本文選題：傳感器 + 薄膜熱電偶�。� 參考：《儀表技術(shù)與傳感器》2015年02期

【摘要】：針對(duì)正常工況下的內(nèi)燃機(jī)活塞表面溫度變化迅速的情況,研制了一種便于安裝的薄膜熱電偶測溫螺釘傳感器。采用直流脈沖磁控濺射的方法將Ni Cr/Ni Si熱電偶薄膜直接濺射沉積在與內(nèi)燃機(jī)活塞同種材料的測溫螺釘?shù)亩瞬?熱電偶薄膜和測溫螺釘之間采用相同的磁控濺射方法制備Al2O3絕緣薄膜,采用自行研制的薄膜熱電偶靜、動(dòng)態(tài)標(biāo)定系統(tǒng)對(duì)所研制的測溫螺釘進(jìn)行標(biāo)定,結(jié)果表明所研制的測溫螺釘傳感器在50~400℃范圍內(nèi)具有良好的線性和熱穩(wěn)定性,其塞貝克系數(shù)為41.9μV/K,最大線性誤差不超過0.9%。熱接點(diǎn)厚度僅為2μm,其響應(yīng)時(shí)間為47.5μs�？梢詽M足曲軸轉(zhuǎn)速為1 800 r/min的內(nèi)燃機(jī)活塞表面瞬態(tài)溫度測試的需求,為內(nèi)燃機(jī)結(jié)構(gòu)的優(yōu)化改進(jìn),新產(chǎn)品的開發(fā)提供了有力的保障,為新型傳感器技術(shù)的進(jìn)步做出了有益的嘗試。
[Abstract]:In view of the rapid change of piston surface temperature under normal working conditions, a thin film thermocouple sensor for measuring the temperature of screw is developed. The Ni Cr/Ni Si thermocouple film was deposited directly by DC pulse magnetron sputtering on the end of the temperature measuring screw of the same material as the piston of internal combustion engine. The Al2O3 insulating film was prepared by the same magnetron sputtering method between the thermocouple film and the thermometer screw. The thermocouple static and dynamic calibration system was used to calibrate the developed thermocouple screw. The results show that the developed sensor has good linearity and thermal stability in the range of 50,400 鈩，

本文編號(hào)：1890454