發(fā)布時(shí)間：2018-03-04 21:21

  本文選題：光誘導(dǎo)介電泳　切入點(diǎn)：光誘導(dǎo)電化學(xué)反應(yīng)　出處：《沈陽理工大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：微納米技術(shù)是未來科技發(fā)展的關(guān)鍵組成部分,使加工產(chǎn)物向小型化和智能化方向發(fā)展。傳統(tǒng)微納米加工技術(shù)所需要的加工設(shè)備價(jià)格昂貴,加工條件要求較高,極大制約了微納米加工技術(shù)的大范圍應(yīng)用。光誘導(dǎo)微納加工技術(shù),基于介電泳原理,可以實(shí)現(xiàn)對微納米顆粒,如二氧化硅顆粒,碳納米管、生物細(xì)胞的移動和分離,也可完成金屬離子的電化學(xué)沉積,實(shí)現(xiàn)微納米金屬的加工制造。微納米柔性器件可以應(yīng)用于很多生物測試中,目前的加工方法主要局限于打印和光刻方法,加工成本和最小加工精度受到很大限制。本論文以光誘導(dǎo)微納加工為研究對象,對金屬微電極的加工參數(shù)進(jìn)行探究,并進(jìn)行理論分析,對優(yōu)化后參數(shù)產(chǎn)生的金屬微電極轉(zhuǎn)印到柔性基底,實(shí)現(xiàn)了基于光誘導(dǎo)微納加工的柔性器件的制造。論文的主要研究內(nèi)容包括:(1)基于光誘導(dǎo)介電泳匯聚和動態(tài)移動二氧化硅顆粒和PEGDA模塊。基于光誘導(dǎo)在空間中對微納米顆粒的介電泳作用和實(shí)驗(yàn)與仿真得到的操作參數(shù),在光誘導(dǎo)介電泳平臺上通過介電泳力移動并操作PEGDA模塊,實(shí)現(xiàn)模塊的拼接、排列和旋轉(zhuǎn)等操作。(2)研究光誘導(dǎo)電化學(xué)反應(yīng)原理。對光誘導(dǎo)電化學(xué)反應(yīng)機(jī)理通過數(shù)學(xué)公式分析證明,并使用有限元分析軟件對光誘導(dǎo)電化學(xué)在空間中進(jìn)行仿真分析,得到相應(yīng)的反應(yīng)機(jī)理及參數(shù)要求。(3)對基于光誘導(dǎo)電化學(xué)沉積的金屬微電極的加工參數(shù)進(jìn)行分析。通過對影響光誘導(dǎo)電化學(xué)沉積金屬微電極的加工參數(shù)(輸入交流電信號頻率、幅值,金屬鹽溶液濃度和氫化非晶硅厚度)研究,使加工出的金屬微電極的形狀可控,并且對表面粗糙度和沉積高度進(jìn)行表征,得到相應(yīng)參數(shù)可加工出符合要求的金屬微電極。(4)采用轉(zhuǎn)印方法將光誘導(dǎo)電化學(xué)沉積的金屬微電極轉(zhuǎn)移到柔性基底上。研究可行方案將光誘導(dǎo)電化學(xué)沉積的金屬微電極轉(zhuǎn)印到柔性材料上,并且保證轉(zhuǎn)印后的微金屬電極形狀完整,導(dǎo)電性能良好。(5)優(yōu)化轉(zhuǎn)印方法研究不同轉(zhuǎn)印參數(shù)對轉(zhuǎn)移影響。對不同轉(zhuǎn)印方式和轉(zhuǎn)印基底參數(shù)實(shí)驗(yàn)分析,得到理論轉(zhuǎn)印成功概率,并通過實(shí)驗(yàn)結(jié)果優(yōu)化轉(zhuǎn)印方法,得到一種高效的,完整的轉(zhuǎn)印微電極方式。通過使用光誘導(dǎo)電化學(xué)沉積可以在常溫、常壓下,快速沉積出圖形化的金屬微電極,相較于其他微納加工方法具有很大優(yōu)勢,控制外部參數(shù)實(shí)現(xiàn)了控制沉積電極的形狀、高度和精細(xì)程度,將微金屬電極轉(zhuǎn)印到柔性材料上,拓展了光誘導(dǎo)電化學(xué)沉積電極的應(yīng)用范圍,為此方法下實(shí)現(xiàn)柔性傳感器器件打下良好的基礎(chǔ)。
[Abstract]:Micronanotechnology is a key component of the development of science and technology in the future, which makes the processing products develop towards miniaturization and intelligentization. The processing equipment required by the traditional micro-nano processing technology is expensive and the processing conditions are high. Light induced micro-nano processing technology, based on the principle of dielectric electrophoresis, can realize the movement and separation of microparticles, such as silica particles, carbon nanotubes, biological cells, and so on. The electrochemical deposition of metal ions can also be accomplished, and the fabrication of micro and nano metals can be realized. Micro and nano flexible devices can be used in many biological tests, and the current processing methods are mainly confined to printing and lithography. The processing cost and minimum machining precision are greatly limited. In this paper, the processing parameters of metal microelectrode are investigated and analyzed theoretically. The metal microelectrode produced by the optimized parameters is transferred to the flexible substrate. The fabrication of flexible devices based on photoinduced micro / nano machining is realized. The main research contents in this paper include: 1) on the basis of photoluminescence aggregation and dynamic movement of silica particles and PEGDA modules. The dielectric and electrophoretic effects of nanoparticles and the operating parameters obtained from experiments and simulations, The principle of photoinduced electrochemical reaction was studied on the platform of photoinduced electrophoretic by moving and manipulating PEGDA module by means of medium electrophoretic force. The mechanism of photoinduced electrochemical reaction was proved by mathematical formula analysis, such as splicing, arrangement and rotation of the module, and the mechanism of photoinduced electrochemical reaction was proved by mathematical formula analysis. The finite element analysis software is used to simulate the photoinduced electrochemistry in space. The processing parameters of metal microelectrode based on photoinduced electrochemical deposition were analyzed by obtaining the corresponding reaction mechanism and parameter requirements. The study of amplitude, concentration of metal salt solution and thickness of hydrogenated amorphous silicon makes the shape of the fabricated metal microelectrode controllable, and the surface roughness and deposition height are characterized. The corresponding parameters can be obtained to process the metal microelectrode which meets the requirements.) the metal microelectrode deposited by photoinduced electrochemical deposition is transferred to the flexible substrate by transfer printing method. The feasible scheme is to study the metal microelectrode deposited by photoinduced electrochemical deposition. The electrodes are transferred to the flexible material, And the shape of the micrometal electrode after the transfer is complete and the electrical conductivity is good. 5) optimize the transfer method to study the effect of different transfer parameters on the transfer. Through the experimental analysis of different transfer modes and transfer substrate parameters, the successful probability of theoretical transfer printing is obtained. By optimizing the method of transfer printing, an efficient and complete transfer microelectrode method is obtained. By using photoinduced electrochemical deposition, a graphical metal microelectrode can be rapidly deposited at room temperature and atmospheric pressure. Compared with other micro-nano machining methods, it has a great advantage. The shape, height and fineness of the deposited electrode are controlled by controlling the external parameters, and the micro-metal electrode is transferred to the flexible material. The application range of photoinduced electrochemical deposition electrode is expanded, and a good foundation is laid for the realization of flexible sensor device by this method.
【學(xué)位授予單位】：沈陽理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TQ150

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