本文選題：柔性顯示 + 化學(xué)機(jī)械拋光��； 參考：《河南工業(yè)大學(xué)》2015年碩士論文

【摘要】：柔性顯示技術(shù)正在逐步改善著人們的生活和通信,并顯著促進(jìn)信息可視化。柔性顯示技術(shù)建立在柔性襯底之上,柔性襯底的選擇對(duì)柔性器件許多特性的好壞有著直接的影響。柔性襯底材料目前主要有金屬箔片、聚合物襯底、超薄玻璃以及石墨烯。其中不銹鋼以其良好的耐腐蝕性和共有的金屬特性,已經(jīng)得到了廣泛關(guān)注,也開(kāi)始應(yīng)用于柔性顯示,不過(guò)其缺點(diǎn)就是表面粗糙度(Ra)較高,采用目前最受認(rèn)可的化學(xué)機(jī)械拋光技術(shù),以此達(dá)到全局平坦化無(wú)損傷的目的。由于傳統(tǒng)的化學(xué)機(jī)械拋光技術(shù)使用游離磨料,存在材料去除率低、磨料不均勻、耗材成本高等很多缺點(diǎn),人們?cè)谥鸩礁倪M(jìn)傳統(tǒng)化學(xué)機(jī)械拋光技術(shù)的同時(shí),也在研究與探索新的平坦化技術(shù)。固結(jié)磨料化學(xué)機(jī)械拋光技術(shù)是在傳統(tǒng)化學(xué)機(jī)械拋光技術(shù)基礎(chǔ)之上發(fā)展起來(lái)的一種新型平坦化技術(shù),由于具有很多優(yōu)點(diǎn),有望在不久的將來(lái)取代傳統(tǒng)化學(xué)機(jī)械拋光技術(shù)。經(jīng)過(guò)查閱有關(guān)文獻(xiàn)資料,還沒(méi)有關(guān)于304不銹鋼片固結(jié)磨料化學(xué)機(jī)械拋光輥方面的文獻(xiàn)資料報(bào)告,而拋光輥是CMP過(guò)程中的重要部件,它的好壞將直接影響CMP的成本。因此,本文提出了超薄304不銹鋼片固結(jié)磨料化學(xué)機(jī)械拋光輥研究的課題,為超薄不銹鋼片固結(jié)磨料化學(xué)機(jī)械拋光理論與技術(shù)研究提供了參考依據(jù)。本文的主要研究?jī)?nèi)容如下:1.本文以超凈實(shí)驗(yàn)室為環(huán)境基礎(chǔ),通過(guò)對(duì)拋光墊的研究,把傳統(tǒng)的拋光輥和拋光墊結(jié)合在了一起,提出了新式固結(jié)磨料化學(xué)機(jī)械拋光輥的研究。2.根據(jù)固結(jié)磨料化學(xué)機(jī)械拋光輥外層成分分析,通過(guò)實(shí)驗(yàn),研究了固結(jié)磨料拋光墊UV光固化制備工藝與技術(shù),得出了UV光固化固結(jié)磨料拋光墊的光固化工藝參數(shù)。實(shí)驗(yàn)結(jié)果表明:當(dāng)光照距離為25mm,光照時(shí)間為90s時(shí),固化效果最佳。3.由于本實(shí)驗(yàn)中拋光輥的制備需要光固化,而實(shí)驗(yàn)室原有的手提式UV光固化機(jī)無(wú)法滿(mǎn)足要求,所以作者對(duì)光固化機(jī)進(jìn)行了新的設(shè)計(jì)。該光固化機(jī)具有距離調(diào)節(jié)裝置、保護(hù)裝置,散熱裝置,旋轉(zhuǎn)裝置等,使得光固化機(jī)更加智能化,安全性得到了提高,同時(shí)相比市場(chǎng)上的大型光固化機(jī),節(jié)約了成本,滿(mǎn)足了實(shí)驗(yàn)要求。研究結(jié)果表明,固結(jié)磨料化學(xué)機(jī)械拋光的材料去除率明顯高于游離磨料化學(xué)機(jī)械拋光,磨料可以重復(fù)使用,對(duì)環(huán)境污染小,是非常有前景的平坦化技術(shù),固結(jié)磨料化學(xué)機(jī)械拋光輥的使用有效提高了材料去除率和表面質(zhì)量。
[Abstract]:Flexible display technology is gradually improving people's life and communication, and significantly promoting information visualization. Flexible display technology is based on flexible substrate, and the choice of flexible substrate has a direct impact on many characteristics of flexible devices. Flexible substrate materials are mainly metal foil, polymer substrate, ultrathin glass and graphene. Stainless steel has been widely concerned for its good corrosion resistance and common metal properties, and has been applied to flexible display. However, its disadvantage is that the surface roughness is relatively high. The most recognized chemical mechanical polishing technology is adopted to achieve the goal of global planarization without damage. Because the traditional chemical mechanical polishing technology uses free abrasive, there are many shortcomings, such as low material removal rate, uneven abrasive, high cost of consumables and so on, so people are gradually improving the traditional chemical mechanical polishing technology at the same time. New flatting techniques are also being studied and explored. Consolidation abrasive chemical mechanical polishing (CMA) is a new planarization technology developed on the basis of traditional CMA technology. Due to its many advantages, it is expected to replace the traditional CMA technology in the near future. There is no literature report on the chemical mechanical polishing roll of 304 stainless steel sheet consolidation abrasive, which is an important part in the CMP process, and its quality will directly affect the cost of CMP. Therefore, this paper puts forward the research topic of the chemical mechanical polishing roller for the ultra-thin 304 stainless steel sheet consolidation abrasive, which provides a reference for the theoretical and technical research of the ultra-thin stainless steel sheet consolidation abrasive chemical mechanical polishing. The main contents of this paper are as follows: 1. Based on the environment of super clean laboratory, the traditional polishing roller and polishing pad are combined by the research of polishing pad, and a new type of chemical and mechanical polishing roller for consolidation abrasive is put forward in this paper. According to the composition analysis of the chemical mechanical polishing roller for the consolidation abrasive, the UV curing process and technology of the UV curing abrasive polishing pad were studied through experiments, and the UV curing process parameters of the UV light solidified abrasive polishing pad were obtained. The results showed that when the illumination distance was 25 mm and the illumination time was 90 s, the curing effect was the best. 3. In this experiment, the preparation of polishing roller needs light curing, but the original portable UV curing machine can not meet the requirements, so the author has carried out a new design for the light curing machine. The light curing machine is equipped with a range adjusting device, a protective device, a heat dissipation device, a rotating device, etc., which makes the light curing machine more intelligent and more secure. At the same time, compared with the large-scale light curing machine on the market, it saves the cost. The experimental requirements are satisfied. The results show that the material removal rate of chemical-mechanical polishing of consolidated abrasive is obviously higher than that of free abrasive, the abrasive can be reused, and the pollution to the environment is small, so it is a very promising flatting technology. The use of chemical-mechanical polishing roller for consolidation abrasive can effectively improve the material removal rate and surface quality.
【學(xué)位授予單位】：河南工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：TQ050.6

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本文編號(hào)：1899166