金屬—介質(zhì)—半導(dǎo)體復(fù)合納米結(jié)構(gòu)光波導(dǎo)分束器設(shè)計(jì)和制備
發(fā)布時(shí)間：2019-01-21 09:16
【摘要】：對(duì)于集成光子芯片而言,微小型的光學(xué)部件是必要的基礎(chǔ)元件。分束器是一種非常重要的光學(xué)元件,并經(jīng)常被使用在光信息處理,光學(xué)計(jì)算,全息攝影和計(jì)量學(xué)中。表面等離激元(surface plasmons,SPs)——由電磁輻射激發(fā)的金屬表面的自由電子的集體連續(xù)振蕩所形成的電磁波,具有一系列的光學(xué)特性,例如對(duì)光的超強(qiáng)限域性,電磁場增強(qiáng)特性,對(duì)光的偏振敏感性等。因此低維的貴金屬納米結(jié)構(gòu),例如納米顆粒,納米線和納米薄膜,在眾多領(lǐng)域具有廣闊的應(yīng)用,其中包括表面增強(qiáng)光譜,光化學(xué)傳感,光信息處理等。但是由于金屬本身所固有的內(nèi)在損耗很大,單純地依靠表面等離激元來傳遞光學(xué)信號(hào)似乎并不是一個(gè)理想的選擇。而低維的半導(dǎo)體納米結(jié)構(gòu)由于其特殊的光學(xué)性質(zhì)和在納/微米級(jí)光學(xué)器件中潛在的應(yīng)用前景而成為裝配緊湊型光學(xué)元件的重要的結(jié)構(gòu)單元。尤其是通過化學(xué)氣相沉積法(CVD)合成的一維的納米線和納米帶,具有良好的單晶結(jié)構(gòu),高折射率和大的光學(xué)非線性性等特殊性質(zhì),為實(shí)現(xiàn)在亞波長的尺度上限域和波導(dǎo)光提供了良好的平臺(tái)。利用低維半導(dǎo)體納米材料內(nèi)的波導(dǎo)光與低維金屬納米材料耦合產(chǎn)生表面等離激元的作用或許能產(chǎn)生新穎或者更豐富的光學(xué)效應(yīng),為制備具有更優(yōu)良性能的光學(xué)元件開辟新的道路。當(dāng)然,一些將半導(dǎo)體納米材料與金屬納米顆粒相結(jié)合的混合納米結(jié)構(gòu)已經(jīng)被一些科研人員所制備出來,但是關(guān)于結(jié)合一維半導(dǎo)體材料和金屬納米顆粒的光波導(dǎo)分束器卻還未見報(bào)道。因此,我們設(shè)計(jì)和制備了一種基于新型的類似于三明治納米結(jié)構(gòu)的金屬-電介質(zhì)-半導(dǎo)體復(fù)合納米結(jié)構(gòu),實(shí)現(xiàn)了通過金屬納米顆粒調(diào)制半導(dǎo)體納米帶中波導(dǎo)光的功能。1.用化學(xué)氣相沉積法(CVD)生長出高質(zhì)量的硫化鎘(Cd S)納米帶,將生長的Cd S納米帶分散在刻有數(shù)字標(biāo)記的Si O2/Si襯底上,隨后用原子層沉積法在樣品表面鍍一層Hf O2層,再用電子束曝光(EBL)在樣品表面制備一定尺寸的金納米圓盤陣列,光學(xué)測試結(jié)果表明這種復(fù)合納米結(jié)構(gòu)使得Cd S納米帶中的波導(dǎo)光在納米帶的端部出射時(shí)被分裂成多個(gè)光點(diǎn),且出射光點(diǎn)的數(shù)量可由這種復(fù)合納米結(jié)構(gòu)的尺寸和結(jié)構(gòu)參數(shù)來控制。2.用基于有限元方法的數(shù)值模擬軟件(COMSOL Multiphysics)進(jìn)行了一系列相應(yīng)的數(shù)值模擬,模擬結(jié)果表明Cd S納米帶中的波導(dǎo)光激發(fā)納米帶上方的金納米圓盤陣列產(chǎn)生局域表面等離激元,由于局域表面等離激元具有較大的歐姆損耗,因此金納米圓盤陣列下方的波導(dǎo)光被減弱,從而使得納米帶中的波導(dǎo)光相當(dāng)于沿著被金納米圓盤分開的狹縫傳播形成多個(gè)波導(dǎo)光束,當(dāng)這些被分裂的波導(dǎo)光束傳播至沒有金納米圓盤覆蓋的空白納米帶區(qū)域時(shí),由于多光束之間的干涉效應(yīng),波導(dǎo)光可以進(jìn)一步被調(diào)制,最終在納米帶端部以多個(gè)光點(diǎn)的形式出射,出射光點(diǎn)的數(shù)目與實(shí)驗(yàn)很好地符合。
[Abstract]:Micro optical components are essential for integrated photonic chips. Beam splitter is a very important optical element, and is often used in optical information processing, optical computing, holography and metrology. Surface isotherm (surface plasmons,SPs)-an electromagnetic wave formed by the collective continuous oscillation of free electrons on a metal surface excited by electromagnetic radiation. It has a series of optical properties, such as superlimation of light, enhancement of electromagnetic field, Polarization sensitivity to light, etc. Therefore, low dimensional noble metal nanostructures, such as nanoparticles, nanowires and nanocrystals, have been widely used in many fields, including surface enhanced spectroscopy, photochemical sensing, optical information processing and so on. However, due to the inherent loss of metal itself, it seems that it is not an ideal choice to rely solely on surface isotherms to transmit optical signals. Because of their special optical properties and potential applications in nanometer-scale optical devices, low-dimensional semiconductor nanostructures have become important structural units for assembling compact optical elements. In particular, one-dimensional nanowires and nanobelts synthesized by chemical vapor deposition (CVD) have good single crystal structure, high refractive index and large optical nonlinearity. It provides a good platform for the realization of the upper bound domain of subwavelength and waveguide light. Using the coupling of waveguide light in low-dimensional semiconductor nanomaterials with low-dimensional metal nanomaterials to produce surface isoexcitators may produce novel or more abundant optical effects. It opens up a new way for the fabrication of optical elements with better performance. Of course, some of the mixed nanostructures that combine semiconductor nanomaterials with metal nanoparticles have been prepared by some researchers. However, optical waveguide beam splitters combined with one-dimensional semiconductor materials and metal nanoparticles have not been reported. Therefore, we design and fabricate a novel metal-dielectric semiconductor composite nanostructure based on sandwich nanostructures, which can modulate waveguide light in semiconductor nanobelts by metal nanoparticles. 1. High quality cadmium sulfide (Cd S) nanobelts were grown by chemical vapor deposition (CVD) method. The grown Cd S nanoliths were dispersed on digitally labeled Si O2/Si substrates. Then a layer of Hf O 2 was deposited on the surface of the samples by atomic layer deposition. Then (EBL) was used to fabricate the gold nanometer-disk array on the surface of the sample. The optical test results showed that the waveguide light in the Cd S nanobelts was split into a number of light spots when the end of the Cd S nanobelts was emitted. And the number of emitting light points can be controlled by the size and structure parameters of the composite nanostructures. 2. A series of corresponding numerical simulations have been carried out with the finite element method (FEM) based numerical simulation software (COMSOL Multiphysics). The simulation results show that the waveguide in the Cd S nanowires excites the gold nanodisk arrays above the nanobelts to produce local surface isoexcitators. Due to the large ohmic loss of the local surface isopherons, the waveguide light under the gold nanodisk array is weakened. So that the waveguide light in the nanobelts is equivalent to propagating along the slit separated by the gold nanorods to form a plurality of waveguide beams, when these splintered waveguide beams propagate to the blank nanbbons that are not covered by the gold nanorods, Because of the interference effect between the multi-beam, the waveguide light can be further modulated, and finally, the number of the light points in the end of the nanobanth is in the form of a number of light dots, which is in good agreement with the experiment.
【學(xué)位授予單位】：湖南大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN252
本文編號(hào)：2412512
[Abstract]:Micro optical components are essential for integrated photonic chips. Beam splitter is a very important optical element, and is often used in optical information processing, optical computing, holography and metrology. Surface isotherm (surface plasmons,SPs)-an electromagnetic wave formed by the collective continuous oscillation of free electrons on a metal surface excited by electromagnetic radiation. It has a series of optical properties, such as superlimation of light, enhancement of electromagnetic field, Polarization sensitivity to light, etc. Therefore, low dimensional noble metal nanostructures, such as nanoparticles, nanowires and nanocrystals, have been widely used in many fields, including surface enhanced spectroscopy, photochemical sensing, optical information processing and so on. However, due to the inherent loss of metal itself, it seems that it is not an ideal choice to rely solely on surface isotherms to transmit optical signals. Because of their special optical properties and potential applications in nanometer-scale optical devices, low-dimensional semiconductor nanostructures have become important structural units for assembling compact optical elements. In particular, one-dimensional nanowires and nanobelts synthesized by chemical vapor deposition (CVD) have good single crystal structure, high refractive index and large optical nonlinearity. It provides a good platform for the realization of the upper bound domain of subwavelength and waveguide light. Using the coupling of waveguide light in low-dimensional semiconductor nanomaterials with low-dimensional metal nanomaterials to produce surface isoexcitators may produce novel or more abundant optical effects. It opens up a new way for the fabrication of optical elements with better performance. Of course, some of the mixed nanostructures that combine semiconductor nanomaterials with metal nanoparticles have been prepared by some researchers. However, optical waveguide beam splitters combined with one-dimensional semiconductor materials and metal nanoparticles have not been reported. Therefore, we design and fabricate a novel metal-dielectric semiconductor composite nanostructure based on sandwich nanostructures, which can modulate waveguide light in semiconductor nanobelts by metal nanoparticles. 1. High quality cadmium sulfide (Cd S) nanobelts were grown by chemical vapor deposition (CVD) method. The grown Cd S nanoliths were dispersed on digitally labeled Si O2/Si substrates. Then a layer of Hf O 2 was deposited on the surface of the samples by atomic layer deposition. Then (EBL) was used to fabricate the gold nanometer-disk array on the surface of the sample. The optical test results showed that the waveguide light in the Cd S nanobelts was split into a number of light spots when the end of the Cd S nanobelts was emitted. And the number of emitting light points can be controlled by the size and structure parameters of the composite nanostructures. 2. A series of corresponding numerical simulations have been carried out with the finite element method (FEM) based numerical simulation software (COMSOL Multiphysics). The simulation results show that the waveguide in the Cd S nanowires excites the gold nanodisk arrays above the nanobelts to produce local surface isoexcitators. Due to the large ohmic loss of the local surface isopherons, the waveguide light under the gold nanodisk array is weakened. So that the waveguide light in the nanobelts is equivalent to propagating along the slit separated by the gold nanorods to form a plurality of waveguide beams, when these splintered waveguide beams propagate to the blank nanbbons that are not covered by the gold nanorods, Because of the interference effect between the multi-beam, the waveguide light can be further modulated, and finally, the number of the light points in the end of the nanobanth is in the form of a number of light dots, which is in good agreement with the experiment.
【學(xué)位授予單位】：湖南大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN252
【參考文獻(xiàn)】
相關(guān)期刊論文 前2條
1 S.Karthick Raja Namasivayam;Gnanendra Kumar E;Reepika R;;Synthesis of silver nanoparticles by Lactobaciluus acidophilus 01 strain and evaluation of its in vitro genomic DNA toxicity[J];Nano-Micro Letters;2010年03期
2 X.Y.Han;Y.H.Gao;X.H.Zhang;;One-dimensional Ga N nanomaterials transformed from one-dimensional Ga_2O_3 and Ga nanomaterials[J];Nano-Micro Letters;2009年01期
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