本文關(guān)鍵詞： 壓電驅(qū)動(dòng)器 雙穩(wěn)態(tài)結(jié)構(gòu) 位移放大機(jī)構(gòu) 多級(jí)驅(qū)動(dòng) 優(yōu)化設(shè)計(jì)　出處：《大連理工大學(xué)》2015年碩士論文　論文類型：學(xué)位論文

【摘要】：精密定位驅(qū)動(dòng)技術(shù)是實(shí)現(xiàn)精密制造和精確測(cè)量的重要途徑,在航空航天、武器系統(tǒng)、微機(jī)械制造、集成電路、超精密加工、半導(dǎo)體技術(shù)、微電子封裝(SMT)、生命與醫(yī)療科學(xué)等領(lǐng)域具有廣泛的應(yīng)用需求。精密定位驅(qū)動(dòng)技術(shù)的實(shí)現(xiàn)依賴于智能驅(qū)動(dòng)材料與彈性支撐結(jié)構(gòu)的集成設(shè)計(jì),而壓電智能材料所固有的遲滯非線性己成為限制定位精度提高的瓶頸,并且在特殊情況下會(huì)引起系統(tǒng)震蕩,造成系統(tǒng)位移輸出不穩(wěn)定。因此,需要從驅(qū)動(dòng)器彈性結(jié)構(gòu)設(shè)計(jì)方面探索和研究消除遲滯影響的新途徑。本論文主要展開了以下研究工作：(1)針對(duì)傳統(tǒng)壓電驅(qū)動(dòng)器驅(qū)動(dòng)位移小、能耗高和受壓電材料遲滯非線性影響嚴(yán)重的問題,提出兩種基于雙穩(wěn)態(tài)彈性元件的新型壓電驅(qū)動(dòng)器設(shè)計(jì)方法,利用雙穩(wěn)態(tài)結(jié)構(gòu)在特定位置無需驅(qū)動(dòng)電壓即可定位的特征來消除材料遲滯造成的定位誤差。具體包括：(a)以保證雙穩(wěn)態(tài)特征前提下的低驅(qū)動(dòng)能耗為目標(biāo),建立了雙穩(wěn)態(tài)梁式驅(qū)動(dòng)器壓電材料布局優(yōu)化設(shè)計(jì)模型,得到一種中間鋪設(shè)壓電材料的新型雙穩(wěn)態(tài)驅(qū)動(dòng)器,分析了壓電材料的鋪設(shè)位置和長(zhǎng)度對(duì)驅(qū)動(dòng)能耗和行程的影響關(guān)系；(b)以增大驅(qū)動(dòng)器行程為目標(biāo),提出一種新型大行程雙穩(wěn)態(tài)驅(qū)動(dòng)器的設(shè)計(jì)方法,協(xié)同設(shè)計(jì)壓電材料布置、雙穩(wěn)態(tài)梁構(gòu)型、位移放大機(jī)構(gòu)及其連接形式等參數(shù),使定位點(diǎn)處所需要的驅(qū)動(dòng)電壓為零,進(jìn)而消除遲滯的影響,數(shù)值實(shí)驗(yàn)驗(yàn)證了所提出的設(shè)計(jì)方法的可行性。(2)針對(duì)多級(jí)精密定位的應(yīng)用需求,提出多單胞結(jié)構(gòu)級(jí)聯(lián)的多穩(wěn)態(tài)定位驅(qū)動(dòng)器的設(shè)計(jì)方法。(a)以低驅(qū)動(dòng)電壓為目標(biāo),借助拓?fù)鋬?yōu)化技術(shù),建立了雙穩(wěn)態(tài)鼓包式驅(qū)動(dòng)器的壓電材料布置優(yōu)化設(shè)計(jì)模型；(b)以具有不同行程的雙穩(wěn)態(tài)鼓包作為單胞結(jié)構(gòu),設(shè)計(jì)了多胞式大行程多級(jí)精密定位驅(qū)動(dòng)器,以雙穩(wěn)態(tài)特征下的低驅(qū)動(dòng)電壓為設(shè)計(jì)目標(biāo),建立了單胞表面壓電材料布置優(yōu)化設(shè)計(jì)方法。以單胞結(jié)構(gòu)表面不同扇區(qū)壓電材料的驅(qū)動(dòng)電壓和加載序列為控制參數(shù),通過控制不同單胞和不同扇區(qū)的驅(qū)動(dòng)電壓和加載序列,進(jìn)而實(shí)現(xiàn)驅(qū)動(dòng)器的伸縮平動(dòng)和彎曲運(yùn)動(dòng),實(shí)現(xiàn)空間準(zhǔn)確定位功能,數(shù)值實(shí)驗(yàn)證明了多級(jí)定位驅(qū)動(dòng)器設(shè)計(jì)方法的有效性。本論文獲得國家自然科學(xué)基金項(xiàng)目(51105059,11372063)和中航產(chǎn)學(xué)研專項(xiàng)資金資助項(xiàng)目(CXY2011DG34)的資助,在此表示感謝。
[Abstract]:Precise positioning and driving technology is an important way to achieve precision manufacturing and accurate measurement, in aerospace, weapon systems, micro-mechanical manufacturing, integrated circuits, ultra-precision processing, semiconductor technology, Microelectronic packaging has a wide range of applications in life and medical sciences. The realization of precise positioning drive technology depends on the integrated design of intelligent driving materials and elastic supporting structures. The inherent hysteresis nonlinearity of piezoelectric intelligent materials has become the bottleneck to limit the accuracy of positioning, and in special cases will cause system oscillation, resulting in the system displacement output instability. It is necessary to explore and study a new way to eliminate the hysteresis effect from the aspect of actuator elastic structure design. In this thesis, the following research work is carried out: 1) aiming at the small driving displacement of traditional piezoelectric actuators, Two new design methods of piezoelectric actuator based on bistable elastic element are proposed, which have high energy consumption and are seriously affected by hysteresis nonlinearity of piezoelectric material. In order to eliminate the location error caused by material hysteresis, the bistable structure can be located at a certain position without driving voltage. Specifically, the goal is to ensure the low drive energy consumption under the condition of bistable characteristic. The optimal design model of piezoelectric material layout for bistable beam actuator is established, and a new type of bistable actuator with intermediate piezoelectric material is obtained. In this paper, the influence of laying position and length of piezoelectric material on driving energy consumption and stroke is analyzed. Aiming at increasing drive stroke, a new design method of bistable actuator with large stroke is proposed to design piezoelectric material arrangement in cooperation. The parameters of bistable beam configuration, displacement amplification mechanism and its connection form make the driving voltage at the position point zero, thus eliminating the effect of hysteresis. Numerical experiments verify the feasibility of the proposed design method. (2) aiming at the application demand of multi-stage precise positioning, a design method of multi-steady state positioning driver with multi-cell structure cascade is proposed. The design method of multi-steady-state positioning driver with multi-cell structure is aimed at the low driving voltage, and the topology optimization technique is used. An optimal design model of piezoelectric material arrangement for bistable bistable drum actuator is established. The bistable bistable drum with different stroke is used as the unit cell structure, and the multi-stage precise positioning actuator with large stroke is designed. Based on the design goal of low driving voltage with bistable characteristics, an optimal design method for piezoelectric material layout on the surface of a single cell is established. The driving voltage and loading sequence of different sectors of piezoelectric materials on the surface of the unit cell structure are taken as the control parameters. By controlling the driving voltage and loading sequence of different unit cells and different sectors, the retractive translation and bending motion of the driver can be realized, and the function of accurate positioning in space can be realized. Numerical experiments have proved the effectiveness of the design method of multi-stage positioning driver. This paper is supported by the National Natural Science Foundation of China (51105059) and the CXY2011DG34).
【學(xué)位授予單位】：大連理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TB381;TH703

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本文編號(hào)：1506498