【摘要】：碳納米管和石墨烯作為碳納米功能材料中的代表,在納米傳感器、場(chǎng)效應(yīng)晶體管、微機(jī)械、能源存儲(chǔ)、復(fù)合納米材料等領(lǐng)域展現(xiàn)出良好的應(yīng)用前景。將碳納米管、石墨烯有效地集成到微納器件上實(shí)現(xiàn)組裝是其得以應(yīng)用的重要條件。介電電泳法在組裝過(guò)程中通常不會(huì)對(duì)碳納米管和石墨烯造成損壞和污染,已經(jīng)成為目前組裝碳納米管和石墨烯最常用且最具前景的方法。組裝后碳納米管和石墨烯與金屬電極之間存在較高的接觸電阻已成為影響其應(yīng)用的重要因素,降低其接觸電阻已成為當(dāng)務(wù)之急。高溫退火法以及局部焦耳熱法(通電降阻法)操作簡(jiǎn)單,無(wú)需苛刻的外部條件,降阻效果顯著。文章首先采用介電電泳法對(duì)石墨烯進(jìn)行組裝,研究組裝過(guò)程參數(shù)包括交變電壓幅值、石墨烯懸浮液濃度和外加電場(chǎng)作用時(shí)間對(duì)組裝結(jié)果的影響。結(jié)果表明:組裝到電極間隙的石墨烯數(shù)量隨著上述組裝參數(shù)值的增大而增加,其中石墨烯懸浮液濃度的影響最為顯著,高效組裝石墨烯的最優(yōu)參數(shù)組合為:交變電壓幅值3V、懸浮液濃度4μg/m L、外加電場(chǎng)作用時(shí)間120s。其次,利用正交試驗(yàn)設(shè)計(jì)和方差分析法研究高溫退火法和局部焦耳熱法中各因素對(duì)降低碳納米管接觸電阻效果的影響。結(jié)果表明:影響石墨烯降阻實(shí)驗(yàn)效果的主要因素分別為退火溫度和通電功率,兩種方法降低碳納米管接觸電阻的最優(yōu)參數(shù)組合分別為:退火溫度300℃、保溫時(shí)間15min、升溫速率20℃/min和通電功率120μW、通電頻率1KHz、通電時(shí)間180s。最后,我們對(duì)比高溫退火法和局部焦耳熱法降低石墨烯接觸電阻的效果以及降阻穩(wěn)定性,得出高溫退火法的降阻效果較好,電阻的最高下降幅度為92.82%,而局部焦耳熱法的降阻穩(wěn)定性較好,電阻的最大回升幅度為4.80%。
[Abstract]:Carbon nanotubes (CNTs) and graphene (graphene), as the representative of carbon nanofunctional materials, have shown good application prospects in the fields of nano-sensors, field-effect transistors, micromachineries, energy storage and composite nanomaterials. The effective integration of carbon nanotubes and graphene into micro / nano devices is an important condition for their application. Dielectric electrophoresis is the most common and promising method to assemble carbon nanotubes (CNTs) and graphene (graphene). The existence of high contact resistance between carbon nanotubes and graphene and metal electrodes has become an important factor affecting the application of carbon nanotubes and graphene electrodes. It is urgent to reduce the contact resistance of carbon nanotubes and graphene electrodes. The high temperature annealing method and the local joule thermal method are simple to operate, and the resistance reduction effect is remarkable without harsh external conditions. In this paper, the graphene was assembled by dielectric electrophoresis. The parameters of the study group included the amplitude of alternating voltage, the concentration of graphene suspensions and the effect of applied electric field on the assembly results. The results show that the number of graphene assembled into the electrode gap increases with the increase of the assembly parameters, among which the concentration of graphene suspension is the most significant, and the optimal parameter combination of high efficiency assembly graphene is as follows: the alternating voltage amplitude is 3 V, The suspension concentration was 4 渭 g / m L, and the applied electric field action time was 120 s. Secondly, the effects of various factors in high temperature annealing and local Joule calorimetry on the reduction of contact resistance of carbon nanotubes were studied by orthogonal design and variance analysis. The results show that the main factors affecting the resistance reduction of graphene are annealing temperature and electric power respectively. The optimum parameters for reducing the contact resistance of carbon nanotubes are: annealing temperature 300 鈩，

本文編號(hào)：2410567