高分辨LCOPA相移分布自動檢測方法研究
發(fā)布時(shí)間:2018-12-31 11:48
【摘要】:隨著激光技術(shù)的快速發(fā)展,液晶光學(xué)相控陣(LCOPA)已經(jīng)成為波控技術(shù)中的代表之一,作為一種實(shí)時(shí)可編程的電控波束掃描技術(shù),具有其他技術(shù)無可匹敵的優(yōu)勢:功耗低、重量輕、控制靈活等。但其在最大偏轉(zhuǎn)角度、效率以及有效孔徑等方面均有明顯不足。目前的相位差檢測只是針對均勻相控器件,而有效檢測液晶相控陣器件的二維相位差分布情況,可以為其進(jìn)一步發(fā)展或應(yīng)用提供依據(jù)。本論文以液晶相控陣器件的二維相位差高分辨檢測為目的,利用常規(guī)四分之一波片法的檢測優(yōu)勢,研究光路中數(shù)據(jù)采集技術(shù)以及正弦曲線形式的數(shù)據(jù)處理算法,提出了傅里葉四分之一波片法。該檢測法對1/4波片、液晶相控陣器件進(jìn)行了實(shí)驗(yàn)分析,實(shí)現(xiàn)了二維相控器件的二維高分辨檢測。創(chuàng)新性地將圖像處理算法運(yùn)用于二維相位差的匹配以及融合過程中,解決了液晶相控陣器件的大視場檢測問題。主要研究內(nèi)容如下:1)基于常規(guī)四分之一波片法,通過添加顯微物鏡、CCD、步進(jìn)電機(jī)等實(shí)現(xiàn)檢測自動化,并研究了DFT算法計(jì)算有效頻率分量的最小值,提出了傅里葉四分之一波片法。并對檢測裝置進(jìn)行三維立體設(shè)計(jì),提高檢測可靠性。2)以最小二乘法為基本原理的擬合算法與離散傅里葉算法在理論、仿真、檢測實(shí)驗(yàn)上進(jìn)行了對比分析,離散傅里葉變換算法(DFT)具有較高的效率與精度。運(yùn)用傅里葉四分之一波片法分別對1/4波片、液晶相控陣器件進(jìn)行了檢測實(shí)驗(yàn),1/4波片法的平均檢測誤差小于0.3°,檢測液晶相控陣的二維相位差可得到3μm電極、間隔子以及相位凹陷的具體影響。從而驗(yàn)證了傅里葉四分之一波片法在二維相位差高分辨檢測上的有效性。3)運(yùn)用圖像處理算法中的Hough變換算法、Radon變換算法、線性回歸算法,對二維相位差的傾斜角度問題進(jìn)行了研究。理論上分析了臨近插值算法、二維插值算法、雙三次插值算法實(shí)現(xiàn)相位差分布的無失真糾斜問題。針對二維相位差數(shù)據(jù)的拼接問題,分別分析了基于區(qū)域的匹配算法與基于Harris特征的匹配算法,解決匹配位置的計(jì)算問題,然后對比中值平均法等,采用了加權(quán)平均法對重疊區(qū)域的數(shù)據(jù)融合處理,實(shí)現(xiàn)了拼接中的無縫合成。
[Abstract]:With the rapid development of laser technology, liquid crystal optical phased array (LCOPA) has become one of the representative of wave control technology. As a real-time programmable electronic control beam scanning technology, it has the unparalleled advantages of other technologies: low power consumption. Light weight, flexible control, etc. However, its maximum deflection angle, efficiency and effective aperture are obviously insufficient. The current phase difference detection is only for homogeneous phase control devices, but the effective detection of the two-dimensional phase difference distribution of liquid crystal phased array devices can provide a basis for its further development or application. The purpose of this paper is to detect the two-dimensional phase difference high resolution of liquid crystal phased array devices, and to study the data acquisition technology and sinusoidal data processing algorithm based on the conventional 1/4 wave plate method. Fourier 1/4 wave plate method is proposed. The method is used to analyze the 1 / 4 wave plate and liquid crystal phased array devices, and the two-dimensional high resolution detection of the two dimensional phase control devices is realized. The image processing algorithm is innovatively applied to the matching and fusion of two-dimensional phase difference, which solves the problem of large field of view detection of liquid crystal phased array devices. The main research contents are as follows: 1) based on the conventional 1/4 wave plate method, the detection automation is realized by adding micro objective lens and CCD, step motor, and the minimum value of effective frequency component is calculated by DFT algorithm. Fourier 1/4 wave plate method is proposed. In order to improve the reliability of the detection system, 3D design is carried out. 2) the fitting algorithm based on the least square method and the discrete Fourier algorithm are compared and analyzed in theory, simulation and test experiment. The discrete Fourier transform (DFT) algorithm has high efficiency and accuracy. The 1 / 4 wave plate and liquid crystal phased array device are tested by Fourier 1/4 wave plate method. The average detection error of 1 / 4 wave plate method is less than 0.3 擄, and the 3 渭 m electrode can be obtained by detecting the two-dimensional phase difference of liquid crystal phased array. The specific effects of spacers and phase indentation. Thus, the validity of Fourier 1/4 wave plate method in high resolution detection of two-dimensional phase difference is verified. 3) the Hough transform algorithm, Radon transform algorithm and linear regression algorithm are used in image processing algorithm. The tilting angle of two-dimensional phase difference is studied. In this paper, we analyze approximate interpolation algorithm, two-dimensional interpolation algorithm and bicubic interpolation algorithm to realize the distortion correction problem of phase difference distribution. In order to solve the problem of two dimensional phase difference data splicing, the region based matching algorithm and the Harris feature based matching algorithm are analyzed respectively to solve the problem of calculating the matching position, and then the median average method is compared, and so on. The method of weighted average is used to deal with the data fusion of overlapped regions, and the seamless composition in stitching is realized.
【學(xué)位授予單位】:電子科技大學(xué)
【學(xué)位級別】:碩士
【學(xué)位授予年份】:2015
【分類號】:TP391.41;TN249
本文編號:2396530
[Abstract]:With the rapid development of laser technology, liquid crystal optical phased array (LCOPA) has become one of the representative of wave control technology. As a real-time programmable electronic control beam scanning technology, it has the unparalleled advantages of other technologies: low power consumption. Light weight, flexible control, etc. However, its maximum deflection angle, efficiency and effective aperture are obviously insufficient. The current phase difference detection is only for homogeneous phase control devices, but the effective detection of the two-dimensional phase difference distribution of liquid crystal phased array devices can provide a basis for its further development or application. The purpose of this paper is to detect the two-dimensional phase difference high resolution of liquid crystal phased array devices, and to study the data acquisition technology and sinusoidal data processing algorithm based on the conventional 1/4 wave plate method. Fourier 1/4 wave plate method is proposed. The method is used to analyze the 1 / 4 wave plate and liquid crystal phased array devices, and the two-dimensional high resolution detection of the two dimensional phase control devices is realized. The image processing algorithm is innovatively applied to the matching and fusion of two-dimensional phase difference, which solves the problem of large field of view detection of liquid crystal phased array devices. The main research contents are as follows: 1) based on the conventional 1/4 wave plate method, the detection automation is realized by adding micro objective lens and CCD, step motor, and the minimum value of effective frequency component is calculated by DFT algorithm. Fourier 1/4 wave plate method is proposed. In order to improve the reliability of the detection system, 3D design is carried out. 2) the fitting algorithm based on the least square method and the discrete Fourier algorithm are compared and analyzed in theory, simulation and test experiment. The discrete Fourier transform (DFT) algorithm has high efficiency and accuracy. The 1 / 4 wave plate and liquid crystal phased array device are tested by Fourier 1/4 wave plate method. The average detection error of 1 / 4 wave plate method is less than 0.3 擄, and the 3 渭 m electrode can be obtained by detecting the two-dimensional phase difference of liquid crystal phased array. The specific effects of spacers and phase indentation. Thus, the validity of Fourier 1/4 wave plate method in high resolution detection of two-dimensional phase difference is verified. 3) the Hough transform algorithm, Radon transform algorithm and linear regression algorithm are used in image processing algorithm. The tilting angle of two-dimensional phase difference is studied. In this paper, we analyze approximate interpolation algorithm, two-dimensional interpolation algorithm and bicubic interpolation algorithm to realize the distortion correction problem of phase difference distribution. In order to solve the problem of two dimensional phase difference data splicing, the region based matching algorithm and the Harris feature based matching algorithm are analyzed respectively to solve the problem of calculating the matching position, and then the median average method is compared, and so on. The method of weighted average is used to deal with the data fusion of overlapped regions, and the seamless composition in stitching is realized.
【學(xué)位授予單位】:電子科技大學(xué)
【學(xué)位級別】:碩士
【學(xué)位授予年份】:2015
【分類號】:TP391.41;TN249
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