【摘要】：提出了一種基于八角度孤立空檢測標記的超高NA光刻投影物鏡高階波像差檢測方法。通過對八角度孤立空檢測標記的空間像進行主成分分析(PCA)和多元線性回歸分析,構(gòu)建了超高NA光刻投影物鏡的空間像光強分布與高階波像差之間的線性模型,并基于該模型實現(xiàn)了高階波像差的檢測。與使用六角度孤立空檢測標記的傳統(tǒng)方法相比,本方法提高了光瞳面波前的采樣效率,拓展了波像差檢測范圍,實現(xiàn)了超高NA光刻投影物鏡高階波像差(Z_5~Z_(64))的高精度檢測。光刻仿真軟件PROLITH的仿真結(jié)果表明,該方法可實現(xiàn)60項澤尼克系數(shù)(Z_5~Z_(64))的檢測,檢測精度優(yōu)于1.03×10~(-3)λ。
[Abstract]:A high order wave aberration detection method for ultra-high NA lithographic projection objective lens based on eight angle solitary space detection markers is proposed. Based on principal component analysis (PCA) and multivariate linear regression analysis, a linear model between spatial intensity distribution and higher-order wavefront aberration of ultra-high NA lithographic projection objective lens is constructed by using principal component analysis (PCA) and multivariate linear regression analysis. Based on this model, high order aberration detection is realized. Compared with the traditional method using six-angle solitary space detection, this method improves the sampling efficiency of pupil wavefront and extends the range of wave aberration detection. The high order wavefront aberration (Z5s) of ultra-high NA lithographic projection objective lens is detected with high precision. The simulation results of lithography simulation software PROLITH show that the method can detect 60 Zs _ (5) Z _ (64), and the detection accuracy is better than 1.03 脳 10 ~ (-3) 位.
【作者單位】： 中國科學院上海光學精密機械研究所信息光學與光電技術(shù)實驗室;中國科學院大學;上海微電子裝備有限公司;
【基金】：國家自然科學基金(61275207,61405210,61474129)
【分類號】：TN405

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