基于跑道型諧振腔固支梁式加速度傳感器的理論研究
發(fā)布時(shí)間：2018-12-26 06:32
【摘要】：微納光纖既不同于普通的光纖,也不同于集成光波導(dǎo),是一種由空氣為包層、二氧化硅等材料為芯層的光纖。這種微納光纖由于本身所具有的大比例倏逝波傳輸,使得其具有強(qiáng)倏逝波耦合、低彎曲損耗、高色散區(qū)等特性。相比較于普通光纖,微納光纖尺寸更小、損耗更低、耦合強(qiáng)度更強(qiáng);相比較于集成光波導(dǎo),微納光纖的制作工藝更為簡(jiǎn)單可行。并且,由微納光纖構(gòu)成的環(huán)形諧振腔具有低損耗和品質(zhì)因數(shù)高的特點(diǎn),從而微納光纖環(huán)形諧振腔可以作為一種高靈敏度的光學(xué)傳感器。微納光纖與硅MEMS傳感結(jié)構(gòu)相結(jié)合構(gòu)成的MOEMS加速度傳感器是一種體積小、質(zhì)量輕、靈敏度高且動(dòng)態(tài)范圍大的加速度傳感器。主要工作為:先對(duì)本課題的研究背景及意義進(jìn)行了簡(jiǎn)要的介紹,對(duì)微納光纖的發(fā)展現(xiàn)狀、環(huán)形諧振腔的應(yīng)用領(lǐng)域以及基于微納光纖環(huán)形諧振腔加速度傳感器的研究現(xiàn)狀進(jìn)行了簡(jiǎn)要的分析。之后在對(duì)微納光纖模式及能量分布分析的基礎(chǔ)上對(duì)微納光纖環(huán)形諧振腔的相關(guān)理論及特性進(jìn)行了分析,并重點(diǎn)分析了自耦合系數(shù)t、傳輸損耗因子τ以及微環(huán)有效折射率n對(duì)微納光纖環(huán)形諧振腔傳輸特性的影響。提出了一種基于新型的微納光纖跑道型諧振腔的雙端固支梁加速度傳感器:分析了跑道型諧振腔的傳輸理論和諧振原理、雙端固支梁的受力、傳感器的傳感原理、傳感器的靈敏度。對(duì)跑道型諧振腔在不同有效折射率下的光場(chǎng)分布圖和雙端固支梁的模態(tài)進(jìn)行了仿真,驗(yàn)證了可以通過(guò)檢測(cè)波長(zhǎng)漂移和光強(qiáng)度的方式實(shí)現(xiàn)對(duì)加速度的測(cè)量,并通過(guò)MATLAB仿真軟件對(duì)這兩種檢測(cè)方法進(jìn)行了具體的仿真分析,得出固支梁的結(jié)構(gòu)參數(shù)是影響傳感器靈敏度的重要因素。本文最后對(duì)微納光纖以及微納光纖跑道型諧振腔的實(shí)驗(yàn)制備過(guò)程進(jìn)行了簡(jiǎn)要的介紹。采用酒精熔融拉制法制備了直徑約為2μm的微納光纖,且用此微納光纖制備了跑道型諧振腔,闡述了具體的制備過(guò)程以及需要注意的事項(xiàng)。并驗(yàn)證了微納光纖跑道型諧振腔的光譜特性與理論分析所得基本一致。
[Abstract]:Micro-nano fiber is not only different from ordinary optical fiber, but also different from integrated optical waveguide. It is a kind of fiber with air as cladding and silicon dioxide as core layer. Due to its large proportion of evanescent wave transmission, the micro-nano fiber has the characteristics of strong evanescent wave coupling, low bending loss and high dispersion region. Compared with ordinary optical fiber, micro-nano fiber is smaller in size, lower in loss and stronger in coupling strength. Compared with integrated optical waveguide, the fabrication process of micro-nano fiber is simpler and more feasible. Furthermore, the ring resonator composed of micro-nano fiber has the characteristics of low loss and high quality factor, so the micro-nano fiber ring resonator can be used as an optical sensor with high sensitivity. The MOEMS accelerometer, which is composed of micro-nano fiber and silicon MEMS sensor structure, is a kind of acceleration sensor with small volume, light weight, high sensitivity and wide dynamic range. The main work is as follows: firstly, the research background and significance of this subject are briefly introduced, and the development status of micro-nano fiber is introduced. The application field of ring resonator and the research status of accelerometer based on micro-nano fiber ring resonator are briefly analyzed. Then, based on the analysis of the mode and energy distribution of micro-nano fiber, the related theory and characteristics of micro-nano fiber ring resonator are analyzed, and the self-coupling coefficient t _ (2) is emphatically analyzed. The effects of transmission loss factor 蟿 and effective refractive index n of microring on the propagation characteristics of micro nano fiber ring resonator. In this paper, a new type of accelerometer based on micro and nano fiber optic racetrack resonator is proposed. The transmission theory and resonant principle of runway resonator, the force acting on double end fixed beam, the sensing principle of sensor are analyzed. The sensitivity of the sensor. The field distribution of the racetrack resonator at different effective refractive index and the mode of the double-end clamped beam are simulated. It is proved that the acceleration can be measured by detecting the wavelength drift and the light intensity. The two methods are simulated and analyzed by MATLAB simulation software. It is concluded that the structural parameters of the clamped beam are the important factors affecting the sensitivity of the sensor. Finally, the fabrication process of micro-nano fiber and micro-nano fiber racetrack resonator is briefly introduced. The micro-nano fiber with diameter of about 2 渭 m was prepared by alcohol melt drawing method, and the raceway resonator was fabricated by the micro-nano fiber. The preparation process and the matters needing attention were described. The spectral characteristics of the micro-nano fiber racetrack resonator are in good agreement with the theoretical analysis.
【學(xué)位授予單位】：燕山大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TP212;TN253
本文編號(hào)：2391665
[Abstract]:Micro-nano fiber is not only different from ordinary optical fiber, but also different from integrated optical waveguide. It is a kind of fiber with air as cladding and silicon dioxide as core layer. Due to its large proportion of evanescent wave transmission, the micro-nano fiber has the characteristics of strong evanescent wave coupling, low bending loss and high dispersion region. Compared with ordinary optical fiber, micro-nano fiber is smaller in size, lower in loss and stronger in coupling strength. Compared with integrated optical waveguide, the fabrication process of micro-nano fiber is simpler and more feasible. Furthermore, the ring resonator composed of micro-nano fiber has the characteristics of low loss and high quality factor, so the micro-nano fiber ring resonator can be used as an optical sensor with high sensitivity. The MOEMS accelerometer, which is composed of micro-nano fiber and silicon MEMS sensor structure, is a kind of acceleration sensor with small volume, light weight, high sensitivity and wide dynamic range. The main work is as follows: firstly, the research background and significance of this subject are briefly introduced, and the development status of micro-nano fiber is introduced. The application field of ring resonator and the research status of accelerometer based on micro-nano fiber ring resonator are briefly analyzed. Then, based on the analysis of the mode and energy distribution of micro-nano fiber, the related theory and characteristics of micro-nano fiber ring resonator are analyzed, and the self-coupling coefficient t _ (2) is emphatically analyzed. The effects of transmission loss factor 蟿 and effective refractive index n of microring on the propagation characteristics of micro nano fiber ring resonator. In this paper, a new type of accelerometer based on micro and nano fiber optic racetrack resonator is proposed. The transmission theory and resonant principle of runway resonator, the force acting on double end fixed beam, the sensing principle of sensor are analyzed. The sensitivity of the sensor. The field distribution of the racetrack resonator at different effective refractive index and the mode of the double-end clamped beam are simulated. It is proved that the acceleration can be measured by detecting the wavelength drift and the light intensity. The two methods are simulated and analyzed by MATLAB simulation software. It is concluded that the structural parameters of the clamped beam are the important factors affecting the sensitivity of the sensor. Finally, the fabrication process of micro-nano fiber and micro-nano fiber racetrack resonator is briefly introduced. The micro-nano fiber with diameter of about 2 渭 m was prepared by alcohol melt drawing method, and the raceway resonator was fabricated by the micro-nano fiber. The preparation process and the matters needing attention were described. The spectral characteristics of the micro-nano fiber racetrack resonator are in good agreement with the theoretical analysis.
【學(xué)位授予單位】：燕山大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TP212;TN253
【參考文獻(xiàn)】
相關(guān)期刊論文 前1條
1 陳曜;丁玉麗;何鵬程;;高Q值跑道型光學(xué)環(huán)腔的理論研究[J];廣西大學(xué)學(xué)報(bào)(自然科學(xué)版);2013年02期
相關(guān)博士學(xué)位論文 前1條
1 莫文琴;基于微環(huán)諧振器的光學(xué)加速度地震檢波器的研究[D];華中科技大學(xué);2011年
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