本文關(guān)鍵詞： MEMS 振動 傳感器 校準(zhǔn) ARM FPGA　出處：《杭州電子科技大學(xué)》2013年碩士論文　論文類型：學(xué)位論文

【摘要】：傳感器已成為獲取自然科學(xué)領(lǐng)域中信息的主要途徑和重要手段，廣泛應(yīng)用于社會各個領(lǐng)域，其性能將直接影響到振動測量系統(tǒng)的準(zhǔn)確性和可靠性，所以在使用前必須對其進(jìn)行校準(zhǔn)。本文提出了一種基于ARM和FPGA的振動校準(zhǔn)測控系統(tǒng)的設(shè)計(jì)方案，可實(shí)現(xiàn)MEMS(Micro-Electro-Mechamical System)電容式振動傳感器的便捷校準(zhǔn)。 首先介紹了MEMS電容式加速度傳感器的基本結(jié)構(gòu)，分別對平板式電容加速度傳感器的單邊變間距式結(jié)構(gòu)、變面積式結(jié)構(gòu)以及雙邊變間距式結(jié)構(gòu)，進(jìn)行靜電力驅(qū)動分析，可知雙邊變間距式結(jié)構(gòu)在靜電力驅(qū)動作用下周期往復(fù)運(yùn)動。假設(shè)雙邊變間距式結(jié)構(gòu)的MEMS電容式振動傳感器在靜電力作用下正弦振動，可推算出加載到其固定極板上的電壓信號(記為驅(qū)動電壓VD)。在此基礎(chǔ)上，提出了設(shè)計(jì)一種便捷校準(zhǔn)的MEMS電容式振動傳感器的構(gòu)想，在該傳感器的校準(zhǔn)引腳外加驅(qū)動電壓VD，可驅(qū)動傳感器正弦振動，采集傳感器振動狀態(tài)信息，可實(shí)現(xiàn)該傳感器的便捷校準(zhǔn)。 在研究振動校準(zhǔn)測控系統(tǒng)的基礎(chǔ)上，，設(shè)計(jì)了針對便捷校準(zhǔn)的MEMS電容式振動傳感器的振動校準(zhǔn)測控系統(tǒng)。在該系統(tǒng)中使用ARM和FPGA取代傳統(tǒng)振動校準(zhǔn)測控系統(tǒng)中的大量儀器，實(shí)現(xiàn)了系統(tǒng)的專用性、小型化、便攜性、實(shí)用性。其中，利用DDS技術(shù)，F(xiàn)PGA實(shí)現(xiàn)程控任意波形信號發(fā)生器，產(chǎn)生驅(qū)動電壓VD。ARM處理器取代PC機(jī)的主控作用，實(shí)現(xiàn)校準(zhǔn)參數(shù)輸入、信號發(fā)生器程控、數(shù)據(jù)采集控制、校準(zhǔn)結(jié)果顯示保存等功能。 針對系統(tǒng)設(shè)計(jì)方案，實(shí)現(xiàn)了具體的硬件設(shè)計(jì)和軟件設(shè)計(jì)。采用S3C2440和EP4C15F17C8的主處理器加協(xié)處理器的系統(tǒng)整體設(shè)計(jì)架構(gòu)，設(shè)計(jì)了基于24位高精度AD轉(zhuǎn)換器ADS1255的數(shù)據(jù)采集模塊，保證采集數(shù)據(jù)的精度。設(shè)計(jì)了基于ASC8511的電源管理模塊，可實(shí)現(xiàn)鋰電池充電及供電管理功能，為振動校準(zhǔn)測控系統(tǒng)供電，滿足系統(tǒng)的便攜性要求。軟件部分包括操作系統(tǒng)的移植和振動校準(zhǔn)系統(tǒng)軟件的設(shè)計(jì)。分別將Linux操作系統(tǒng)和MiniGUI移植到S3C2440處理器。振動校準(zhǔn)系統(tǒng)軟件可實(shí)現(xiàn)校準(zhǔn)項(xiàng)目選擇、校準(zhǔn)參數(shù)輸入、校準(zhǔn)結(jié)果顯示保存等功能，其中，校準(zhǔn)項(xiàng)目包括定頻校準(zhǔn)、幅值線性度校準(zhǔn)和頻率響應(yīng)校準(zhǔn)。 最后，對系統(tǒng)進(jìn)行軟硬件協(xié)同調(diào)試。對程控任意波形信號發(fā)生器和數(shù)據(jù)采集模塊進(jìn)行測試，用程控任意波形信號發(fā)生器產(chǎn)生的正弦信號模擬傳感器的正弦振動狀態(tài)，給出校準(zhǔn)功能的測試數(shù)據(jù)，初步驗(yàn)證了系統(tǒng)的可行性。
[Abstract]:Sensor has become the main way and important means to obtain information in the field of natural science. It is widely used in various fields of society. Its performance will directly affect the accuracy and reliability of vibration measurement system. Therefore, it must be calibrated before use. This paper proposes a design scheme of vibration calibration measurement and control system based on ARM and FPGA. The MEMS(Micro-Electro-Mechamical system capacitive vibration sensor can be calibrated conveniently. Firstly, the basic structure of MEMS capacitive accelerometer is introduced. The single side variable spacing structure, variable area structure and two side variable spacing structure of flat plate capacitive accelerometer are introduced respectively. Hydrostatic driving analysis. It is known that the two-sided variable-spacing structure moves periodically under hydrostatic driving. Suppose that the MEMS capacitive vibration sensor of the two-sided variable-spacing structure is sinusoidal under the static electric force. The voltage signal loaded on its fixed plate can be calculated. On the basis of this, the concept of designing a convenient calibrated MEMS capacitive vibration sensor is presented. By applying the driving voltage VD to the calibrated pin of the sensor, the sine vibration of the sensor can be driven, and the vibration state information of the sensor can be collected, which can realize the convenient calibration of the sensor. Based on the research of vibration calibration measurement and control system. A vibration calibration measurement and control system for convenient calibration of MEMS capacitive vibration sensor is designed, in which ARM and FPGA are used to replace a large number of instruments in the traditional vibration calibration measurement and control system. The special, miniaturization, portability and practicability of the system are realized. Among them, the program controlled arbitrary waveform signal generator is realized by using DDS technology. The main control function of PC is replaced by driving voltage VD.ARM processor. The functions of calibration parameter input, signal generator program control, data acquisition control, calibration result display and save are realized. For the system design, the hardware design and software design are realized, and the system architecture based on the main processor of S3C2440 and EP4C15F17C8 is designed. The data acquisition module based on 24-bit high-precision AD converter ADS1255 is designed to ensure the accuracy of data acquisition. The power management module based on ASC8511 is designed. It can realize the function of charging and power supply management of lithium battery and supply power for vibration calibration measurement and control system. The software part includes the transplantation of operating system and the design of vibration calibration system software. The Linux operating system and MiniGUI are transplanted to S3C2440 processor, respectively. Vibration calibration system software can realize the selection of calibration items. Calibration parameters input, calibration results display save and other functions, among which, calibration items include constant frequency calibration, amplitude linearity calibration and frequency response calibration. Finally, the software and hardware co-debugging of the system. The program-controlled arbitrary waveform signal generator and data acquisition module are tested. The sinusoidal vibration state of the sensor is simulated by the sinusoidal signal generated by the program-controlled arbitrary waveform signal generator. The test data of the calibration function are given and the feasibility of the system is preliminarily verified.
【學(xué)位授予單位】：杭州電子科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2013
【分類號】：TP368.1

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本文編號：1452657