【摘要】：TFT-LCD(Thin Film Transistor Liquid Crystal Display)是主流的平板顯示技術(shù),TFT-LCD生產(chǎn)設(shè)備的技術(shù)性能決定著液晶顯示面板的生產(chǎn)工藝水平。中航光電子液晶顯示面板向小尺寸轉(zhuǎn)型,部分設(shè)備的性能不能滿(mǎn)足小尺寸面板的工藝技術(shù)要求。本文針對(duì)真空貼合設(shè)備在對(duì)應(yīng)小尺寸面板時(shí)面板存在顯示漏光和液晶屏氣泡的問(wèn)題,對(duì)真空貼合設(shè)備工藝流程、真空條件下基板吸附和剝離技術(shù)開(kāi)展研究,做了以下的研究工作:真空貼合制品缺陷分析和新工藝模型建立,論文分析了真空貼合設(shè)備結(jié)構(gòu)和工藝原理,提出了表征基板貼合精度的工藝參數(shù),分析了液晶面板顯示漏光和液晶屏氣泡缺陷產(chǎn)生的原因,建立了新的工藝模型,對(duì)真空貼合設(shè)備提出了改進(jìn)的設(shè)計(jì)方案,并分析了其實(shí)現(xiàn)的可行性�；逦胶蛣冸x單元的設(shè)計(jì)和可靠性驗(yàn)證,設(shè)計(jì)新型的粘性橡膠吸附單元和高壓氣囊剝離單元,通過(guò)實(shí)驗(yàn)驗(yàn)證了其動(dòng)作的可靠性,通過(guò)制品驗(yàn)證了新型基板吸附和剝離單元不會(huì)造成面板不良。定盤(pán)和電氣系統(tǒng)的設(shè)計(jì),設(shè)計(jì)了SDC(Stick Diaphragm Chuck)基板吸附和剝離單元定盤(pán)和電氣系統(tǒng),使其滿(mǎn)足基板吸附和剝離動(dòng)作的要求�？刂瞥绦蚣叭藱C(jī)界面設(shè)計(jì),設(shè)計(jì)了控制程序和觸摸屏人機(jī)界面,使真空貼合設(shè)備的動(dòng)作時(shí)序滿(mǎn)足新工藝流程的要求�？傃b及設(shè)備性能測(cè)試,進(jìn)行了真空貼合設(shè)備總裝和系統(tǒng)調(diào)試,通過(guò)量產(chǎn)測(cè)試驗(yàn)證了真空貼合設(shè)備改進(jìn)和新工藝模型的有效性。
[Abstract]:TFT-LCD (Thin Film Transistor Liquid Crystal Display) is the mainstream flat panel display technology. The technical performance of TFT-LCD equipment determines the production process level of LCD panel. The optoelectronic liquid crystal display panel of CAAC is transformed to small size, and the performance of some equipments can not meet the technical requirements of small size panel. In this paper, aiming at the problem of showing light leakage and liquid crystal screen bubble in the panel of vacuum bonding equipment when it corresponds to small panel, the technological process of vacuum bonding equipment and the technology of substrate adsorption and stripping under vacuum condition are studied in this paper. The following research work is done: defect analysis of vacuum bonding products and establishment of new process model. The structure and process principle of vacuum bonding equipment are analyzed, and the process parameters to characterize the precision of substrate bonding are put forward. The causes of light leakage and bubble defects in liquid crystal panel display are analyzed, a new process model is established, an improved design scheme for vacuum bonding equipment is put forward, and the feasibility of its realization is analyzed. The design and reliability verification of the substrate adsorption and stripping unit, the design of the new viscous rubber adsorption unit and the high pressure air bag stripping unit, and the reliability of the operation of the unit are verified by experiments. It is proved by the products that the new type of substrate adsorption and stripping unit will not cause the panel to be bad. The design of the fixed disk and electrical system, and the design of the SDC (Stick Diaphragm Chuck) substrate adsorption and stripping unit fixed disc and electrical system to meet the needs of the substrate adsorption and stripping action. The control program and man-machine interface are designed, and the control program and touch screen interface are designed to meet the requirements of the new process. Final assembly and equipment performance test, vacuum bonding equipment assembly and system debugging, through mass production test to verify the improvement of vacuum bonding equipment and the effectiveness of the new process model.
【學(xué)位授予單位】：上海交通大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2014
【分類(lèi)號(hào)】：TN873.93

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