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微納混合結(jié)構(gòu)黑硅的制備及其關(guān)鍵工藝技術(shù)討論

發(fā)布時間:2018-04-08 09:15

  本文選題:金字塔結(jié)構(gòu) 切入點(diǎn):微納混合結(jié)構(gòu) 出處:《發(fā)光學(xué)報》2017年11期


【摘要】:黑硅是一種能大幅提高器件光電轉(zhuǎn)換效率的新型電子材料,微納混合結(jié)構(gòu)黑硅是一種比普通黑硅材料更高效的新型黑硅材料,如何制備出大面積、形貌特征好、表面潔凈度高的黑硅材料是制備高效的黑硅太陽能電池的前提。首先,利用濕法腐蝕方法,通過設(shè)計合適的反應(yīng)固體裝置和良好的工藝控制手段,在金字塔硅表面制備了大面積的微納混合結(jié)構(gòu)黑硅;然后,對其制備的關(guān)鍵工藝技術(shù)進(jìn)行了研究討論。實(shí)驗(yàn)結(jié)果表明,該方法制備的微納混合結(jié)構(gòu)黑硅具有形貌特征好、表面潔凈度高和低表面反射率等特征。有效去除表面銀沉積物后,該黑硅在300~1 100 nm范圍內(nèi)的加權(quán)平均反射率低至4.06%。該制備工藝方法適用于大面積高效微納混合結(jié)構(gòu)黑硅的規(guī)模制備,在高效黑硅太陽能電池領(lǐng)域具有重要的應(yīng)用價值。
[Abstract]:Black silicon is a new type of electronic material which can greatly improve the photoelectric conversion efficiency of devices. The micro / nano hybrid structure black silicon is a new type of black silicon material which is more efficient than ordinary black silicon materials.Black silicon with high surface cleanness is the prerequisite for the preparation of high efficiency black silicon solar cells.Firstly, a large area of micro-nano mixed structure black silicon was prepared on the surface of pyramidal silicon by using wet etching method, through the design of appropriate reaction solid device and good process control method, and then the micro-nano mixed structure black silicon was prepared on the surface of pyramidal silicon.The key technology of its preparation was studied and discussed.The experimental results show that the micro-nano mixed structure black silicon prepared by this method has good morphology, high surface cleanliness and low surface reflectivity.After removing silver deposits from the surface effectively, the weighted average reflectance of the black silicon in the range of 300 ~ 1 100 nm is as low as 4.06.The method is suitable for the large-scale preparation of large-area high-efficiency micro-nano mixed structure black silicon, and has important application value in the field of high-efficiency black silicon solar cells.
【作者單位】: 玉林師范學(xué)院物理科學(xué)與工程技術(shù)學(xué)院復(fù)雜系統(tǒng)優(yōu)化與大數(shù)據(jù)處理廣西高校重點(diǎn)實(shí)驗(yàn)室;
【基金】:玉林師范學(xué)院校級科研項(xiàng)目(2015YJYB05)資助~~
【分類號】:TQ127.2

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