【摘要】：隨著高清手機(jī)、超級(jí)電腦、多功能電視的普及,印刷電路板(PCB)、薄膜晶體管顯示器(TFT-LCD)、氧化銦錫導(dǎo)電玻璃(ITO)的高精度光刻變得尤為關(guān)鍵,這使得與之相匹配的數(shù)字無(wú)掩膜光刻系統(tǒng)的研究和開(kāi)發(fā)就變得十分重要。另外,隨著食品包裝產(chǎn)業(yè)、高檔家電產(chǎn)業(yè)、高級(jí)汽車產(chǎn)業(yè)的興盛,市場(chǎng)對(duì)于毛化過(guò)后表面性能優(yōu)良的冷軋金屬板材需求量與日俱增,為了獲得性能更加優(yōu)良的各類冷軋薄板,軋輥表面激光毛化系統(tǒng)的研究和升級(jí)改良成為目前企業(yè)亟需解決的問(wèn)題。本文配合導(dǎo)師的國(guó)家自然基金項(xiàng)目和企業(yè)合作項(xiàng)目做了兩方面的內(nèi)容：前半部分從光刻的基礎(chǔ)理論出發(fā),分析了基于數(shù)字微反射鏡器件(DMD)的無(wú)掩膜光刻系統(tǒng)的幾個(gè)問(wèn)題,設(shè)計(jì)了一套高分辨率的數(shù)字光刻用鏡頭；本文后半部分分析了傳統(tǒng)聲光調(diào)Q型YAG激光毛化系統(tǒng)的缺陷和不足,從雙增益介質(zhì)腔的穩(wěn)定性出發(fā),提出了新型機(jī)械調(diào)Q方法。針對(duì)當(dāng)今市場(chǎng)上光刻線寬在3μm的高精度電路板和顯示器的要求,通過(guò)采用0.7XGA型DMD芯片作為空間光調(diào)制器(SLM),設(shè)計(jì)了一套分辨率達(dá)到2gm的數(shù)字光刻投影物鏡。通過(guò)利用光學(xué)設(shè)計(jì)軟件ZEMAX對(duì)其進(jìn)行建模、優(yōu)化和質(zhì)量評(píng)價(jià),結(jié)果有效的減少了DMD柵格效應(yīng)對(duì)空間數(shù)字掩模圖形的影響,同時(shí)能夠滿足數(shù)字投影光刻系統(tǒng)的各項(xiàng)光學(xué)指標(biāo)。本物鏡從經(jīng)典結(jié)構(gòu)出發(fā),提出采用一種新的非對(duì)稱式結(jié)構(gòu),使用較少的透鏡組成了一個(gè)具有較高分辨力、較大孔徑的數(shù)字投影光刻鏡頭。本物鏡系統(tǒng)在配合不同型號(hào)的DMD的基礎(chǔ)上可以滿足21μm以上的高精度數(shù)字光刻系統(tǒng)的各項(xiàng)要求,為高質(zhì)量空間圖像轉(zhuǎn)移提供了一種高效可行的途徑。針對(duì)如今企業(yè)對(duì)于固態(tài)脈沖YAG激光毛化軋輥高效率、高均勻性、高粗糙度、高無(wú)序性的要求,提出了光路變換加機(jī)械斬波調(diào)Q的新型脈沖激光毛化系統(tǒng)。由于傳統(tǒng)聲光調(diào)Q器件的自身特性決定了其高增益工作時(shí)衍射能力有限；脈沖能量低；脈寬窄,激光脈沖峰值過(guò)高；使得聲光調(diào)Q激光毛化在高效率、高粗糙度領(lǐng)域的冷軋帶鋼生產(chǎn)上遇到了困難。這樣的背景下提出：首先在雙增益介質(zhì)腔正中間用透鏡對(duì)腔內(nèi)光束整形,再通過(guò)斬波盤斬波的調(diào)Q方法。這種機(jī)械斬波調(diào)Q方法可以工作在激光腔的高增益狀態(tài)；提高了脈沖能量；加大了脈寬,降低了脈沖峰值；使得這種新型激光毛化系統(tǒng)的工作效率高、粗糙度范圍廣。
[Abstract]:With the popularity of high-definition mobile phones, supercomputers and multi-functional televisions, high-precision photolithography of printed circuit board (PCB), thin-film transistor displays (TFT-LCD) and indium tin conductive glass (ITO) has become particularly critical. This makes it very important to research and develop the matching digital mask lithography system. In addition, with the prosperity of food packaging industry, high-grade household appliances industry and advanced automobile industry, the market demand for cold-rolled metal sheet with excellent surface performance after wool is increasing day by day. In order to obtain various kinds of cold-rolled sheet with better performance, The research and upgrading of laser texturing system on roll surface has become an urgent problem to be solved by enterprises at present. Based on the basic theory of lithography, several problems of the mask-free lithography system based on digital micro-mirror device (DMD) are analyzed in the first half of this paper, which is based on the national nature fund project and the enterprise cooperation project of the mentor, and the first half is based on the basic theory of photolithography. A set of high resolution lenses for digital lithography is designed. In the second half of this paper, the defects and shortcomings of the traditional acousto-optic Q-switched YAG laser texturing system are analyzed. Based on the stability of the double-gain dielectric cavity, a new mechanical Q-switching method is proposed. Aiming at the requirement of high precision circuit board and display with linewidth of 3 渭 m in today's market, a set of digital lithography projection lens with resolution up to 2gm is designed by using 0.7XGA DMD chip as spatial light modulator (SLM),. By using the optical design software ZEMAX to model, optimize and evaluate its quality, the results effectively reduce the influence of the DMD grid effect on the spatial digital mask pattern, and can meet the various optical indexes of the digital projection lithography system at the same time. Starting from the classical structure of the objective lens, a new asymmetrical structure is proposed. A digital projection lithography lens with higher resolution and larger aperture is constructed by using fewer lenses. The objective lens system can meet the requirements of high-precision digital lithography system above 21 渭 m on the basis of different types of DMD, and provides an efficient and feasible way for high-quality spatial image transfer. In order to meet the requirement of high efficiency, high uniformity, high roughness and high disorder of solid-state pulsed YAG laser wool roller, a new pulse laser texturing system based on optical path transformation and mechanical chopper Q-switching is proposed. Because of the characteristic of traditional acousto-optic Q-switching device, the diffraction ability is limited, the pulse energy is low, the pulse width is narrow and the peak value of laser pulse is too high. It is difficult for acousto-optic Q-switched laser texturing to produce cold rolled strip in the field of high efficiency and high roughness. Under this background, a Q-switched method is proposed, in which the intracavity beam is shaped by a lens in the middle of a double-gain dielectric cavity and then chopped by a chopper. The mechanical chopper Q-switching method can work in the high gain state of the laser cavity; improve the pulse energy; increase the pulse width and reduce the pulse peak value; make the new laser worming system work efficiently and have a wide range of roughness.
【學(xué)位授予單位】：廣東工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN305.7

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