【摘要】：旋轉(zhuǎn)對(duì)稱結(jié)構(gòu)微型殼體振動(dòng)陀螺具有精度高,帶寬寬,動(dòng)態(tài)范圍大,品質(zhì)因數(shù)高以及抗干擾等潛在優(yōu)異的性能,引起了國(guó)內(nèi)外學(xué)者廣泛的研究興趣。目前,國(guó)內(nèi)相關(guān)方面的研究還比較少,與國(guó)外差距比較大。微型殼體振動(dòng)陀螺制造的核心仍是諧振結(jié)構(gòu)加工工藝問(wèn)題,加工工藝的難易制約著微型殼體振動(dòng)陀螺的發(fā)展。本文主要圍繞著微型殼體振動(dòng)陀螺諧振結(jié)構(gòu)的加工工藝問(wèn)題,研究了不同材料的微型殼體振動(dòng)陀螺諧振結(jié)構(gòu)的加工工藝,旨在探索出一種加工相對(duì)簡(jiǎn)單、工藝一致性較好的微型殼體振動(dòng)陀螺加工工藝。本文主要從以下幾個(gè)方面開(kāi)展研究工作:1.介紹了微型殼體振動(dòng)陀螺的主要結(jié)構(gòu)形式和工作原理,并理論分析了基于靜電驅(qū)動(dòng)和電容檢測(cè)的微型殼體振動(dòng)陀螺的固有振型。2.分析了激光刻蝕技術(shù)的基本原理,研究了激光加工參數(shù)對(duì)單晶金剛石刻蝕質(zhì)量的影響�；诩す饪涛g工藝,實(shí)現(xiàn)了單晶金剛石的微型殼體振動(dòng)陀螺微杯形諧振結(jié)構(gòu)的加工并分析了激光刻蝕加工諧振結(jié)構(gòu)的技術(shù)特點(diǎn)。3.闡述了硅各向同性濕法腐蝕的基本原理,實(shí)現(xiàn)了硅半球面的加工。利用各向同性濕法腐蝕,實(shí)現(xiàn)了圓筒狀陀螺諧振結(jié)構(gòu)的加工并分析了硅各向同性濕法腐蝕加工諧振結(jié)構(gòu)的技術(shù)特點(diǎn)。4.介紹了微殼體振動(dòng)陀螺諧振結(jié)構(gòu)的玻璃吹制工藝的基本原理�；诖�,實(shí)現(xiàn)了微型殼體振動(dòng)陀螺圓盒狀諧振結(jié)構(gòu)和微圓柱殼體諧振結(jié)構(gòu)的加工并分析了玻璃吹制工藝加工諧振結(jié)構(gòu)的技術(shù)特點(diǎn)。
[Abstract]:The vibratory gyroscope with rotating symmetric structure has many potential advantages such as high precision, wide bandwidth, wide dynamic range, high quality factor and anti-interference, etc., which has attracted extensive research interest of scholars at home and abroad. At present, the domestic related research is still relatively small, and the gap between foreign countries is relatively large. The core of micro shell vibration gyroscope is still the machining technology of resonant structure. The difficulty of machining technology restricts the development of micro shell vibration gyroscope. In this paper, the machining technology of vibration gyroscope resonator structure with different materials is studied, which aims to find out a relatively simple machining method. Micro shell vibration gyroscope machining technology with good consistency. This article mainly carries on the research work from the following several aspects: 1. This paper introduces the main structure and working principle of the micro shell vibration gyroscope, and theoretically analyzes the inherent vibration mode of the micro shell vibration gyroscope based on electrostatic drive and capacitance detection. The basic principle of laser etching technology is analyzed and the influence of laser processing parameters on the etching quality of single crystal diamond is studied. Based on laser etching technology, the fabrication of micro shell vibration gyro micro cup resonant structure of single crystal diamond is realized and the technical characteristics of laser etching are analyzed. The basic principle of isotropic wet etching of silicon is described. The cylindrical gyroscope resonant structure is fabricated by isotropic wet etching and the technical characteristics of silicon isotropic wet etching are analyzed. The basic principle of glass blowing technology for vibration gyro resonant structure of microshell is introduced. Based on this, the fabrication of circular box resonant structure of micro shell vibration gyroscope and resonant structure of micro cylindrical shell is realized. The technical characteristics of glass blowing process for machining resonant structure are analyzed.
【學(xué)位授予單位】：國(guó)防科學(xué)技術(shù)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2014
【分類號(hào)】：TN96;TP212

【引證文獻(xiàn)】

相關(guān)碩士學(xué)位論文 前1條

1 盧坤;“酒杯狀”微殼體振動(dòng)陀螺結(jié)構(gòu)設(shè)計(jì)與加工工藝研究[D];國(guó)防科學(xué)技術(shù)大學(xué);2015年

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本文編號(hào)：2195070