【摘要】：移相器是現(xiàn)代相控陣?yán)走_(dá)的關(guān)鍵部分之一,而所有類型移相器中,鐵氧體移相器由于其可承受功率大、品質(zhì)因數(shù)好等特點(diǎn),所以被大量應(yīng)用于相控陣?yán)走_(dá)中。隨著相控陣?yán)走_(dá)的快速發(fā)展,移相器向著小型化、高集成、高性能的方向發(fā)展,傳統(tǒng)結(jié)構(gòu)的鐵氧體移相器已滿足不了上述要求。LTCF工藝的發(fā)展給移相器也帶來了一種新的解決方案。因此本論文借助LTCF工藝研究新型的鐵氧體移相器,從而滿足現(xiàn)代鐵氧體移相器的要求。本論文按照材料、器件、工藝和電路四個(gè)方面展開研究。在材料方面:研究了燒結(jié)溫度、燒結(jié)位置和升溫速率對(duì)基于Fe_2O_3和Fe_3O_4兩種原料的LiZn鐵氧體的影響。結(jié)果表明:基于Fe_3O_4鐵氧體最佳燒結(jié)溫度為1100℃,比基于Fe_2O_3鐵氧體最佳燒結(jié)溫度要低50℃,取得的B_m、B_r、B_r/B_m和H_c分別為265mT、226.84 mT、0.86和255.76A/m。因此,基于Fe_3O_4鐵氧體要比基于Fe_2O_3鐵氧體在微波燒結(jié)特性要優(yōu)一些。在器件方面:通過ANSYS HFSS 15設(shè)計(jì)和優(yōu)化三款新穎閉鎖式鐵氧體移相器,分別基于帶狀線、微帶線和基片集成波導(dǎo)三種結(jié)構(gòu),并對(duì)三種結(jié)構(gòu)簡要作了小結(jié)。三種結(jié)構(gòu)的鐵氧體移相器均實(shí)現(xiàn)了小型化、易于集成的特點(diǎn)。SIW移相器具有最高的功率容量和品質(zhì)因數(shù),帶狀線移相器具有最小的尺寸,微帶線移相器可靠性最高,最容易加工,最后我選擇了微帶線移相器進(jìn)行了加工。在工藝方面:利用固相法制備了5kg鐵氧體原料,利用LTCF工藝加工了基于微帶線結(jié)構(gòu)的鐵氧體生磁基板,并對(duì)生磁基板燒結(jié)進(jìn)行了七組燒結(jié)實(shí)驗(yàn)摸索和總結(jié)。結(jié)果表明:燒結(jié)時(shí)應(yīng)注意選擇合適的壓重重量和燒結(jié)溫度。最佳燒結(jié)溫度在895℃-910℃之間、最佳壓重重量在750g-950g之間。在電路方面:根據(jù)鐵氧體移相基本原理設(shè)計(jì)、加工和調(diào)試了基于FPGA的驅(qū)動(dòng)硬件電路,并且也為該硬件電路編寫和調(diào)試了Verilog軟件代碼。最后通過示波器和矢量網(wǎng)絡(luò)分析儀給出了軟件代碼、硬件電路和移相器的驗(yàn)證測(cè)試結(jié)果。測(cè)試結(jié)果如下:移相器1-1、2-4和3-2的最大相移量分別為370.82°、282.75°和20°。移相器3-2在8 GHz-11GHz,插損大于-6dB,回?fù)p小于-13dB。
[Abstract]:Phase shifter is one of the key parts of modern phased array radar. In all types of phase shifters, ferrite phase shifters are widely used in phased array radars because of their high withstand power and good quality factor. With the rapid development of phased array radar, phase shifter is developing towards miniaturization, high integration and high performance. The traditional ferrite phase shifter can not meet the above requirements. The development of LTCF process has brought a new solution to the phase shifter. In this paper, a new ferrite phase shifter is studied by means of LTCF process to meet the requirements of modern ferrite phase shifter. In this paper, materials, devices, processes and circuits are studied. In material aspect, the influence of sintering temperature, sintering position and heating rate on LiZn ferrite based on Fe_2O_3 and Fe_3O_4 was studied. The results show that the optimum sintering temperature of Fe_3O_4 ferrite is 1100 鈩，

本文編號(hào)：2396758