【摘要】：二元光學(xué)元件不僅是制造微光機(jī)電系統(tǒng)的關(guān)鍵元器件,而且是制造小型光電子系統(tǒng)的關(guān)鍵元器件。它不僅具有尺寸小、性?xún)r(jià)比高等優(yōu)點(diǎn),并且能夠?qū)崿F(xiàn)普通光學(xué)元器件難以實(shí)現(xiàn)的陣列、轉(zhuǎn)換、成像和集成等新功能。隨著科學(xué)技術(shù)的迅猛發(fā)展,二元光學(xué)元件已顯示出越來(lái)越重要的應(yīng)用價(jià)值和廣闊的應(yīng)用前景,同時(shí)對(duì)二元光學(xué)元件的加工與應(yīng)用提出了越來(lái)越高的要求。透明陶瓷憑借其出眾的物理化學(xué)性能,具有和玻璃相比擬的優(yōu)異光學(xué)性能,成為材料領(lǐng)域研究的新寵,已顯現(xiàn)出良好的應(yīng)用前景和重要作用,其應(yīng)用領(lǐng)域也在不斷為人們所開(kāi)拓。本論文針對(duì)二元光學(xué)元件的眾多優(yōu)點(diǎn)之一——寬廣的材料可選性,展開(kāi)探索性研究,嘗試以透明陶瓷為基底材料來(lái)代替常見(jiàn)的基材,制作二元光學(xué)元件。目前常見(jiàn)的二元光學(xué)元件基材有硅片、玻璃等,它們有著各自的優(yōu)點(diǎn),但在日常使用中也暴露一定的不足。透明陶瓷擁有高強(qiáng)度、耐高溫、耐酸堿腐蝕等特性,在多波段、寬光譜內(nèi)擁有良好的透明性,即使在遠(yuǎn)紅外區(qū)仍有80%的直線(xiàn)透過(guò)率。用透明陶瓷作為元件基底材料,能夠使得光學(xué)元件在更為復(fù)雜、苛刻的環(huán)境中發(fā)揮作用,拓寬了二元光學(xué)元件的應(yīng)用范圍。鑒于透明陶瓷固有的特性,本文采用“加法”和“減法”兩種方案進(jìn)行研究�！凹臃ā狈桨钢�,鑒于透明陶瓷耐酸堿腐蝕的特性,結(jié)合光刻中的“加法”工藝,首先通過(guò)磁控濺射鍍膜技術(shù)在透明陶瓷表面濺射一層金屬膜。金屬膜與透明陶瓷結(jié)合牢固。借助數(shù)字微光刻技術(shù)和接觸式光刻技術(shù)實(shí)現(xiàn)元件結(jié)構(gòu)的轉(zhuǎn)印,使得元件留在金屬膜層。這樣既使得二元光學(xué)元件能夠發(fā)揮作用,又讓透明陶瓷的優(yōu)異特性得以保留�！皽p法”方案用于進(jìn)一步探索。借助感應(yīng)耦合等離子體刻蝕系統(tǒng),以金屬膜層為硬掩模,進(jìn)一步刻蝕透明陶瓷。另外,采用飛秒激光直接在透明陶瓷本體表面燒蝕二元光學(xué)元件。本文采用多種二元光學(xué)元件進(jìn)行實(shí)驗(yàn),包括一維光柵、正交光柵、達(dá)曼光柵、方形波帶片和菲涅耳波帶片等基本元件,同時(shí)也有自主設(shè)計(jì)的、由電腦編程實(shí)現(xiàn)的二元全息圖和渦旋光束元件。從多方面驗(yàn)證了以透明陶瓷制作二元光學(xué)元件的可行性。借助光學(xué)輪廓儀和顯微鏡對(duì)實(shí)驗(yàn)結(jié)果進(jìn)行分析,并重現(xiàn)了樣品元件的衍射圖樣。
[Abstract]:Binary optical elements are not only the key components in the fabrication of microoptic electromechanical systems, but also the key components in the manufacture of small optoelectronic systems. It not only has the advantages of small size and high performance-to-price ratio, but also can realize the new functions of array, conversion, imaging and integration, which are difficult for ordinary optical components to realize. With the rapid development of science and technology, binary optical elements have shown more and more important application value and broad application prospects. At the same time, the processing and application of binary optical elements have put forward more and more high requirements. Due to its outstanding physical and chemical properties and excellent optical properties compared with glass, transparent ceramics have become a new favorite in the field of material research, and have shown good application prospects and important role. Its application field is also being continuously developed by people. In this paper, aiming at one of the advantages of binary optical element, which is the wide material selection, we have carried out an exploratory study, and we try to use transparent ceramics as substrate instead of common substrate to make binary optical element. At present, the common binary optical element substrates are silicon wafer, glass and so on. They have their own advantages, but they also expose some shortcomings in their daily use. Transparent ceramics have high strength, high temperature resistance, acid and alkali corrosion resistance and good transparency in multi-band and wide spectrum. Even in the far infrared region, there are still 80% linear transmittance. Using transparent ceramics as substrate material can make optical elements play a role in more complex and harsh environment, and broaden the application of binary optical elements. In view of the inherent characteristics of transparent ceramics, two schemes of "addition" and "subtraction" are adopted in this paper. In the "addition" scheme, in view of the acid-alkali corrosion resistance of transparent ceramics, combined with the "addition" process in photolithography, a metal film was first deposited on the surface of transparent ceramics by magnetron sputtering. The metal film is firmly bonded with transparent ceramics. By means of digital lithography and contact lithography, the elements are transferred to the metal film. In this way, binary optical elements can function and the excellent properties of transparent ceramics can be preserved. The subtraction scheme is used for further exploration. By means of inductively coupled plasma etching system, transparent ceramics were further etched with metal film as hard mask. In addition, femtosecond laser is used to ablation binary optical elements directly on the surface of transparent ceramics. In this paper, we use a variety of binary optical elements to carry out experiments, including one-dimensional grating, orthogonal grating, Darman grating, square band plate and Fresnel band plate. Binary hologram and vortex beam element realized by computer programming. The feasibility of using transparent ceramics to fabricate binary optical elements has been verified from many aspects. The experimental results were analyzed by optical profilometer and microscope, and the diffraction patterns of the sample elements were reconstructed.
【學(xué)位授予單位】：南昌航空大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：TQ174.758.23

【參考文獻(xiàn)】

相關(guān)期刊論文 前1條

1 金國(guó)藩,譚峭峰;二元光學(xué)[J];光電子技術(shù)與信息;2001年05期

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本文編號(hào)：2324576