本文選題：角度不敏感顏色濾光片　切入點(diǎn)：Fabry-Perot諧振腔　出處：《浙江大學(xué)》2016年碩士論文　論文類型：學(xué)位論文

【摘要】：角度不敏感顏色濾光片在顯示、大角度探測(cè)、無(wú)油墨印刷等領(lǐng)域具有重要的應(yīng)用前景,其中金屬-介質(zhì)-金屬型角度不敏感濾光片具有透過(guò)率高,穩(wěn)定性好,易于制備等優(yōu)點(diǎn),受到了廣泛的研究與關(guān)注。本文通過(guò)光在金屬-介質(zhì)界面的色散分析和相移理論分析,得出了金屬-介質(zhì)-金屬型角度不敏感濾光片的設(shè)計(jì)思路,但受薄膜材料光學(xué)參數(shù)限制,金屬-介質(zhì)-金屬型角度不敏感濾光片僅被應(yīng)用于特定的中心波長(zhǎng)。為了打破介質(zhì)材料光學(xué)參數(shù)的限制,提出了以折射率可調(diào)的富硅氧化硅作為中間層介質(zhì)材料以滿足光學(xué)參數(shù)匹配要求的設(shè)計(jì)方案,然后通過(guò)對(duì)反應(yīng)磁控濺射技術(shù)的研究和制備參數(shù)的優(yōu)化,制備了一系列折射率不同的SiOx單層薄膜和厚度不同的單層金屬銀膜。最終利用以上材料,通過(guò)軟件仿真,設(shè)計(jì)并制備了基于金屬-介質(zhì)-金屬結(jié)構(gòu)的透射式與反射式角度不敏感濾光片,并對(duì)濾光片的透反射特性,角度不敏感特性進(jìn)行了測(cè)試分析,實(shí)現(xiàn)了入射光由0°變化至60°而透射峰與反射吸收峰的位置基本保持不變,透射式濾光片透過(guò)率在各諧振波段均達(dá)到32%以上,反射式濾光片反射率在非吸收波段達(dá)到60%以上。
[Abstract]:Angle insensitive color filters have important application prospects in the fields of display, large angle detection, printing without ink, etc. Among them, metal-dielectric-metal type angle-insensitive filters have the advantages of high transmittance, good stability and easy preparation. In this paper, through the dispersion analysis and phase shift theory analysis of the metal-dielectric interface, the design idea of the metal-dielectric-metal-molded angle-insensitive filter is obtained, but it is limited by the optical parameters of the thin film material. The metal-dielectric-metal type angle-insensitive filter is used only for specific central wavelengths. In order to break the limits of optical parameters of dielectric materials, In order to meet the requirements of optical parameter matching, a design scheme is proposed in which silicon oxide with adjustable refractive index is used as interlayer dielectric material to meet the requirements of optical parameter matching. Then the reactive magnetron sputtering technology and the optimization of fabrication parameters are studied. A series of SiOx monolayer films with different refractive index and monolayer silver films with different thickness were prepared. The transmission and reflection angle-insensitive filters based on metal-dielectric-metal structure are designed and fabricated, and the transmittance and angle-insensitive characteristics of the filters are tested and analyzed. The incident light changed from 0 擄to 60 擄, and the position of transmission peak and absorption peak remained unchanged. The transmittance of transmission filter was above 32% in each resonant band, and the reflectivity of reflective filter was over 60% in non-absorption band.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TH74

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