本文選題：精密平臺(tái)　切入點(diǎn)：粘滑驅(qū)動(dòng)　出處：《哈爾濱工業(yè)大學(xué)》2016年碩士論文

【摘要】：隨著納米科學(xué)技術(shù)的快速發(fā)展,納米機(jī)電系統(tǒng)已經(jīng)廣泛應(yīng)用于光學(xué)、電子學(xué)、精密測(cè)量學(xué)、制造加工學(xué)等領(lǐng)域。在納米機(jī)電系統(tǒng)中,納米定位技術(shù)是一個(gè)十分前沿且非常重要的分支,納米定位技術(shù)能實(shí)現(xiàn)被控物體的高精度微小移動(dòng),它是人類探索微觀世界過程中非常重要的工具之一。具有納米級(jí)精度的精密平臺(tái)已經(jīng)廣泛應(yīng)用于掃描電子顯微鏡、原子力顯微鏡和精密光學(xué)平臺(tái)中,且對(duì)分辨率和頻率響應(yīng)有較高的要求。在這種背景下,設(shè)計(jì)一個(gè)精密可靠的二維精密平臺(tái)系統(tǒng),并在此基礎(chǔ)上展開研究。由于剪切型壓電陶瓷結(jié)構(gòu)緊湊、響應(yīng)頻率高,且可以直接驅(qū)動(dòng)載物臺(tái)運(yùn)動(dòng),因此選擇剪切型壓電陶瓷代替?zhèn)鹘y(tǒng)的伸縮型壓電陶瓷作為驅(qū)動(dòng)元件,可以大大減小驅(qū)動(dòng)元件的負(fù)載和精密平臺(tái)的結(jié)構(gòu)尺寸,從而保證精密平臺(tái)系統(tǒng)擁有更好的分辨率、響應(yīng)速度和穩(wěn)定性。故本文設(shè)計(jì)的二維精密平臺(tái)系統(tǒng)采用兩片剪切型壓電陶瓷作為驅(qū)動(dòng)元件,并將其上下疊加布置,同時(shí)保證其運(yùn)動(dòng)方向相互垂直。當(dāng)這兩片壓電陶瓷分別被驅(qū)動(dòng)電壓波形驅(qū)動(dòng)時(shí),壓電陶瓷組上表面將在水平面內(nèi)產(chǎn)生二維移動(dòng),并基于粘滑原理驅(qū)動(dòng)載物臺(tái)在二維平面內(nèi)實(shí)現(xiàn)納米級(jí)的精確運(yùn)動(dòng)。進(jìn)而,對(duì)載物臺(tái)進(jìn)行建模,分析載物臺(tái)在運(yùn)動(dòng)過程中的轉(zhuǎn)動(dòng)、傾倒和移動(dòng)問題。通過載物臺(tái)的結(jié)構(gòu)設(shè)計(jì)保證所設(shè)計(jì)的載物臺(tái)在運(yùn)動(dòng)過程中不會(huì)發(fā)生轉(zhuǎn)動(dòng)和傾倒。對(duì)于確定的精密平臺(tái)結(jié)構(gòu),驅(qū)動(dòng)電壓波形對(duì)系統(tǒng)性能有著非常大的影響。首先分析傳統(tǒng)鋸齒波驅(qū)動(dòng)電壓波形在控制過程中存在的問題,之后針對(duì)具體的運(yùn)動(dòng)位移和分辨率要求,設(shè)計(jì)具有較高平均速度的粗定位波形和具有較高分辨率的精定位波形,并通過MATLAB仿真方法對(duì)各種驅(qū)動(dòng)電壓波形的驅(qū)動(dòng)效果進(jìn)行比較。最后,根據(jù)設(shè)計(jì)結(jié)果搭建精密平臺(tái)樣機(jī),通過所搭建的驅(qū)動(dòng)電路控制壓電陶瓷組運(yùn)動(dòng),載物臺(tái)在壓電陶瓷組的驅(qū)動(dòng)下可以實(shí)現(xiàn)二維平面內(nèi)高精度、高分辨率的精密定位,并用電容測(cè)微儀檢測(cè)載物臺(tái)的運(yùn)動(dòng)狀態(tài)。根據(jù)實(shí)驗(yàn)方案,完成對(duì)精密平臺(tái)性能的測(cè)試實(shí)驗(yàn),從而驗(yàn)證了最終的精密平臺(tái)樣機(jī)能夠滿足本文所設(shè)計(jì)的性能指標(biāo)。
[Abstract]:With the rapid development of nanotechnology, nano-electromechanical systems have been widely used in the fields of optics, electronics, precision measurement, manufacturing and processing. Nano-localization technology is a very advanced and very important branch. Nano-positioning technology can achieve high precision and small movement of controlled objects. It is one of the most important tools in the process of exploring the microcosm. The precision platform with nanometer precision has been widely used in scanning electron microscope, atomic force microscope and precision optical platform. Under this background, a precise and reliable two-dimensional precision platform system is designed and studied. Due to the compact structure of shear piezoelectric ceramics, the response frequency is high. Therefore, the shear piezoelectric ceramic instead of the traditional telescopic piezoelectric ceramic as the driving element can greatly reduce the load of the driving element and the structure size of the precision platform. In order to ensure better resolution, response speed and stability of the precision platform system, the two-dimensional precision platform system designed in this paper uses two pieces of shear piezoelectric ceramics as driving elements, and superimposed them. At the same time, the direction of motion is perpendicular to each other. When the two piezoelectric ceramics are driven by the driving voltage waveforms, the upper surface of the piezoelectric ceramic group will move 2-D in the horizontal plane. Based on the principle of sticking-slip, the platform is driven to realize the accurate movement of nanometer level in two-dimensional plane. Then, the model of the platform is built, and the rotation of the platform in the course of motion is analyzed. Dumping and moving problems. The design of the structure of the platform ensures that the designed platform does not rotate and dump during the course of motion. The driving voltage waveform has a great influence on the performance of the system. Firstly, the problems existing in the control process of the traditional sawtooth wave driving voltage waveform are analyzed, and then the specific motion displacement and resolution requirements are analyzed. The coarse positioning waveform with high average velocity and the precise positioning waveform with high resolution are designed. The driving effects of various driving voltage waveforms are compared by MATLAB simulation method. Finally, a precision platform prototype is built according to the design results. By using the drive circuit to control the movement of the piezoelectric ceramic group, the high precision and high resolution positioning can be realized under the driving of the piezoelectric ceramic group. The motion state of the platform is detected by the capacitive micrometer. According to the experimental scheme, the performance of the precision platform is tested, which verifies that the final precision platform prototype can meet the performance index designed in this paper.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TH703

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