【摘要】：隨著現(xiàn)代加工工業(yè)及精密制造業(yè)的快速發(fā)展,高端儀器設(shè)備制造領(lǐng)域?qū)τ诰哂形⒊呒?xì)結(jié)構(gòu)的新型微器件需求廣泛,而現(xiàn)有檢測(cè)技術(shù)手段無法直接有效對(duì)該類微器件進(jìn)行評(píng)價(jià),嚴(yán)重制約了微細(xì)結(jié)構(gòu)的加工及相關(guān)技術(shù)領(lǐng)域的發(fā)展。目前,隨著探針傳感器技術(shù)的不斷發(fā)展,多芯光纖探針傳感器憑借其三維解耦與測(cè)量的優(yōu)點(diǎn),通過配合三坐標(biāo)測(cè)量機(jī)常用于微尺度測(cè)量。但是多芯光纖探針傳感器存在探針內(nèi)信號(hào)串?dāng)_、信號(hào)解調(diào)效率低及傳感器制作成本高等問題。本論文針對(duì)上述問題,提出一種用于微尺度測(cè)量的自組裝光纖光柵微尺度傳感器及其功率解調(diào)系統(tǒng),該微尺度傳感器采用普通單模光纖光柵利用自組裝原理進(jìn)行封裝制作,降低傳感器制作成本并有效克服信號(hào)串?dāng)_問題,解決現(xiàn)有探針傳感器制作成本高昂及探針內(nèi)信號(hào)串?dāng)_的問題,同時(shí)針對(duì)該微尺度傳感器設(shè)計(jì)了信號(hào)高速解調(diào)系統(tǒng),實(shí)現(xiàn)對(duì)傳感器輸出信號(hào)的快速解調(diào)。本文對(duì)光纖光柵探針自組裝原理、傳感器封裝制作、信號(hào)解調(diào)及測(cè)量系統(tǒng)設(shè)計(jì)進(jìn)行了詳細(xì)研究,最后實(shí)驗(yàn)測(cè)試了自組裝光纖光柵微尺度傳感器的性能。論文的主要研究?jī)?nèi)容如下:1.自組裝光纖光柵微尺度傳感器封裝研究。提出一種利用自組裝原理制作多芯光柵探針傳感器的方法,解決現(xiàn)有多芯光纖光柵探針傳感器存在成本高、信號(hào)串?dāng)_及傳輸損耗的問題。建立光纖光柵自組裝模型,對(duì)其自組裝原理進(jìn)行研究,驗(yàn)證單模光纖在液橋力作用自組裝形成多芯光纖的可行性;并封裝制作自組裝光纖光柵探針傳感器。2.光功率解調(diào)系統(tǒng)設(shè)計(jì)。設(shè)計(jì)基于差動(dòng)補(bǔ)償原理的光功率解調(diào)系統(tǒng),實(shí)現(xiàn)對(duì)探針傳感器兩路輸出信號(hào)的快速解調(diào),將解調(diào)效率提高10倍。設(shè)計(jì)新的參考光柵預(yù)應(yīng)力調(diào)整裝置,解決空氣擾動(dòng)及機(jī)械振動(dòng)等問題,將一分鐘穩(wěn)定性從原有的0.25%提高到0.07%,并測(cè)試得到光功率解調(diào)電路板的功率分辨率為7 p W。3.自組裝光纖光柵探針測(cè)量系統(tǒng)設(shè)計(jì)。針對(duì)自組裝光纖光柵探針微尺度測(cè)量需求,對(duì)測(cè)量框架的機(jī)械結(jié)構(gòu)進(jìn)行優(yōu)化;并編寫自組裝光纖光柵探針測(cè)量軟件,通過壓電陶瓷控制、電機(jī)驅(qū)動(dòng)器控制及串口通訊子程序,實(shí)現(xiàn)探針姿態(tài)自動(dòng)調(diào)整及微尺度自動(dòng)測(cè)量的功能。4.自組裝光纖光柵微尺度測(cè)量系統(tǒng)測(cè)試實(shí)驗(yàn):在設(shè)計(jì)的微尺度測(cè)量系統(tǒng)上,對(duì)測(cè)量系統(tǒng)及測(cè)量軟件的姿態(tài)調(diào)整功能進(jìn)行驗(yàn)證,結(jié)果顯示探針姿態(tài)實(shí)現(xiàn)自動(dòng)調(diào)整;然后對(duì)探針測(cè)量系統(tǒng)性能進(jìn)行了測(cè)試:實(shí)驗(yàn)驗(yàn)證了該傳感器具有正交解耦能力,且傳感組觸測(cè)靈敏度為非傳感組的100倍,得到系統(tǒng)的一分鐘穩(wěn)定性為30 nm,10分鐘穩(wěn)定性為60 nm。測(cè)量系統(tǒng)徑向分辨力30 nm,軸向分辨力為10 nm。系統(tǒng)重復(fù)性為90 nm。最后對(duì)發(fā)動(dòng)機(jī)上的微孔進(jìn)行測(cè)量,得到微孔直徑為282.8μm,k=2時(shí)測(cè)量結(jié)果的擴(kuò)展不確定度為0.4μm。本文通過對(duì)光纖光柵微尺度傳感器自組裝原理的研究及傳感器的封裝制作,解決了現(xiàn)有多芯光纖光柵探針傳感器在微尺度測(cè)量時(shí)存在的問題,為微尺度測(cè)量提供了新思路。
[Abstract]:With the rapid development of the modern processing industry and the precision manufacturing industry, the high-end instrument and equipment manufacturing field is widely used in the novel micro-device with the micro-scale fine structure, and the existing detection technology cannot directly and effectively evaluate the micro-device, The processing of the fine structure and the development of the related technical field are seriously restricted. At present, with the development of the probe sensor technology, the multi-core optical fiber probe sensor has the advantages of three-dimensional decoupling and measurement, and is used in the micro-scale measurement by the three-coordinate measuring machine. But the multi-core optical fiber probe sensor has the problems of signal crosstalk, low signal demodulation efficiency, high sensor manufacturing cost and the like in the probe. Aiming at the above problems, a self-assembled fiber grating micro-scale sensor for micro-scale measurement and a power demodulation system thereof are provided, The invention reduces the manufacturing cost of the sensor and effectively overcomes the problem of signal crosstalk, solves the problem of high manufacturing cost of the existing probe sensor and crosstalk of the signal in the probe, and simultaneously designs a signal high-speed demodulation system for the micro-scale sensor to realize the fast demodulation of the output signal of the sensor. In this paper, the self-assembly principle of the fiber grating probe, the manufacture of the sensor package, the signal demodulation and the design of the measurement system are studied in detail, and the performance of the self-assembled fiber grating micro-scale sensor is tested in the last experiment. The main contents of the thesis are as follows:1. Research on self-assembled fiber grating micro-scale sensor package. The invention provides a method for manufacturing a multi-core grating probe sensor by using a self-assembly principle, and solves the problems of high cost, signal crosstalk and transmission loss of the existing multi-core fiber grating probe sensor. The self-assembly model of the fiber grating is established, the self-assembly principle of the fiber grating is studied, the feasibility of self-assembly of the single-mode optical fiber on the self-assembly of the multi-core optical fiber is verified, and the self-assembled fiber grating probe sensor is packaged. The optical power demodulation system is designed. The optical power demodulation system based on the differential compensation principle is designed, and the fast demodulation of two output signals of the probe sensor is realized, and the demodulation efficiency is improved by 10 times. A new reference grating pre-stress adjusting device is designed to solve the problems of air disturbance and mechanical vibration. The stability of one-minute stability is increased from 0.25% to 0.07%, and the power resolution of the optical power demodulation circuit board is 7p W. Design of the self-assembled fiber grating probe measurement system. aiming at the micro-scale measurement requirement of the self-assembled fiber grating probe, the mechanical structure of the measuring frame is optimized; and the self-assembled optical fiber grating probe measuring software is prepared, So as to realize the function of automatic adjustment of the attitude of the probe and the automatic measurement of the micro-scale. Self-assembled fiber grating micro-scale measurement system test: on the design of the micro-scale measurement system, the attitude adjustment function of the measuring system and the measuring software is verified, the result shows that the probe attitude is automatically adjusted, and then the performance of the probe measurement system is tested: The experimental results show that the sensor has an orthogonal decoupling capability, and the sensing sensitivity of the sensing group is 100 times that of the non-sensing group, and the stability of the system is 30 nm and the stability of 10 minutes is 60 nm. The radial resolution of the measurement system is 30 nm and the axial resolution is 10 nm. The system repeatability was 90 nm. and finally, the micro-scale sensor on the engine is measured to obtain the extension uncertainty of the measurement result when the micropore diameter is 282.8. m u.m and k = 2, and the degree of expansion is not determined to be 0.4. m The problem of the existing multi-core fiber grating probe sensor in the micro-scale measurement is solved, and a new idea is provided for the micro-scale measurement.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN253;TP212

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