本文選題：熔石英 + 磁流變拋光��； 參考：《國防科技大學(xué)學(xué)報》2015年06期

【摘要】：為提升紫外熔石英元件抗激光損傷性能,針對傳統(tǒng)加工方法在加工過程中產(chǎn)生的破碎性缺陷和污染性缺陷,提出使用磁流變拋光結(jié)合HF酸刻蝕的組合工藝提升紫外熔石英元件抗激光損傷性能的方法。磁流變拋光特有的剪切去除原理能夠有效去除傳統(tǒng)加工過程產(chǎn)生的破碎性缺陷,同時不產(chǎn)生新的破碎性缺陷。HF酸動態(tài)酸刻蝕能夠有效減少加工過程中產(chǎn)生的金屬元素污染。實驗結(jié)果表明:經(jīng)過組合工藝處理的熔石英樣品,在7J/cm2·3ω激光通量輻照下?lián)p傷密度由0.2mm~~(-2)降至0.008mm~(-2),在8J/cm2·3ω激光通量輻照下?lián)p傷密度由1mm~(-2)降至0.1mm~(-2),其元件抗損傷性能提升顯著。
[Abstract]:In order to improve the anti-laser damage performance of ultraviolet fused quartz elements, the crushing and polluting defects produced by traditional processing methods were studied. A method of improving the laser damage resistance of ultraviolet fused quartz elements by the combination of magneto-rheological polishing and HF acid etching is presented. The special shear removal principle of magnetorheological polishing (MRP) can effectively remove the broken defects produced in the traditional processing process, and at the same time, it can effectively reduce the metal element pollution in the processing process without producing a new crushing defect .HF acid dynamic acid etching can effectively reduce the metal element pollution in the processing process. The experimental results show that the damage density of fused quartz samples treated by combined process is reduced from 0.2mm to 0.008mm / L under 7J/cm2 _ 3 蠅 laser flux, and the damage density is decreased from 1mm / m ~ (-2) to 0.1mm ~ (-1) mm ~ (-2) under 8J/cm2 _ 3 蠅 laser flux. The damage resistance performance of the element is improved significantly.
【作者單位】： 國防科技大學(xué)機電工程與自動化學(xué)院;超精密加工技術(shù)湖南省重點實驗室;
【基金】：國家自然科學(xué)基金資助項目(5127552;91323302)
【分類號】：TH74

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