基于橢圓偏振顯微鏡的納米級磁頭潤滑膜觀測方法
發(fā)布時間:2018-04-22 11:10
本文選題:光學(xué)測量 + 潤滑膜觀測; 參考:《應(yīng)用光學(xué)》2017年03期
【摘要】:針對磁頭飛行導(dǎo)致液體潤滑膜的轉(zhuǎn)移研究以及潤滑膜在磁頭上的動態(tài)變化特性觀測問題,基于改進的垂直物鏡的橢圓偏振顯微鏡,提出起偏器相移方法的磁頭表面潤滑膜厚度計算模型,實現(xiàn)了潤滑膜厚度的測量。實驗以非極性潤滑劑Z03覆蓋的磁頭為樣品對橢圓偏振顯微鏡進行標定,以極性潤滑劑Zdol4000作為樣品,對其在磁頭表面的去濕現(xiàn)象進行觀察。該方法測量精度可達0.37nm,分辨力約0.36μm,可為其他納米級薄膜觀測提供一定的技術(shù)參考。
[Abstract]:Aiming at the study of liquid lubrication film transfer caused by magnetic head flight and the observation of dynamic characteristics of lubricating film on magnetic head, the elliptical polarization microscope based on improved vertical objective lens is proposed. A calculation model of lubricating film thickness on magnetic head surface based on phase shift method of polarizer is presented, and the thickness measurement of lubricating film is realized. The elliptical polarization microscope was calibrated with the magnetic head covered by non-polar lubricant Z03 and the dehumidification phenomenon on the magnetic head surface was observed with polar lubricant Zdol4000 as the sample. The precision of the method is 0.37 nm and the resolution is about 0.36 渭 m, which can provide some technical reference for other nanoscale thin films.
【作者單位】: 南京信息工程大學(xué)信息與控制學(xué)院;南京信息工程大學(xué)大氣環(huán)境與裝備技術(shù)協(xié)同創(chuàng)新中心;
【基金】:江蘇省自然科學(xué)基金(BK20130989) 南京信息工程大學(xué)引進人才啟動基金(2013R106)
【分類號】:TH742;TP333.35
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本文編號:1786925
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