密工程》2016年11期

【摘要】：考慮用CaF_2材料制作投影光刻物鏡可以明顯提高其性能指標(biāo),本文研究了CaF_2材料加工工藝的全流程,以實(shí)現(xiàn)CaF_2材料的全頻段高精度加工。首先,利用瀝青拋光膜和金剛石微粉使CaF_2元件有較好的面形和表面質(zhì)量。然后,優(yōu)化轉(zhuǎn)速、拋光盤移動(dòng)范圍、壓力等加工工藝參數(shù),并使用硅溶膠溶液拋光進(jìn)一步降低CaF_2元件的高頻誤差,逐漸去除加工中產(chǎn)生的劃痕并且獲得極小中頻誤差(Zernike殘差)和高頻粗糙度。最后,在不改變CaF_2元件高頻誤差的同時(shí)利用離子束加工精修元件面形。對(duì)100mm口徑氟化鈣材料平面進(jìn)行了加工和測試。結(jié)果表明:其Zernike 37項(xiàng)擬合面形誤差RMS值可達(dá)0.39nm,Zernike殘差RMS值為0.43nm,高頻粗糙度均值為0.31nm,實(shí)現(xiàn)了對(duì)CaF_2元件的亞納米精度加工,為研發(fā)高性能深紫外投影光刻物鏡奠定了良好基礎(chǔ)。
[Abstract]:It is considered that using CaF_2 material to make projection lithography objective lens can obviously improve its performance index. In this paper, the whole process of CaF_2 material processing technology is studied in order to realize the high precision processing of CaF_2 material in full frequency band. Firstly, the surface shape and surface quality of CaF_2 elements are improved by using asphalt polishing film and diamond powder. Then, the processing parameters such as rotation speed, moving range and pressure are optimized, and the high frequency error of CaF_2 element is further reduced by using silica sol solution polishing. The scratches produced in the process are gradually removed and the minimum if error Zernike residuals are obtained) and the high frequency roughness is obtained. Finally, the high frequency error of CaF_2 element is not changed, and the surface shape of the element is processed by ion beam. The plane of 100mm caliber calcium fluoride was processed and tested. The results show that the RMS value of Zernike 37 fitting surface error can reach 0.39 nm Zernike residual RMS value and the mean value of high frequency roughness is 0.31 nm. The subnanometer precision processing of CaF_2 element is realized, which lays a good foundation for the research and development of high performance deep ultraviolet projection lithography objective lens.
【作者單位】： 中國科學(xué)院長春光學(xué)精密機(jī)械與物理研究所超精密光學(xué)工程研究中心;
【基金】：國家科技重大專項(xiàng)(No.2009ZX02205)
【分類號(hào)】：TH74

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本文編號(hào)：1934018