【摘要】：本課題由國家自然科學(xué)基金項目“小功率微波微等離子體的研究”(批準號：61072007)資助。由于微等離子體的密度高、穩(wěn)定性好、氣體和能量耗費低且便于開發(fā)便攜且廉價的微等離子體裝置,因此微等離子體具有廣泛的應(yīng)用前景,微等離子體源也成為近年來的研究熱點。而目前,基于微波諧振器的微波微等離子體線性陣列源存在體積較大和激勵的微等離子體分布不均勻等問題。本文根據(jù)微帶線諧振器理論和模式耦合理論,采用HFSS仿真軟件,對一種工作在2.45GHz、放電縫隙為0.1mm的基于微帶諧振器的微波微等離子體雙線性陣列源進行了研究,分析了相關(guān)參數(shù)對微波微等離子體雙線性陣列源特性的影響。仿真研究表明,饋電點位置、陣列諧振器單元之間的間距和耦合方式、接地板尺寸等對微波微等離子體雙線性陣列源的S參數(shù)、Q值和放電縫隙處的電磁場分布等有很大的影響。本文還研究了一種工作在2.45GHz、放電縫隙為0.1mmm的基于微帶諧振器的微波微等離子體圓形陣列源,在單饋空間耦合、單饋耦合條耦合、雙饋空間耦合和雙饋耦合條耦合等四種不同結(jié)構(gòu)的情況下,對微波微等離子體圓形陣列源的S參數(shù)、Q值和放電縫隙處的電磁場分布進行了研究。本文工作對較大面積和特定形狀的微波微等離子體源的研究提供了一定的參考。
文內(nèi)圖片：
圖片說明：圖１－６微波誘導(dǎo)微等離子體放電結(jié)構(gòu)逡逑
[Abstract]:The subject is funded by the Project "Study on the Microplasma of Small Power Microwave" of the National Natural Science Foundation of China (Approval No.:61072007). Because the density of the microplasma is high, the stability is good, the gas and the energy are low and the portable and cheap micro-plasma device is convenient to be developed, the micro-plasma has a wide application prospect, and the micro-plasma source is also a hot spot in recent years. At present, the microwave micro-plasma linear array source based on the microwave resonator has the problems of large volume and non-uniform distribution of the excited micro-plasma. In this paper, based on the theory of microstrip line resonator and the theory of mode coupling, the microwave micro-plasma bilinear array source based on the microstrip resonator with the discharge gap of 2.45GHz and the discharge gap of 0.1mm is studied by HFSS simulation software. The influence of the related parameters on the source characteristics of the microwave micro-plasma bilinear array is analyzed. The simulation results show that the location of the feed point, the spacing between the array resonator units and the coupling mode, the size of the ground plate and the like have a great influence on the S parameters, the Q value and the electromagnetic field distribution at the discharge gap of the microwave micro-plasma bilinear array source. In this paper, a microwave micro-plasma circular array source based on a microstrip resonator with a gap of 2.45GHz and a discharge gap of 0.1mm is also studied. In the case of single-feed-space coupling, single-feed-coupled-strip coupling, double-fed space coupling and double-fed-coupled-strip coupling, The S parameter, Q value and the distribution of the electromagnetic field at the discharge gap of the microwave micro-plasma circular array source are studied. The work of this paper provides some reference for the study of microwave micro-plasma source with a large area and a certain shape.
【學(xué)位授予單位】：華東師范大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN629.1

【引證文獻】

相關(guān)碩士學(xué)位論文 前2條

1 邱詩浩;基于微帶諧振器的微波微等離子體圓形陣列源的研究[D];華東師范大學(xué);2018年

2 郭義;基于超材料的無線激勵微波微等離子體陣列源的研究[D];華東師范大學(xué);2017年

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本文編號：2512576