電容式硅微陀螺接口ASIC芯片集成技術(shù)研究
發(fā)布時間：2018-09-04 15:54
【摘要】：與傳統(tǒng)的陀螺儀相比，基于MEMS工藝和CMOS技術(shù)的微機械陀螺具有低成本輕體積低功耗高可靠性等特點，不僅在汽車電子醫(yī)療器械運動機械等民用領(lǐng)域需求廣泛，而且在戰(zhàn)術(shù)導(dǎo)彈微型飛行器等等軍事領(lǐng)域也得到大量的應(yīng)用隨著應(yīng)用范圍的不斷拓展，對電容式硅微陀螺系統(tǒng)提出了更高的要求 電容式硅微陀螺系統(tǒng)中接口ASIC芯片的集成技術(shù)需要解決如下關(guān)鍵問題：接口電路中驅(qū)動模態(tài)和檢測模態(tài)都存在非線性，會對系統(tǒng)的靈敏度穩(wěn)定性等關(guān)鍵性能產(chǎn)生影響；對于微機械陀螺驅(qū)動電路而言，影響驅(qū)動穩(wěn)定性的重要因素是相位噪聲，目前研究缺乏多噪聲源相位噪聲的分析以及優(yōu)化手段；正交誤差和失調(diào)誤差等非理想因素是影響微機械陀螺性能提升的重要因素，而且正交誤差的反饋信號的耦合也影響電路檢測精度本文針對上述問題進行了微陀螺接口電路非線性閉環(huán)驅(qū)動多噪聲源相位噪聲模型正交誤差和失調(diào)誤差補償?shù)汝P(guān)鍵技術(shù)的深入研究 首先，本文通過理論分析對微陀螺接口電路各部分的非線性進行研究，微陀螺系統(tǒng)中驅(qū)動模態(tài)的非線性主要是由驅(qū)動電壓到驅(qū)動位移的轉(zhuǎn)化過程中產(chǎn)生，檢測模態(tài)中的非線性主要是由檢測位移到前級輸出電壓以及接口電路中電壓信號的二次解調(diào)過程產(chǎn)生的，文中定性分析了包括驅(qū)動模態(tài)和檢測模態(tài)引起非線性的原因，定量分析了二次解調(diào)電路中解調(diào)參考信號對系統(tǒng)非線性的影響針對相敏解調(diào)電路的正負傳遞特性不一致的問題進行了研究，提出了改進方案，并設(shè)計了高線性度的相敏解調(diào)電路 其次，，針對多噪聲源對驅(qū)動模態(tài)相位噪聲的影響，建立了多噪聲源自激驅(qū)動電路相位噪聲耦合模型，該模型得出微陀螺閉環(huán)驅(qū)動電路中的相位噪聲主要影響源包括：接近直流的低頻干擾驅(qū)動諧振頻率附近的噪聲驅(qū)動信號多次諧波處的噪聲針對前級電荷放大器進行了噪聲測試，并對驅(qū)動環(huán)路進行了噪聲注入實驗，實驗得出接近直流部分為低頻噪聲和驅(qū)動諧振頻率附近的噪聲是主要影響因素，通過減小低頻噪聲可降低相位噪聲對電荷放大器噪聲模型進行了分析，得出了電路前級電荷放大器噪聲參數(shù)的折中關(guān)系，設(shè)計了基于電容匹配技術(shù)的低噪聲電荷放大器，降低了驅(qū)動環(huán)路的相位噪聲，提高了驅(qū)動環(huán)路的頻率穩(wěn)定性 再次，為了解決微陀螺系統(tǒng)正交耦合誤差的問題，在理論分析的基礎(chǔ)上建立了消除正交誤差的行為級模型，在該模型的指導(dǎo)下，提出了一種新穎的兼容無反饋電極的正交誤差消除電路，該電路在有效消除正交誤差的同時避免了信號耦合干擾增加等問題 最后，設(shè)計了基于頻率調(diào)制原理的驅(qū)動電路，該電路可消除驅(qū)動信號對位移信號的同頻耦合，同時兼容低Q值的陀螺結(jié)構(gòu)設(shè)計了基于二次解調(diào)原理的檢測電路設(shè)計了微陀螺接口ASIC芯片的模塊，包括電容電壓轉(zhuǎn)換器濾波器移相器自動增益控制單元混頻器電荷放大器相敏解調(diào)器等，對芯片進行了仿真版圖設(shè)計流片芯片面積：5.05×3.7mm2，該芯片與敏感結(jié)構(gòu)組成的微陀螺系統(tǒng)測試結(jié)果表明：量程為±800o/s，零位穩(wěn)定性為30o/h，非線性度0.1%，噪聲0.003/s/Hz1/2
[Abstract]:Compared with traditional gyroscopes, micromachined gyroscopes based on MEMS technology and CMOS technology have the characteristics of low cost, light volume, low power consumption and high reliability. They are not only widely used in civil fields such as automotive electronic medical devices and motion machinery, but also widely used in military fields such as tactical missile micro air vehicles. The development of capacitive silicon micromachined gyroscope system is further demanded.
The integration technology of interface ASIC chip in capacitive silicon micro-gyroscope system needs to solve the following key problems: the drive mode and the detection mode are nonlinear in the interface circuit, which will affect the sensitivity and stability of the system; for the driving circuit of micro-mechanical gyroscope, the important factor affecting the driving stability is Phase noise, the lack of multi-noise source phase noise analysis and optimization methods; orthogonal error and misalignment error and other non-ideal factors are important factors affecting the performance of micromachined gyroscopes, and the coupling of orthogonal error feedback signal also affects the circuit detection accuracy. In-depth study on the key technologies of phase noise model orthogonal error and offset error compensation for circuit nonlinear closed-loop driving multi-noise sources
Firstly, the non-linearity of the interface circuit of micro-gyroscope is studied by theoretical analysis. The non-linearity of the driving mode in micro-gyroscope system is mainly caused by the conversion from driving voltage to driving displacement. The non-linearity of the detection mode is mainly caused by the detection displacement to the front output voltage and the voltage signal in the interface circuit. This paper qualitatively analyzes the causes of nonlinearity including driving mode and detecting mode, quantitatively analyzes the influence of demodulation reference signal on system nonlinearity in secondary demodulation circuit, and studies the inconsistency between positive and negative transmission characteristics of phase-sensitive demodulation circuit, and puts forward an improved scheme. A phase sensitive demodulation circuit with high linearity is designed.
Secondly, aiming at the influence of multi-noise sources on the phase noise of driving modes, a phase noise coupling model of self-excited driving circuit with multi-noise sources is established. The model shows that the main influence sources of phase noise in the closed-loop driving circuit of micro-gyroscope include: the multiple harmonics of noise driving signal near the resonant frequency of low-frequency interference driving near DC The noise of the preamplifier is tested and the noise injection experiment of the driving loop is carried out. The results show that the noise near the DC part is low frequency noise and the noise near the driving resonant frequency is the main influencing factor. The noise model of the charge amplifier is analyzed by reducing the low frequency noise and the phase noise. The compromise relation between the noise parameters of the circuit preamplifier is obtained. A low noise charge amplifier based on capacitance matching technology is designed, which reduces the phase noise of the driving loop and improves the frequency stability of the driving loop.
Thirdly, in order to solve the problem of orthogonal coupling error of micro-gyroscope system, a behavior-level model for eliminating orthogonal error is established on the basis of theoretical analysis. Under the guidance of this model, a novel orthogonal error eliminating circuit compatible with no feedback electrode is proposed, which can effectively eliminate orthogonal error and avoid signal coupling. Interference increase
Finally, a driving circuit based on frequency modulation principle is designed, which can eliminate the same frequency coupling between driving signal and displacement signal, and is compatible with gyroscope structure with low Q value. A detection circuit based on the principle of secondary demodulation is designed to design ASIC chip module of micro-gyroscope interface, including capacitor voltage converter filter phase shifter automatic increase. The chip area is 5.05 *3.7 mm2. The test results of the micro-gyroscope system consisting of the chip and the sensitive structure show that the measurement range is +800o/s, the zero-position stability is 30o/h, the nonlinearity is 0.1%, and the noise is 0.003/s/Hz 1/2.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2014
【分類號】：TN96;TP212
[Abstract]:Compared with traditional gyroscopes, micromachined gyroscopes based on MEMS technology and CMOS technology have the characteristics of low cost, light volume, low power consumption and high reliability. They are not only widely used in civil fields such as automotive electronic medical devices and motion machinery, but also widely used in military fields such as tactical missile micro air vehicles. The development of capacitive silicon micromachined gyroscope system is further demanded.
The integration technology of interface ASIC chip in capacitive silicon micro-gyroscope system needs to solve the following key problems: the drive mode and the detection mode are nonlinear in the interface circuit, which will affect the sensitivity and stability of the system; for the driving circuit of micro-mechanical gyroscope, the important factor affecting the driving stability is Phase noise, the lack of multi-noise source phase noise analysis and optimization methods; orthogonal error and misalignment error and other non-ideal factors are important factors affecting the performance of micromachined gyroscopes, and the coupling of orthogonal error feedback signal also affects the circuit detection accuracy. In-depth study on the key technologies of phase noise model orthogonal error and offset error compensation for circuit nonlinear closed-loop driving multi-noise sources
Firstly, the non-linearity of the interface circuit of micro-gyroscope is studied by theoretical analysis. The non-linearity of the driving mode in micro-gyroscope system is mainly caused by the conversion from driving voltage to driving displacement. The non-linearity of the detection mode is mainly caused by the detection displacement to the front output voltage and the voltage signal in the interface circuit. This paper qualitatively analyzes the causes of nonlinearity including driving mode and detecting mode, quantitatively analyzes the influence of demodulation reference signal on system nonlinearity in secondary demodulation circuit, and studies the inconsistency between positive and negative transmission characteristics of phase-sensitive demodulation circuit, and puts forward an improved scheme. A phase sensitive demodulation circuit with high linearity is designed.
Secondly, aiming at the influence of multi-noise sources on the phase noise of driving modes, a phase noise coupling model of self-excited driving circuit with multi-noise sources is established. The model shows that the main influence sources of phase noise in the closed-loop driving circuit of micro-gyroscope include: the multiple harmonics of noise driving signal near the resonant frequency of low-frequency interference driving near DC The noise of the preamplifier is tested and the noise injection experiment of the driving loop is carried out. The results show that the noise near the DC part is low frequency noise and the noise near the driving resonant frequency is the main influencing factor. The noise model of the charge amplifier is analyzed by reducing the low frequency noise and the phase noise. The compromise relation between the noise parameters of the circuit preamplifier is obtained. A low noise charge amplifier based on capacitance matching technology is designed, which reduces the phase noise of the driving loop and improves the frequency stability of the driving loop.
Thirdly, in order to solve the problem of orthogonal coupling error of micro-gyroscope system, a behavior-level model for eliminating orthogonal error is established on the basis of theoretical analysis. Under the guidance of this model, a novel orthogonal error eliminating circuit compatible with no feedback electrode is proposed, which can effectively eliminate orthogonal error and avoid signal coupling. Interference increase
Finally, a driving circuit based on frequency modulation principle is designed, which can eliminate the same frequency coupling between driving signal and displacement signal, and is compatible with gyroscope structure with low Q value. A detection circuit based on the principle of secondary demodulation is designed to design ASIC chip module of micro-gyroscope interface, including capacitor voltage converter filter phase shifter automatic increase. The chip area is 5.05 *3.7 mm2. The test results of the micro-gyroscope system consisting of the chip and the sensitive structure show that the measurement range is +800o/s, the zero-position stability is 30o/h, the nonlinearity is 0.1%, and the noise is 0.003/s/Hz 1/2.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2014
【分類號】：TN96;TP212
【參考文獻】
相關(guān)期刊論文 前6條
1 莫冰;劉曉為;譚曉昀;尹亮;丁學(xué)偉;湯佳郁;;雙電容接口式微機械陀螺的信號檢測方法[J];傳感技術(shù)學(xué)報;2006年05期
2 劉曉為;莫冰;王超;譚曉昀;許曉巍;齊向昆;;微機械陀螺ASIC接口電路設(shè)計[J];傳感技術(shù)學(xué)報;2006年05期
3 尹韜;楊海鋼;張
本文編號：2222648
本文鏈接：http://sikaile.net/kejilunwen/wltx/2222648.html
最近更新
教材專著
