發(fā)布時(shí)間：2018-06-28 07:26

  本文選題：壓電陶瓷 + 微位移放大機(jī)構(gòu)　； 參考：《華僑大學(xué)》2016年碩士論文

【摘要】：壓電陶瓷是一種能將機(jī)械能和電能相互轉(zhuǎn)換的信息功能陶瓷材料,具有位移分辨率高、剛度大、響應(yīng)快、無(wú)噪聲等優(yōu)點(diǎn),在微機(jī)械、微電子、精密加工、生物醫(yī)學(xué)、機(jī)器人和航空航天等領(lǐng)域得到廣泛應(yīng)用。然而,壓電陶瓷本身固有的輸出位移小、遲滯、蠕變、非線性等特性,嚴(yán)重影響到精密定位系統(tǒng)的性能。本論文在對(duì)壓電陶瓷遲滯、蠕變、非線性等特性進(jìn)行研究的基礎(chǔ)上,通過(guò)設(shè)計(jì)柔性鉸鏈微位移放大機(jī)構(gòu)將壓電陶瓷的輸出位移進(jìn)行放大,同時(shí)利用神經(jīng)網(wǎng)絡(luò)建立壓電陶瓷蠕變模型,對(duì)蠕變誤差進(jìn)行預(yù)測(cè)和修正。具體研究?jī)?nèi)容如下:首先,對(duì)壓電陶瓷固有特性進(jìn)行研究�；跇O化理論分析了遲滯特性的產(chǎn)生機(jī)理,利用晶格間摩擦分析了蠕變特性,同時(shí)對(duì)非線性和位移重復(fù)性等特性展開(kāi)分析,并結(jié)合實(shí)驗(yàn)對(duì)壓電陶瓷特性進(jìn)行驗(yàn)證。其次,設(shè)計(jì)了一個(gè)基于二級(jí)杠桿的柔性鉸鏈微位移放大機(jī)構(gòu),經(jīng)過(guò)放大后的壓電陶瓷輸出最大可達(dá)0.3mm。通過(guò)理論計(jì)算、ANSYS仿真和實(shí)驗(yàn)驗(yàn)證,對(duì)該放大機(jī)構(gòu)進(jìn)行了研究和分析,該機(jī)構(gòu)分辨力約為10nm,并通過(guò)實(shí)驗(yàn)對(duì)放大前后的蠕變量進(jìn)行對(duì)比研究。最后,利用神經(jīng)網(wǎng)絡(luò)建立壓電陶瓷蠕變特性模型。通過(guò)建立蠕變模型描述蠕變量與時(shí)間、電壓之間的關(guān)系;利用遺傳算法對(duì)神經(jīng)網(wǎng)絡(luò)進(jìn)行優(yōu)化,提高神經(jīng)網(wǎng)絡(luò)的預(yù)測(cè)精度;采用反向電壓法修正壓電陶瓷蠕變誤差。通過(guò)實(shí)驗(yàn)驗(yàn)證蠕變模型,預(yù)測(cè)蠕變量,并驗(yàn)證反向電壓法對(duì)減小蠕變誤差的有效性。通過(guò)理論研究和實(shí)驗(yàn)驗(yàn)證,本文的研究工作對(duì)于壓電陶瓷的高精度定位有著重要的理論意義和實(shí)際應(yīng)用價(jià)值。
[Abstract]:Piezoelectric ceramic is a kind of information function ceramic material which can convert mechanical energy and electric energy. It has the advantages of high displacement resolution, high stiffness, fast response, no noise, etc., in micromachined, microelectronics, precision machining, biomedicine, etc. Robotics, aerospace and other fields have been widely used. However, the inherent characteristics of piezoelectric ceramics, such as small output displacement, hysteresis, creep, nonlinear and so on, seriously affect the performance of precision positioning system. Based on the study of hysteresis, creep and nonlinearity of piezoelectric ceramics, the output displacement of piezoelectric ceramics is amplified by designing a flexible hinge micro-displacement amplification mechanism. At the same time, the creep model of piezoelectric ceramics is established by neural network, and the creep error is predicted and corrected. The specific research contents are as follows: firstly, the inherent characteristics of piezoelectric ceramics are studied. Based on polarization theory, the mechanism of hysteresis is analyzed, the creep property is analyzed by friction between lattice, the nonlinear and displacement repeatability are analyzed, and the characteristics of piezoelectric ceramics are verified by experiments. Secondly, a flexible hinge micro-displacement amplification mechanism based on two-stage lever is designed. The maximum output of piezoelectric ceramics after amplification is 0.3 mm. Through theoretical calculation and experimental verification, this amplification mechanism is studied and analyzed. The resolution of the mechanism is about 10 nm, and the creep before and after amplification is compared by experiments. Finally, the creep characteristic model of piezoelectric ceramics is established by neural network. The creep model is established to describe the relationship between creep amount, time and voltage; genetic algorithm is used to optimize the neural network to improve the prediction accuracy of neural network; and the reverse voltage method is used to correct the creep error of piezoelectric ceramics. The creep model is verified by experiments, the creep amount is predicted, and the effectiveness of the reverse voltage method to reduce the creep error is verified. Through theoretical research and experimental verification, the research work in this paper has important theoretical significance and practical application value for high precision positioning of piezoelectric ceramics.
【學(xué)位授予單位】：華僑大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類(lèi)號(hào)】：TQ174.1;TP273
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本文編號(hào)：2077212