淺議國(guó)內(nèi)外超凈高純氫氟酸工藝技術(shù)差異
發(fā)布時(shí)間:2018-03-29 21:10
本文選題:集成電路 切入點(diǎn):超凈高純氫氟酸 出處:《無(wú)機(jī)鹽工業(yè)》2017年10期
【摘要】:集成電路是資本密集、技術(shù)密集型行業(yè),同時(shí)又長(zhǎng)期遵循著著名的"摩爾定律",對(duì)企業(yè)在技術(shù)實(shí)力和研發(fā)投入上有著嚴(yán)苛的要求,相應(yīng)對(duì)原料蝕刻劑超凈高純氫氟酸產(chǎn)品質(zhì)量也有苛刻要求。從市場(chǎng)需求方面引出國(guó)內(nèi)企業(yè)與國(guó)外企業(yè)的超凈高純氫氟酸質(zhì)量差異,又詳細(xì)對(duì)比分析了國(guó)內(nèi)企業(yè)和國(guó)外企業(yè)執(zhí)行標(biāo)準(zhǔn)的差異和原因以及工藝技術(shù)制備的差異,末尾結(jié)合集成電路的市場(chǎng)狀況說(shuō)明了中國(guó)超凈高純氫氟酸制備的發(fā)展趨勢(shì),以此來(lái)促進(jìn)國(guó)內(nèi)半導(dǎo)體產(chǎn)業(yè)的發(fā)展。
[Abstract]:The integrated circuit is capital intensive, technology intensive industries, and long-term follow the famous "Moore's law", the enterprise has stringent requirements in technical strength and the research on the corresponding raw materials for ultra pure hydrofluoric acid etching agent product quality is also demanding. The concept of ultra pure hydrofluoric acid quality difference between domestic enterprises and foreign enterprises from the market demand, but also a detailed comparative analysis of the difference between domestic enterprises and foreign enterprises and different standards and preparation technology, combined with the market situation at the end of the integrated circuit shows the development trend of China ultra pure hydrofluoric acid preparation, in order to promote the development of the domestic semiconductor industry.
【作者單位】: 多氟多化工股份有限公司;
【分類(lèi)號(hào)】:TQ124.3
【相似文獻(xiàn)】
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1 ;不銹鋼表面處理硝氟酸的回收法[J];稀有金屬合金加工;1979年06期
2 陳紹衣,常樂(lè)文,趙秦生,,李晉堯,錢(qián)崇梁,郭佐,高燦華;活化熱處理對(duì)鉭氟酸鉀晶體組織結(jié)構(gòu)與晶粒尺寸的影響[J];中國(guó)有色金屬學(xué)報(bào);1994年03期
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