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新型無鉛壓電陶瓷驅(qū)動(dòng)器工藝與性能研究

發(fā)布時(shí)間:2018-11-28 12:23
【摘要】:壓電材料作為一類重要的、國際競爭極為激烈的高新技術(shù)材料,以壓電材料尤其是壓電陶瓷制成的微位移器、驅(qū)動(dòng)器和傳感器,廣泛用于航空航天等高新技術(shù)領(lǐng)域及民用生活中,是不可缺少的現(xiàn)代化關(guān)鍵材料和器件,F(xiàn)今廣泛投入使用的壓電陶瓷材料多是鉛基材料,在生產(chǎn)、利用和報(bào)廢處理過程中均會(huì)產(chǎn)生污染,給自然環(huán)境和人類健康帶來巨大傷害。研究開發(fā)無鉛基壓電陶瓷器件取代含鉛壓電陶瓷器件是一項(xiàng)迫切,具有重大社會(huì)和經(jīng)濟(jì)價(jià)值的課題,但無鉛壓電陶瓷較含鉛壓電陶瓷,壓電性能較弱,機(jī)械品質(zhì)因數(shù)低,本文通過制備0.8Na0.5Bi0.5TiO3-0.2K0.5Bi0.5 TiO3(以下簡稱NKBT)無鉛壓電陶瓷,研究其極化工藝以提升其壓電性能,制作NKBT基壓電器件,對(duì)無鉛壓電陶瓷應(yīng)用于驅(qū)動(dòng)器做出了探索與研究。另外開發(fā)了適用于無鉛器件的小型化驅(qū)動(dòng)電路。首先使用固態(tài)反應(yīng)法制備了NKBT陶瓷片,采用單因素方差與正交試驗(yàn)設(shè)計(jì)法,優(yōu)化NKBT無鉛壓電陶瓷的極化工藝參數(shù),結(jié)合不同條件下的極化工藝實(shí)驗(yàn),獲得了最佳極化工藝條件是6kv/mm,極化溫度為70℃,極化時(shí)間為50min,保壓時(shí)間21min,通過極化工藝參數(shù)的優(yōu)化,使鈦酸鉍鈉鉀無鉛壓電材料的壓電活性進(jìn)一步提升,d33達(dá)到108pC/N;趬弘娞沾莎B層驅(qū)動(dòng)器的驅(qū)動(dòng)特性,采用有限元法結(jié)合鈦酸鉍鈉鉀無鉛壓電材料的物理特性,對(duì)新型壓電陶瓷疊層驅(qū)動(dòng)器的工作性能進(jìn)行了模擬計(jì)算與仿真,重點(diǎn)研究驅(qū)動(dòng)電壓與微位移,輸出力與微位移之間的關(guān)系,獲得了其最大位移、輸出力及響應(yīng)頻率特性參數(shù)。結(jié)果表明鈦酸鉍鈉鉀無鉛壓電材料適用于制作結(jié)構(gòu)振動(dòng)驅(qū)動(dòng)元件的研發(fā);為擴(kuò)大該疊層驅(qū)動(dòng)器應(yīng)用范圍,為其設(shè)計(jì)制作了菱形位移放大機(jī)構(gòu),測(cè)試顯示外置放大機(jī)構(gòu)的疊層驅(qū)動(dòng)器驅(qū)動(dòng)位移達(dá)到了25μm,分辨率達(dá)到0.17μm,在高精密定位領(lǐng)域有巨大發(fā)展?jié)摿ΑJ褂糜邢拊ńh(huán)形超聲電機(jī)數(shù)學(xué)模型,利用動(dòng)力學(xué)分析優(yōu)化超聲電機(jī)關(guān)鍵部件參數(shù),研究定子內(nèi)外徑對(duì)超聲電機(jī)工作頻率的影響,為研制超聲電機(jī)樣機(jī)奠定理論基礎(chǔ)。通過建立驅(qū)動(dòng)電路系統(tǒng),主要是設(shè)計(jì)放大電路,實(shí)現(xiàn)對(duì)超聲電機(jī)工作頻率的控制。最后測(cè)試超聲電機(jī)樣機(jī)的轉(zhuǎn)速,在無預(yù)應(yīng)力下,轉(zhuǎn)速為60r/min。
[Abstract]:Piezoelectric materials as an important and highly competitive high-tech materials, piezoelectric materials, especially piezoelectric ceramics made of micro-displacement devices, actuators and sensors, Widely used in high-tech fields such as aerospace and civil life, it is an indispensable modern key material and device. Nowadays, the piezoelectric ceramic materials widely used are lead-based materials, which will pollute in the process of production, utilization and waste treatment, and bring great harm to the natural environment and human health. The research and development of lead-free piezoelectric ceramic devices to replace lead-based piezoelectric ceramic devices is an urgent task with great social and economic value. However, lead-free piezoelectric ceramics have weaker piezoelectric properties and lower mechanical quality factors than lead-free piezoelectric ceramics. In this paper, 0.8Na0.5Bi0.5TiO3-0.2K0.5Bi0.5 TiO3 (hereinafter referred to as NKBT) lead-free piezoelectric ceramics are prepared, the polarization process is studied to improve their piezoelectric properties, and NKBT based piezoelectric devices are fabricated. The application of lead-free piezoelectric ceramics to actuators is explored and studied. In addition, a miniaturized drive circuit suitable for lead-free devices is developed. Firstly, NKBT ceramics were prepared by solid state reaction method. The polarization process parameters of NKBT lead-free piezoelectric ceramics were optimized by single factor variance and orthogonal design, and the polarization process experiments were carried out under different conditions. The optimum process conditions were obtained as follows: polarization temperature 70 鈩,

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