【摘要】：隨著高清手機、超級電腦、多功能電視的普及,印刷電路板(PCB)、薄膜晶體管顯示器(TFT-LCD)、氧化銦錫導電玻璃(ITO)的高精度光刻變得尤為關鍵,這使得與之相匹配的數(shù)字無掩膜光刻系統(tǒng)的研究和開發(fā)就變得十分重要。另外,隨著食品包裝產(chǎn)業(yè)、高檔家電產(chǎn)業(yè)、高級汽車產(chǎn)業(yè)的興盛,市場對于毛化過后表面性能優(yōu)良的冷軋金屬板材需求量與日俱增,為了獲得性能更加優(yōu)良的各類冷軋薄板,軋輥表面激光毛化系統(tǒng)的研究和升級改良成為目前企業(yè)亟需解決的問題。本文配合導師的國家自然基金項目和企業(yè)合作項目做了兩方面的內容：前半部分從光刻的基礎理論出發(fā),分析了基于數(shù)字微反射鏡器件(DMD)的無掩膜光刻系統(tǒng)的幾個問題,設計了一套高分辨率的數(shù)字光刻用鏡頭；本文后半部分分析了傳統(tǒng)聲光調Q型YAG激光毛化系統(tǒng)的缺陷和不足,從雙增益介質腔的穩(wěn)定性出發(fā),提出了新型機械調Q方法。針對當今市場上光刻線寬在3μm的高精度電路板和顯示器的要求,通過采用0.7XGA型DMD芯片作為空間光調制器(SLM),設計了一套分辨率達到2gm的數(shù)字光刻投影物鏡。通過利用光學設計軟件ZEMAX對其進行建模、優(yōu)化和質量評價,結果有效的減少了DMD柵格效應對空間數(shù)字掩模圖形的影響,同時能夠滿足數(shù)字投影光刻系統(tǒng)的各項光學指標。本物鏡從經(jīng)典結構出發(fā),提出采用一種新的非對稱式結構,使用較少的透鏡組成了一個具有較高分辨力、較大孔徑的數(shù)字投影光刻鏡頭。本物鏡系統(tǒng)在配合不同型號的DMD的基礎上可以滿足21μm以上的高精度數(shù)字光刻系統(tǒng)的各項要求,為高質量空間圖像轉移提供了一種高效可行的途徑。針對如今企業(yè)對于固態(tài)脈沖YAG激光毛化軋輥高效率、高均勻性、高粗糙度、高無序性的要求,提出了光路變換加機械斬波調Q的新型脈沖激光毛化系統(tǒng)。由于傳統(tǒng)聲光調Q器件的自身特性決定了其高增益工作時衍射能力有限；脈沖能量低；脈寬窄,激光脈沖峰值過高；使得聲光調Q激光毛化在高效率、高粗糙度領域的冷軋帶鋼生產(chǎn)上遇到了困難。這樣的背景下提出：首先在雙增益介質腔正中間用透鏡對腔內光束整形,再通過斬波盤斬波的調Q方法。這種機械斬波調Q方法可以工作在激光腔的高增益狀態(tài)；提高了脈沖能量；加大了脈寬,降低了脈沖峰值；使得這種新型激光毛化系統(tǒng)的工作效率高、粗糙度范圍廣。
[Abstract]:With the popularity of high-definition mobile phones, supercomputers and multi-functional televisions, high-precision photolithography of printed circuit board (PCB), thin-film transistor displays (TFT-LCD) and indium tin conductive glass (ITO) has become particularly critical. This makes it very important to research and develop the matching digital mask lithography system. In addition, with the prosperity of food packaging industry, high-grade household appliances industry and advanced automobile industry, the market demand for cold-rolled metal sheet with excellent surface performance after wool is increasing day by day. In order to obtain various kinds of cold-rolled sheet with better performance, The research and upgrading of laser texturing system on roll surface has become an urgent problem to be solved by enterprises at present. Based on the basic theory of lithography, several problems of the mask-free lithography system based on digital micro-mirror device (DMD) are analyzed in the first half of this paper, which is based on the national nature fund project and the enterprise cooperation project of the mentor, and the first half is based on the basic theory of photolithography. A set of high resolution lenses for digital lithography is designed. In the second half of this paper, the defects and shortcomings of the traditional acousto-optic Q-switched YAG laser texturing system are analyzed. Based on the stability of the double-gain dielectric cavity, a new mechanical Q-switching method is proposed. Aiming at the requirement of high precision circuit board and display with linewidth of 3 渭 m in today's market, a set of digital lithography projection lens with resolution up to 2gm is designed by using 0.7XGA DMD chip as spatial light modulator (SLM),. By using the optical design software ZEMAX to model, optimize and evaluate its quality, the results effectively reduce the influence of the DMD grid effect on the spatial digital mask pattern, and can meet the various optical indexes of the digital projection lithography system at the same time. Starting from the classical structure of the objective lens, a new asymmetrical structure is proposed. A digital projection lithography lens with higher resolution and larger aperture is constructed by using fewer lenses. The objective lens system can meet the requirements of high-precision digital lithography system above 21 渭 m on the basis of different types of DMD, and provides an efficient and feasible way for high-quality spatial image transfer. In order to meet the requirement of high efficiency, high uniformity, high roughness and high disorder of solid-state pulsed YAG laser wool roller, a new pulse laser texturing system based on optical path transformation and mechanical chopper Q-switching is proposed. Because of the characteristic of traditional acousto-optic Q-switching device, the diffraction ability is limited, the pulse energy is low, the pulse width is narrow and the peak value of laser pulse is too high. It is difficult for acousto-optic Q-switched laser texturing to produce cold rolled strip in the field of high efficiency and high roughness. Under this background, a Q-switched method is proposed, in which the intracavity beam is shaped by a lens in the middle of a double-gain dielectric cavity and then chopped by a chopper. The mechanical chopper Q-switching method can work in the high gain state of the laser cavity; improve the pulse energy; increase the pulse width and reduce the pulse peak value; make the new laser worming system work efficiently and have a wide range of roughness.
【學位授予單位】：廣東工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN305.7

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