本文關(guān)鍵詞：高精度角位移平臺(tái)的研制及誤差補(bǔ)償　出處：《儀器儀表學(xué)報(bào)》2016年05期 　論文類型：期刊論文

  更多相關(guān)文章： 拉曼光譜儀 角位移平臺(tái) 直驅(qū) 補(bǔ)償校正

【摘要】：在拉曼光譜儀中,要求承載分光元件轉(zhuǎn)動(dòng)的角位移平臺(tái)在具備較大的轉(zhuǎn)動(dòng)范圍、較高的轉(zhuǎn)角分辨率和轉(zhuǎn)角定位精度的同時(shí)還具備較快的轉(zhuǎn)動(dòng)速度,傳統(tǒng)的幾種驅(qū)動(dòng)方式很難同時(shí)滿足上述所有要求。有鑒于此,設(shè)計(jì)了一種采用力矩電機(jī)直接驅(qū)動(dòng)技術(shù)的高精度角位移平臺(tái)。一般控制方法的控制精度在很大程度上依賴于反饋元件的測量精度,為了突破反饋元件測量精度對整個(gè)控制精度的影響,采用了一種更為精確的誤差補(bǔ)償校正技術(shù),并搭建了誤差測量裝置,將測得的絕對轉(zhuǎn)角誤差在控制器中通過一定的控制算法加以有效的補(bǔ)償。最后,對結(jié)構(gòu)設(shè)計(jì)和誤差補(bǔ)償校正的效果進(jìn)行了實(shí)驗(yàn)檢測。結(jié)果顯示:當(dāng)測量步距為1°時(shí),雙向絕對定位精度優(yōu)于1.008″;當(dāng)測量步距為10°時(shí),雙向絕對定位精度為0.648″;回轉(zhuǎn)軸系的軸向晃動(dòng)誤差小于±5″。以上結(jié)果驗(yàn)證了該角位移平臺(tái)具有機(jī)械精度高、轉(zhuǎn)角分辨率高、定位準(zhǔn)確等技術(shù)優(yōu)勢,能夠滿足拉曼光譜儀等相關(guān)儀器的使用需求。
[Abstract]:In the Raman spectrometer, bearing light splitting element rotating angular displacement platform with large rotation range, high angle resolution and angular positioning precision at the same time also has the high rotation speed, several traditional driving mode is difficult to meet all the above requirements. Therefore, the design of a high precision angular displacement of the platform torque motor direct drive technology. The measurement precision control precision control method greatly depends on the feedback element, in order to break through the element influence on the measurement accuracy of feedback control accuracy, a more accurate error compensation technology, and set up the error measuring device, the absolute angular error measurement in the controller through a control algorithm to be compensated effectively. Finally, the structure design and error compensation effect was experimentally. Test. The results showed that when the measurement step is 1 degrees, two absolute positioning accuracy is superior to 1.008 "; when the measuring step is 10 degrees, two absolute positioning precision is 0.648"; the axial shaking error of spindle is less than 5 ". The above results show that the angular displacement platform with high precision machinery. The angle of high resolution, accurate positioning and other technical advantages, can meet the use of Raman spectrometer and other related equipment needs.

【作者單位】： 中國科學(xué)院長春光學(xué)精密機(jī)械與物理研究所;中國科學(xué)院大學(xué);吉林大學(xué)機(jī)械科學(xué)與工程學(xué)院;
【基金】：國家重大科學(xué)儀器設(shè)備開發(fā)專項(xiàng)(2014YQ120351) 國家重大科研裝備研制項(xiàng)目(ZDYZ2008-1) 國家重點(diǎn)基礎(chǔ)研究發(fā)展計(jì)劃(973)(2014CB049500) 吉林省科技發(fā)展計(jì)劃(20140204075GX)項(xiàng)目資助
【分類號(hào)】：TH744.1
【正文快照】： 1引言高精度的角度位移平臺(tái)在精密機(jī)械、光譜儀器、光電設(shè)備、高檔數(shù)控機(jī)床等許多場合都有著非常廣泛的應(yīng)用。在拉曼光譜儀、單色儀等光學(xué)儀器中,作為分光元件的棱鏡或光柵需繞通過回轉(zhuǎn)中心的軸線做某些特定規(guī)律的回轉(zhuǎn)運(yùn)動(dòng),儀器波長與分光元件轉(zhuǎn)角之間具有一定的函數(shù)關(guān)系[1-3]

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本文編號(hào)：1396423